KR100344334B1 - 플라즈마 발생장치 - Google Patents

플라즈마 발생장치 Download PDF

Info

Publication number
KR100344334B1
KR100344334B1 KR1020007015080A KR20007015080A KR100344334B1 KR 100344334 B1 KR100344334 B1 KR 100344334B1 KR 1020007015080 A KR1020007015080 A KR 1020007015080A KR 20007015080 A KR20007015080 A KR 20007015080A KR 100344334 B1 KR100344334 B1 KR 100344334B1
Authority
KR
South Korea
Prior art keywords
plasma
substrate
cathode
coating
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020007015080A
Other languages
English (en)
Korean (ko)
Inventor
잉-펭후
제임스씨.토우
Original Assignee
더 다우 케미칼 캄파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 더 다우 케미칼 캄파니 filed Critical 더 다우 케미칼 캄파니
Priority claimed from PCT/US1993/009527 external-priority patent/WO1994008574A1/en
Application granted granted Critical
Publication of KR100344334B1 publication Critical patent/KR100344334B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Paints Or Removers (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
KR1020007015080A 1992-12-21 1993-10-05 플라즈마 발생장치 Expired - Lifetime KR100344334B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US07/994,381 1992-12-21
US07/994,381 US5298587A (en) 1992-12-21 1992-12-21 Protective film for articles and method
PCT/US1993/009527 WO1994008574A1 (en) 1992-10-13 1993-10-12 Treatment of cachexia and inhibition of il-6 activity

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1019950702547A Division KR100299403B1 (ko) 1992-12-21 1993-10-05 물품보호막및이를제공하는방법

Publications (1)

Publication Number Publication Date
KR100344334B1 true KR100344334B1 (ko) 2002-07-22

Family

ID=25540605

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1019950702547A Expired - Lifetime KR100299403B1 (ko) 1992-12-21 1993-10-05 물품보호막및이를제공하는방법
KR1020007015079A Expired - Lifetime KR100360579B1 (ko) 1992-12-21 1993-10-05 규소-탄소 중합체가 접착된 표면을 갖는 기판 적층물
KR1020007015080A Expired - Lifetime KR100344334B1 (ko) 1992-12-21 1993-10-05 플라즈마 발생장치

Family Applications Before (2)

Application Number Title Priority Date Filing Date
KR1019950702547A Expired - Lifetime KR100299403B1 (ko) 1992-12-21 1993-10-05 물품보호막및이를제공하는방법
KR1020007015079A Expired - Lifetime KR100360579B1 (ko) 1992-12-21 1993-10-05 규소-탄소 중합체가 접착된 표면을 갖는 기판 적층물

Country Status (9)

Country Link
US (2) US5298587A (enExample)
EP (1) EP0674722B1 (enExample)
JP (1) JP3488458B2 (enExample)
KR (3) KR100299403B1 (enExample)
CA (1) CA2147486C (enExample)
DE (1) DE69318424T2 (enExample)
MX (1) MX9306910A (enExample)
TW (2) TW375536B (enExample)
WO (1) WO1994014998A1 (enExample)

