KR100377973B1 - 클러스터 툴 로봇용 시간 최적 궤도 - Google Patents

클러스터 툴 로봇용 시간 최적 궤도 Download PDF

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Publication number
KR100377973B1
KR100377973B1 KR1019970706851A KR19970706851A KR100377973B1 KR 100377973 B1 KR100377973 B1 KR 100377973B1 KR 1019970706851 A KR1019970706851 A KR 1019970706851A KR 19970706851 A KR19970706851 A KR 19970706851A KR 100377973 B1 KR100377973 B1 KR 100377973B1
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South Korea
Prior art keywords
trajectory
acceleration
arm
point
motor
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Expired - Lifetime
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KR1019970706851A
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Korean (ko)
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KR19980703447A (ko
Inventor
마아크 루카스 브라이언
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브룩스 오토메이션 인코퍼레이티드
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B3/00—Recording by mechanical cutting, deforming or pressing, e.g. of grooves or pits; Reproducing by mechanical sensing; Record carriers therefor
    • G11B3/02—Arrangements of heads
    • G11B3/10—Arranging, supporting, or driving of heads or of transducers relatively to record carriers
    • G11B3/34—Driving or guiding during transducing operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66B—ELEVATORS; ESCALATORS OR MOVING WALKWAYS
    • B66B1/00—Control systems of elevators in general
    • B66B1/24—Control systems with regulation, i.e. with retroactive action, for influencing travelling speed, acceleration, or deceleration
    • B66B1/28—Control systems with regulation, i.e. with retroactive action, for influencing travelling speed, acceleration, or deceleration electrical
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40454—Max velocity, acceleration limit for workpiece and arm jerk rate as constraints
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40517—Constraint motion planning, variational dynamic programming

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  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Evolutionary Computation (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Manipulator (AREA)
  • Numerical Control (AREA)
  • Control Of Position Or Direction (AREA)
KR1019970706851A 1995-03-31 1996-02-16 클러스터 툴 로봇용 시간 최적 궤도 Expired - Lifetime KR100377973B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/414,340 1995-03-31
US08/414,340 US5655060A (en) 1995-03-31 1995-03-31 Time optimal trajectory for cluster tool robots
US8/414,340 1995-03-31

Publications (2)

Publication Number Publication Date
KR19980703447A KR19980703447A (ko) 1998-11-05
KR100377973B1 true KR100377973B1 (ko) 2003-08-19

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KR1019970706851A Expired - Lifetime KR100377973B1 (ko) 1995-03-31 1996-02-16 클러스터 툴 로봇용 시간 최적 궤도

Country Status (8)

Country Link
US (2) US5655060A (enExample)
EP (1) EP0861487B1 (enExample)
JP (1) JP3690811B2 (enExample)
KR (1) KR100377973B1 (enExample)
AU (1) AU4868696A (enExample)
DE (1) DE69627879T2 (enExample)
TW (1) TW399008B (enExample)
WO (1) WO1996030896A1 (enExample)

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KR20180099726A (ko) * 2015-12-14 2018-09-05 가와사끼 쥬고교 가부시끼 가이샤 기판 반송 로봇 및 그 운전 방법

