KR100377597B1 - 워크 반송 장치 - Google Patents
워크 반송 장치 Download PDFInfo
- Publication number
- KR100377597B1 KR100377597B1 KR10-2000-0043446A KR20000043446A KR100377597B1 KR 100377597 B1 KR100377597 B1 KR 100377597B1 KR 20000043446 A KR20000043446 A KR 20000043446A KR 100377597 B1 KR100377597 B1 KR 100377597B1
- Authority
- KR
- South Korea
- Prior art keywords
- work
- feeder
- workpiece
- supply path
- turntable
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Abstract
Description
Claims (3)
- 워크(work)를 직선상으로 공급하는 공급로를 갖는 피더(feeder)와,피더의 하류측에 배설되고, 피더로부터 공급되는 워크를 수납하는 워크 수납용 오목부가 외주(外周)에 설치된 턴 테이블을 구비하고,턴 테이블의 아래쪽에 피더로부터 공급되는 워크를 턴 테이블의 오목부 내로 흡인하는 흡인구를 설치하고,피더의 공급로에 선두의 워크를 정지시키는 스토퍼를 진퇴 가능하게 설치하는 동시에, 피더의 공급로에 제2번째의 워크를 정지시키는 세퍼레이터 핀을 진퇴 가능하게 공급로 위쪽의 커버에 설치한 것을 특징으로 하는 워크 반송 장치.
- 제1항에 있어서,피더의 공급로에 제3번째의 워크를 전방을 향해서 압압하여 정지시키는 푸시 핀을 진퇴 가능하게 설치한 것을 특징으로 하는 워크 반송 장치.
- 제2항에 있어서푸시 핀은 유연재료로 되고, 푸시 핀은 제3번째의 워크에 맞닿았을 때 휘어져서 제3번째의 워크를 제2번째의 워크에 밀어붙이는 것을 특징으로 하는 워크 반송 장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000145089A JP2001322715A (ja) | 2000-05-17 | 2000-05-17 | ワーク搬送装置 |
JP2000-145089 | 2000-05-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010105137A KR20010105137A (ko) | 2001-11-28 |
KR100377597B1 true KR100377597B1 (ko) | 2003-03-29 |
Family
ID=18651648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2000-0043446A KR100377597B1 (ko) | 2000-05-17 | 2000-07-27 | 워크 반송 장치 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2001322715A (ko) |
KR (1) | KR100377597B1 (ko) |
TW (1) | TW508981B (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004331342A (ja) * | 2003-05-09 | 2004-11-25 | Tokyo Weld Co Ltd | ワーク搬送装置 |
JP5028589B2 (ja) * | 2006-10-10 | 2012-09-19 | 株式会社 東京ウエルズ | ワーク排出装置 |
JP5777909B2 (ja) * | 2011-03-02 | 2015-09-09 | 株式会社ユニテック | ワーク受渡装置及びワーク受渡方法 |
JP5679195B2 (ja) * | 2011-05-27 | 2015-03-04 | 株式会社 東京ウエルズ | ワーク搬送検査装置およびワーク搬送検査方法 |
KR101253112B1 (ko) * | 2011-09-28 | 2013-04-10 | 가부시키가이샤 도쿄 웰드 | 워크 반송 장치 |
TWI447060B (zh) * | 2011-10-05 | 2014-08-01 | Tokyo Weld Co Ltd | Workpiece handling equipment |
JP6987400B2 (ja) * | 2019-09-26 | 2022-01-05 | 株式会社 東京ウエルズ | ワーク搬送装置およびワーク搬送方法 |
-
2000
- 2000-05-17 JP JP2000145089A patent/JP2001322715A/ja active Pending
- 2000-07-27 KR KR10-2000-0043446A patent/KR100377597B1/ko active IP Right Grant
- 2000-08-04 TW TW089115732A patent/TW508981B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW508981B (en) | 2002-11-01 |
KR20010105137A (ko) | 2001-11-28 |
JP2001322715A (ja) | 2001-11-20 |
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