Families Citing this family (125)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5567661A (en) * 1993-08-26 1996-10-22 Fujitsu Limited Formation of planarized insulating film by plasma-enhanced CVD of organic silicon compound
US5677051A (en) * 1993-11-30 1997-10-14 Tdk Corporation Magnetic recording medium having a specified plasma polymerized hydrogen containing carbon film and lubricant
EP0693975B2 (en) * 1994-02-16 2003-07-30 The Coca-Cola Company Hollow containers with inert or impermeable inner surface through plasma-assisted surface reaction or on-surface polymerization
US6149982A (en) * 1994-02-16 2000-11-21 The Coca-Cola Company Method of forming a coating on an inner surface
US5487920A (en) * 1994-04-19 1996-01-30 The Boc Group, Inc. Process for plasma-enhanced chemical vapor deposition of anti-fog and anti-scratch coatings onto various substrates
DE69607619T2 (de) * 1995-06-22 2000-11-16 Grant Rheal Cool Oberflächenmodifikation von polymeren und kohlenstoffhaltigen materialen
EP0752483A1 (de) * 1995-06-28 1997-01-08 ANTEC Angewandte Neue Technologien GmbH Verfahren zur Beschichtung von Gegenständen aus Metall oder Kunststoff
JPH11513713A (ja) * 1995-10-13 1999-11-24 ザ ダウ ケミカル カンパニー コートされたプラスチック基材
US5783452A (en) * 1996-02-02 1998-07-21 University Of Washington Covered microchannels and the microfabrication thereof
AUPN820396A0 (en) * 1996-02-21 1996-03-14 Commonwealth Scientific And Industrial Research Organisation Method for reducing crazing in a plastics material
US6514573B2 (en) * 1996-02-21 2003-02-04 Commonwealth Scientific And Industrial Research Organisation Method for reducing crazing in a plastics material
US5993598A (en) * 1996-07-30 1999-11-30 The Dow Chemical Company Magnetron
US5900284A (en) * 1996-07-30 1999-05-04 The Dow Chemical Company Plasma generating device and method
US5989998A (en) 1996-08-29 1999-11-23 Matsushita Electric Industrial Co., Ltd. Method of forming interlayer insulating film
FR2756292B1 (fr) * 1996-11-26 1998-12-24 Saint Gobain Vitrage Procede de preparation d'une feuille en matiere plastique, cette feuille et vitrage la comportant
US6110544A (en) 1997-06-26 2000-08-29 General Electric Company Protective coating by high rate arc plasma deposition
WO1999004911A1 (en) * 1997-07-28 1999-02-04 Massachusetts Institute Of Technology Pyrolytic chemical vapor deposition of silicone films
US6203898B1 (en) * 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating
US6055929A (en) * 1997-09-24 2000-05-02 The Dow Chemical Company Magnetron
AU9586198A (en) 1997-10-01 1999-04-23 Dow Chemical Company, The Dual face shower head electrode for a magnetron plasma generating apparatu
US6660656B2 (en) * 1998-02-11 2003-12-09 Applied Materials Inc. Plasma processes for depositing low dielectric constant films
US6287990B1 (en) 1998-02-11 2001-09-11 Applied Materials, Inc. CVD plasma assisted low dielectric constant films
US6627532B1 (en) * 1998-02-11 2003-09-30 Applied Materials, Inc. Method of decreasing the K value in SiOC layer deposited by chemical vapor deposition
US6303523B2 (en) 1998-02-11 2001-10-16 Applied Materials, Inc. Plasma processes for depositing low dielectric constant films
US6593247B1 (en) 1998-02-11 2003-07-15 Applied Materials, Inc. Method of depositing low k films using an oxidizing plasma
US6054379A (en) * 1998-02-11 2000-04-25 Applied Materials, Inc. Method of depositing a low k dielectric with organo silane
US6147009A (en) * 1998-06-29 2000-11-14 International Business Machines Corporation Hydrogenated oxidized silicon carbon material
US6245690B1 (en) * 1998-11-04 2001-06-12 Applied Materials, Inc. Method of improving moisture resistance of low dielectric constant films
DE19901834A1 (de) * 1999-01-19 2000-07-20 Leybold Systems Gmbh Verfahren zum Beschichten von Substraten aus Kunststoff
US6520650B2 (en) 1999-02-08 2003-02-18 Valeo Sylvania L.C.C. Lamp reflector with a barrier coating of a plasma polymer
US6517341B1 (en) * 1999-02-26 2003-02-11 General Electric Company Method to prevent recession loss of silica and silicon-containing materials in combustion gas environments
US6261694B1 (en) 1999-03-17 2001-07-17 General Electric Company Infrared reflecting coatings
US6420032B1 (en) 1999-03-17 2002-07-16 General Electric Company Adhesion layer for metal oxide UV filters
US6517687B1 (en) 1999-03-17 2003-02-11 General Electric Company Ultraviolet filters with enhanced weatherability and method of making
US6365016B1 (en) 1999-03-17 2002-04-02 General Electric Company Method and apparatus for arc plasma deposition with evaporation of reagents
US6426125B1 (en) 1999-03-17 2002-07-30 General Electric Company Multilayer article and method of making by ARC plasma deposition
US6582823B1 (en) * 1999-04-30 2003-06-24 North Carolina State University Wear-resistant polymeric articles and methods of making the same
US6376064B1 (en) * 1999-12-13 2002-04-23 General Electric Company Layered article with improved microcrack resistance and method of making
US6743516B2 (en) 2000-09-29 2004-06-01 Guardian Industries Corporation Highly durable hydrophobic coatings and methods
US6258735B1 (en) 2000-10-05 2001-07-10 Applied Materials, Inc. Method for using bypass lines to stabilize gas flow and maintain plasma inside a deposition chamber
US6531398B1 (en) 2000-10-30 2003-03-11 Applied Materials, Inc. Method of depositing organosillicate layers
WO2002057611A1 (en) 2001-01-18 2002-07-25 Dow Global Technologies Inc. Adhesively bonded valve cover cylinder head assembly
US6709721B2 (en) 2001-03-28 2004-03-23 Applied Materials Inc. Purge heater design and process development for the improvement of low k film properties
US6543404B2 (en) 2001-04-04 2003-04-08 Dow Global Technologies, Inc. Adhesively bonded engine intake manifold assembly
JP2003011661A (ja) * 2001-06-25 2003-01-15 Exatec Llc 自動車用固定グレイジングを提供するためのパネルおよび方法
US6733714B2 (en) * 2001-08-13 2004-05-11 Edwin J. Oakey Method for forming high-impact, transparent, distortion-free polymeric material
BR0212192A (pt) * 2001-08-15 2004-10-05 Dow Global Technologies Inc Conjunto para interior veicular
WO2003031362A1 (en) * 2001-10-05 2003-04-17 Dow Global Technologies Inc. