KR100355254B1 - Positive type radiation-sensitive mixture - Google Patents
Positive type radiation-sensitive mixture Download PDFInfo
- Publication number
- KR100355254B1 KR100355254B1 KR1019940002535A KR19940002535A KR100355254B1 KR 100355254 B1 KR100355254 B1 KR 100355254B1 KR 1019940002535 A KR1019940002535 A KR 1019940002535A KR 19940002535 A KR19940002535 A KR 19940002535A KR 100355254 B1 KR100355254 B1 KR 100355254B1
- Authority
- KR
- South Korea
- Prior art keywords
- positive type
- acid
- type radiation
- sensitive mixture
- compound
- Prior art date
Links
- 239000000203 mixture Substances 0.000 title abstract 3
- 230000005855 radiation Effects 0.000 title abstract 3
- 239000002253 acid Substances 0.000 abstract 2
- 239000012670 alkaline solution Substances 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- 206010073306 Exposure to radiation Diseases 0.000 abstract 1
- 150000003868 ammonium compounds Chemical class 0.000 abstract 1
- 239000011230 binding agent Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- -1 sulfonium compound Chemical class 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP02575393A JP3300089B2 (ja) | 1993-02-15 | 1993-02-15 | ポジ型放射感応性混合物 |
JP5025751A JPH06242605A (ja) | 1993-02-15 | 1993-02-15 | ポジ型放射感応性混合物 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100355254B1 true KR100355254B1 (en) | 2003-03-31 |
Family
ID=26363435
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940002535A KR100355254B1 (en) | 1993-02-15 | 1994-02-14 | Positive type radiation-sensitive mixture |
Country Status (5)
Country | Link |
---|---|
US (2) | US5525453A (ko) |
EP (1) | EP0611998B1 (ko) |
KR (1) | KR100355254B1 (ko) |
DE (1) | DE69425389T2 (ko) |
TW (1) | TW434457B (ko) |
Families Citing this family (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4306069A1 (de) * | 1993-03-01 | 1994-09-08 | Basf Ag | Strahlungsempfindliches Gemisch und Verfahren zur Herstellung von Reliefstrukturen mit verbessertem Kontrast |
DE4408318C2 (de) * | 1993-03-12 | 1999-09-09 | Toshiba Kk | Positiv arbeitende Lichtempfindliche Zusammensetzung |
KR960015081A (ko) * | 1993-07-15 | 1996-05-22 | 마쯔모또 에이이찌 | 화학증폭형 레지스트 조성물 |
JP3317597B2 (ja) * | 1994-10-18 | 2002-08-26 | 富士写真フイルム株式会社 | ポジ型感光性組成物 |
US5683856A (en) * | 1994-10-18 | 1997-11-04 | Fuji Photo Film Co., Ltd. | Positive-working photosensitive composition |
JP3549592B2 (ja) * | 1994-11-02 | 2004-08-04 | クラリアント インターナショナル リミテッド | 放射線感応性組成物 |
JPH08262720A (ja) * | 1995-03-28 | 1996-10-11 | Hoechst Ind Kk | 可塑剤を含む放射線感応性組成物 |
US5609989A (en) * | 1995-06-06 | 1997-03-11 | International Business Machines, Corporation | Acid scavengers for use in chemically amplified photoresists |
US5952150A (en) * | 1995-06-08 | 1999-09-14 | Jsr Corporation | Radiation sensitive resin composition |
JP2956824B2 (ja) * | 1995-06-15 | 1999-10-04 | 東京応化工業株式会社 | ポジ型レジスト膜形成用塗布液 |
JP3045274B2 (ja) * | 1995-06-15 | 2000-05-29 | 東京応化工業株式会社 | ポジ型化学増幅型レジスト組成物 |
DE19533608A1 (de) * | 1995-09-11 | 1997-03-13 | Basf Ag | Positivarbeitendes strahlungsempfindliches Gemisch und Verfahren zur Herstellung von Reliefstrukturen |
DE19533607A1 (de) * | 1995-09-11 | 1997-03-13 | Basf Ag | Positivarbeitendes strahlungsempfindliches Gemisch und Verfahren zur Herstellung von Reliefstrukturen |
JP3073149B2 (ja) | 1995-10-30 | 2000-08-07 | 東京応化工業株式会社 | ポジ型レジスト組成物 |
TW477913B (en) * | 1995-11-02 | 2002-03-01 | Shinetsu Chemical Co | Sulfonium salts and chemically amplified positive resist compositions |
US5879856A (en) * | 1995-12-05 | 1999-03-09 | Shipley Company, L.L.C. | Chemically amplified positive photoresists |
DE69800164T2 (de) * | 1997-03-31 | 2000-10-05 | Fuji Photo Film Co., Ltd. | Positiv-arbeitende photoempfindliche Zusammensetzung |
DE59806493D1 (de) | 1997-04-23 | 2003-01-16 | Infineon Technologies Ag | Chemisch verstärkter Resist |
US5866299A (en) * | 1997-06-18 | 1999-02-02 | Shipley Company, L.L.C. | Negative photoresist composition |
US6358672B2 (en) * | 1998-02-05 | 2002-03-19 | Samsung Electronics Co., Ltd. | Method of forming semiconductor device pattern including cross-linking and flow baking a positive photoresist |
JP3955384B2 (ja) * | 1998-04-08 | 2007-08-08 | Azエレクトロニックマテリアルズ株式会社 | 化学増幅型レジスト組成物 |
US6127089A (en) * | 1998-08-28 | 2000-10-03 | Advanced Micro Devices, Inc. | Interconnect structure with low k dielectric materials and method of making the same with single and dual damascene techniques |
US6852466B2 (en) | 1998-12-23 | 2005-02-08 | Shipley Company, L.L.C. | Photoresist compositions particularly suitable for short wavelength imaging |
SG78412A1 (en) | 1999-03-31 | 2001-02-20 | Ciba Sc Holding Ag | Oxime derivatives and the use thereof as latent acids |
US6365322B1 (en) | 1999-12-07 | 2002-04-02 | Clariant Finance (Bvi) Limited | Photoresist composition for deep UV radiation |
KR100550936B1 (ko) * | 1999-12-08 | 2006-02-13 | 제일모직주식회사 | 히드록시스티렌계 포토레지스트 조성물의 제조방법 및그에 의해 수득된 포토레지스트 조성물 |
JP3972568B2 (ja) * | 2000-05-09 | 2007-09-05 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物及びスルホニウム塩 |
ATE420767T1 (de) * | 2000-11-30 | 2009-01-15 | Fujifilm Corp | Lithographische druckplattenvorläufer |
US7192681B2 (en) | 2001-07-05 | 2007-03-20 | Fuji Photo Film Co., Ltd. | Positive photosensitive composition |
JP3917422B2 (ja) * | 2001-07-26 | 2007-05-23 | 富士フイルム株式会社 | 画像形成材料 |
US20040067435A1 (en) * | 2002-09-17 | 2004-04-08 | Fuji Photo Film Co., Ltd. | Image forming material |
DE10243742B4 (de) * | 2002-09-20 | 2007-11-08 | Qimonda Ag | Verfahren zur Strukturierung von Halbleitersubstraten unter Verwendung eines Fotoresists |
US7160667B2 (en) * | 2003-01-24 | 2007-01-09 | Fuji Photo Film Co., Ltd. | Image forming material |
JP4081677B2 (ja) * | 2003-05-21 | 2008-04-30 | 信越化学工業株式会社 | レジスト材料及びパターン形成方法 |
JP4029288B2 (ja) * | 2003-05-21 | 2008-01-09 | 信越化学工業株式会社 | レジスト材料及びパターン形成方法 |
JP4009852B2 (ja) * | 2003-05-21 | 2007-11-21 | 信越化学工業株式会社 | 塩基性化合物、レジスト材料及びパターン形成方法 |
JP4346358B2 (ja) * | 2003-06-20 | 2009-10-21 | Necエレクトロニクス株式会社 | 化学増幅型レジスト組成物およびそれを用いた半導体装置の製造方法、パターン形成方法 |
JP4612999B2 (ja) | 2003-10-08 | 2011-01-12 | 富士フイルム株式会社 | ポジ型レジスト組成物及びそれを用いたパターン形成方法 |
JP4494060B2 (ja) | 2004-03-30 | 2010-06-30 | 東京応化工業株式会社 | ポジ型レジスト組成物 |
JP4524154B2 (ja) | 2004-08-18 | 2010-08-11 | 富士フイルム株式会社 | 化学増幅型レジスト組成物及びそれを用いたパターン形成方法 |
JP4784760B2 (ja) * | 2006-10-20 | 2011-10-05 | 信越化学工業株式会社 | レジスト材料及びパターン形成方法 |
KR100839357B1 (ko) * | 2006-11-27 | 2008-06-19 | 삼성전자주식회사 | 패턴 형성 방법 및 커패시터 제조 방법 |
US8153346B2 (en) | 2007-02-23 | 2012-04-10 | Fujifilm Electronic Materials, U.S.A., Inc. | Thermally cured underlayer for lithographic application |
US20100136477A1 (en) | 2008-12-01 | 2010-06-03 | Ng Edward W | Photosensitive Composition |
JP5746829B2 (ja) * | 2009-04-06 | 2015-07-08 | 富士フイルム株式会社 | 感活性光線性または感放射線性樹脂組成物及びそれを用いたパターン形成方法 |
US10377692B2 (en) * | 2009-09-09 | 2019-08-13 | Sumitomo Chemical Company, Limited | Photoresist composition |
JP5516384B2 (ja) * | 2010-01-05 | 2014-06-11 | 住友化学株式会社 | レジスト組成物 |
EP2539316B1 (en) | 2010-02-24 | 2019-10-23 | Basf Se | Latent acids and their use |
KR20120066924A (ko) * | 2010-12-15 | 2012-06-25 | 제일모직주식회사 | 오르토-니트로벤질 에스테르 화합물 및 이를 포함하는 포지티브형 감광성 수지 조성물 |
JP6006999B2 (ja) * | 2012-06-20 | 2016-10-12 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法 |
EP3253735B1 (en) | 2015-02-02 | 2021-03-31 | Basf Se | Latent acids and their use |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4329480A (en) * | 1978-03-31 | 1982-05-11 | The Dow Chemical Company | Cyclic meta-sulfonium-phenoxide zwitterions |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3620786A (en) * | 1969-08-27 | 1971-11-16 | Dow Chemical Co | Starch and cellulosic products treated with water-soluble sulfonium derivatives of diphenyl ether |
US4491628A (en) * | 1982-08-23 | 1985-01-01 | International Business Machines Corporation | Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone |
US4933377A (en) * | 1988-02-29 | 1990-06-12 | Saeva Franklin D | Novel sulfonium salts and the use thereof as photoinitiators |
US5114473A (en) * | 1988-08-25 | 1992-05-19 | Union Carbide Chemicals And Plastics Technology Corporation | Transition metal recovery |
US5047568A (en) * | 1988-11-18 | 1991-09-10 | International Business Machines Corporation | Sulfonium salts and use and preparation thereof |
JPH0451243A (ja) * | 1990-06-20 | 1992-02-19 | Hitachi Ltd | パターン形成方法 |
US5334316A (en) * | 1990-10-10 | 1994-08-02 | Brigham Young University | Process of using polytetraalkylammonium and polytrialkylamine-containing ligands bonded to inorganic supports for removing and concentrating desired ions from solutions |
DE4111283A1 (de) * | 1991-04-08 | 1992-10-15 | Basf Ag | Strahlungsempfindliches gemisch, enthaltend saeurelabile gruppierungen und verfahren zur herstellung von reliefmustern und reliefbildern |
US5378802A (en) * | 1991-09-03 | 1995-01-03 | Ocg Microelectronic Materials, Inc. | Method for removing impurities from resist components and novolak resins |
JPH05127369A (ja) * | 1991-10-31 | 1993-05-25 | Nec Corp | レジスト材料 |
US5443736A (en) * | 1993-10-20 | 1995-08-22 | Shipley Company Inc. | Purification process |
-
1994
- 1994-02-14 KR KR1019940002535A patent/KR100355254B1/ko not_active IP Right Cessation
- 1994-02-15 DE DE69425389T patent/DE69425389T2/de not_active Expired - Lifetime
- 1994-02-15 US US08/196,810 patent/US5525453A/en not_active Expired - Lifetime
- 1994-02-15 EP EP94102284A patent/EP0611998B1/en not_active Expired - Lifetime
- 1994-06-28 TW TW083105864A patent/TW434457B/zh not_active IP Right Cessation
-
1997
- 1997-07-29 US US08/902,072 patent/US5843319A/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4329480A (en) * | 1978-03-31 | 1982-05-11 | The Dow Chemical Company | Cyclic meta-sulfonium-phenoxide zwitterions |
Also Published As
Publication number | Publication date |
---|---|
US5525453A (en) | 1996-06-11 |
EP0611998B1 (en) | 2000-08-02 |
US5843319A (en) | 1998-12-01 |
EP0611998A3 (en) | 1995-11-29 |
DE69425389D1 (de) | 2000-09-07 |
EP0611998A2 (en) | 1994-08-24 |
TW434457B (en) | 2001-05-16 |
DE69425389T2 (de) | 2001-02-01 |
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