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US5655060A (en) * 1995-03-31 1997-08-05 Brooks Automation Time optimal trajectory for cluster tool robots
JP3105544B2 (ja) * 1996-03-18 2000-11-06 株式会社小松製作所 ワーク搬送システムの制御装置
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US6190103B1 (en) 1999-03-31 2001-02-20 Gasonics International Corporation Wafer transfer device and method
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US6216058B1 (en) * 1999-05-28 2001-04-10 Brooks Automation, Inc. System of trajectory planning for robotic manipulators based on pre-defined time-optimum trajectory shapes
KR100551806B1 (ko) * 1999-09-06 2006-02-13 동경 엘렉트론 주식회사 반도체 처리용 반송 장치 및 수용 장치와, 반도체 처리시스템
US6856863B1 (en) 2000-07-27 2005-02-15 Applied Materials, Inc. Method and apparatus for automatic calibration of robots
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US6918731B2 (en) * 2001-07-02 2005-07-19 Brooks Automation, Incorporated Fast swap dual substrate transport for load lock
WO2003007129A2 (en) * 2001-07-13 2003-01-23 Broks Automation, Inc. Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm
US6850386B2 (en) 2001-07-18 2005-02-01 Seagate Technology Llc Control object positioning using an optimum jerk profile to reduce excitation of mechanical resonances
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US7012391B2 (en) * 2002-08-09 2006-03-14 Seagate Technology Llc Motor acceleration using continuous sequence of current limit values
US6873490B2 (en) * 2002-10-10 2005-03-29 Seagate Technology Llc Control object positioning using jerk, current and time optimized control profiles
US7130716B2 (en) * 2003-04-22 2006-10-31 Berkeley Process Control, Inc. System of path planning for robotic manipulators based on maximum acceleration and finite jerk constraints
US20050107909A1 (en) * 2003-11-14 2005-05-19 Siemens Technology-To-Business Center Llc Systems and methods for programming motion control
US20050107911A1 (en) * 2003-11-14 2005-05-19 Siemens Technology-To-Business Center Llc Systems and methods for controlling load motion actuators
US20050065633A1 (en) * 2003-11-14 2005-03-24 Michael Wynblatt Systems and methods for relative control of load motion actuators
US6988020B2 (en) * 2003-11-14 2006-01-17 International Business Machines Corporation Method and apparatus to move an accessor within a data storage and retrieval system
JP4304133B2 (ja) * 2004-07-30 2009-07-29 東芝機械株式会社 産業用ロボットの移動時間表示装置
US7208898B2 (en) * 2005-06-22 2007-04-24 The Board Of Regents For Oklahoma State University Near time-optimal jerk trajectory for positioning a control object
CN100358097C (zh) * 2005-08-05 2007-12-26 中微半导体设备(上海)有限公司 半导体工艺处理系统及其处理方法
WO2007061603A2 (en) * 2005-11-21 2007-05-31 Applied Materials, Inc. Methods and apparatus for transferring substrates during electronic device manufacturing
EP1870211B1 (en) * 2006-06-22 2019-02-27 Honda Research Institute Europe GmbH Method for controlling a robot by assessing the fitness of a plurality of simulated behaviours
KR101343892B1 (ko) * 2008-06-10 2013-12-20 무라다기카이가부시끼가이샤 패러렐 메카니즘
WO2010013732A1 (ja) * 2008-08-01 2010-02-04 株式会社アルバック 搬送ロボットのティーチング方法
DE102009023307A1 (de) * 2009-05-29 2010-12-02 Kuka Roboter Gmbh Verfahren und Vorrichtung zur Steuerung eines Manipulators
JP5743437B2 (ja) * 2009-07-09 2015-07-01 キヤノン株式会社 露光装置、露光方法、搬送方法及びデバイスの製造方法
KR101749515B1 (ko) * 2010-10-27 2017-06-21 삼성전자 주식회사 모터 속도 제어 장치 및 그 방법
US9517558B2 (en) 2011-09-02 2016-12-13 Brooks Automation Inc. Time-optimal trajectories for robotic transfer devices
US8874258B2 (en) 2011-09-13 2014-10-28 Persimmon Technologies Corporation Method for transporting a substrate with a substrate support
JP2013091080A (ja) * 2011-10-26 2013-05-16 Amada Co Ltd ワーク移送方法及びワーク移送装置
JP6128767B2 (ja) * 2012-07-05 2017-05-17 キヤノン株式会社 ロボット制御装置、及びロボット制御方法
US9864822B2 (en) * 2012-10-22 2018-01-09 Guedel Group Ag Method for the determination of workpiece transport trajectories in a multiple station press
JP5908544B2 (ja) 2014-08-11 2016-04-26 ファナック株式会社 駆動軸のジャークを低下させるロボットプログラムを生成するロボットプログラム生成装置
US10073908B2 (en) * 2015-06-15 2018-09-11 International Business Machines Corporation Functional space-time trajectory clustering
US10580681B2 (en) * 2016-07-10 2020-03-03 Yaskawa America Inc. Robotic apparatus and method for transport of a workpiece
JP7170181B2 (ja) * 2017-09-04 2022-11-14 パナソニックＩｐマネジメント株式会社 ロボット制御装置
DE102017011334A1 (de) * 2017-12-08 2019-06-13 Kuka Deutschland Gmbh Abfahren einer vorgegebenen Arbeitsbahn mit einem Roboter
CN109765851B (zh) * 2019-02-15 2021-02-05 大族激光科技产业集团股份有限公司 轨迹运动的速度计算方法、装置、存储介质及计算机设备
JP6983206B2 (ja) * 2019-10-15 2021-12-17 株式会社アルバック 基板搬送装置、および、基板搬送方法
US11498213B2 (en) * 2020-09-23 2022-11-15 Applied Materials, Inc. Robot joint space graph path planning and move execution

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Publication number Priority date Publication date Assignee Title
KR20180099726A (ko) * 2015-12-14 2018-09-05 가와사끼 쥬고교 가부시끼 가이샤 기판 반송 로봇 및 그 운전 방법
KR102115690B1 (ko) 2015-12-14 2020-05-27 가와사끼 쥬고교 가부시끼 가이샤 기판 반송 로봇 및 그 운전 방법

Also Published As

Publication number Publication date
US5655060A (en) 1997-08-05
US6002971A (en) 1999-12-14
AU4868696A (en) 1996-10-16
KR19980703447A (ko) 1998-11-05
JPH11503369A (ja) 1999-03-26
TW399008B (en) 2000-07-21
EP0861487B1 (en) 2003-05-02
DE69627879D1 (de) 2003-06-05
DE69627879T2 (de) 2003-12-24
EP0861487A1 (en) 1998-09-02
EP0861487A4 (enExample) 1998-09-02
JP3690811B2 (ja) 2005-08-31
WO1996030896A1 (en) 1996-10-03

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