KR100366552B1 - 에어나이프 건조장치 - Google Patents
에어나이프 건조장치 Download PDFInfo
- Publication number
- KR100366552B1 KR100366552B1 KR1020010014321A KR20010014321A KR100366552B1 KR 100366552 B1 KR100366552 B1 KR 100366552B1 KR 1020010014321 A KR1020010014321 A KR 1020010014321A KR 20010014321 A KR20010014321 A KR 20010014321A KR 100366552 B1 KR100366552 B1 KR 100366552B1
- Authority
- KR
- South Korea
- Prior art keywords
- air knife
- glass substrate
- air
- cleaning liquid
- pure water
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (3)
- 유리기판을 건조하기 위한 에어나이프 건조장치에 있어서,상기 에어나이프 건조장치가 상단 에어나이프와 하단 에어나이프로 이루어지고, 상기 상하단 에어나이프는 서로 V자형의 대칭 구조를 띠고 있으며, 각각은 본체의 일측에 형성되어 에어가 흡입되는 흡입구와, 상기 흡입구를 통한 에어를 배출하는 배출구 및 상기 배출구의 크기를 조절하기 위한 슬릿조정부를 포함하여 이루어진 것을 특징으로 하는 에어나이프 건조장치.
- 제1항에 있어서, 상기 에어나이프의 V자 돌출부가 상기 유리기판의 진행 방향과 같은 방향을 따르도록 구성되어, 상기 유리기판 상에 잔존하는 세정액을 유리기판의 중앙으로 유도하여 제거하는 것을 특징으로 하는 에어나이프 건조장치.
- 제1항에 있어서, 상기 에어나이프의 V자 돌출부가 상기 유리기판의 진행 방향과 반대 방향을 따르도록 구성되어, 상기 유리기판 상에 잔존하는 세정액을 유리기판의 양 모서리로 유도하여 제거하는 것을 특징으로 하는 에어나이프 건조장치.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010014321A KR100366552B1 (ko) | 2001-03-20 | 2001-03-20 | 에어나이프 건조장치 |
DE10130999A DE10130999A1 (de) | 2000-06-29 | 2001-06-27 | Multifunktions-Reinigungsmodul einer Herstellungseinrichtung für Flachbildschirme und Reinigungsgerät mit Verwendung desselben |
US09/894,625 US6564421B2 (en) | 2000-06-29 | 2001-06-28 | Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same |
TW090115854A TW592842B (en) | 2000-06-29 | 2001-06-28 | Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same |
JP2001198261A JP2002172369A (ja) | 2000-06-29 | 2001-06-29 | 平板ディスプレイ製造装置の多機能洗浄モジュール及びこれを利用した洗浄装置 |
FR0108709A FR2810908B1 (fr) | 2000-06-29 | 2001-06-29 | Module de nettoyage multifonctions d'un appareil de fabrication pour ecran plat et appareil de nettoyage utilisant celui-ci |
CNB011232781A CN1221331C (zh) | 2000-06-29 | 2001-06-29 | 多功能清洗模块及应用该模块的清洗设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010014321A KR100366552B1 (ko) | 2001-03-20 | 2001-03-20 | 에어나이프 건조장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010044721A KR20010044721A (ko) | 2001-06-05 |
KR100366552B1 true KR100366552B1 (ko) | 2002-12-31 |
Family
ID=19707144
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020010014321A KR100366552B1 (ko) | 2000-06-29 | 2001-03-20 | 에어나이프 건조장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100366552B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100547909B1 (ko) * | 2003-07-03 | 2006-01-31 | 주식회사 디엠에스 | 평판 디스플레이 패널용 기판 건조장치 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3868804B2 (ja) * | 2001-11-27 | 2007-01-17 | アルプス電気株式会社 | 基板乾燥装置及びそれを用いた基板乾燥方法 |
KR102047299B1 (ko) * | 2018-03-26 | 2019-11-22 | 유영상 | 포장용 박스 제조장치 |
-
2001
- 2001-03-20 KR KR1020010014321A patent/KR100366552B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100547909B1 (ko) * | 2003-07-03 | 2006-01-31 | 주식회사 디엠에스 | 평판 디스플레이 패널용 기판 건조장치 |
Also Published As
Publication number | Publication date |
---|---|
KR20010044721A (ko) | 2001-06-05 |
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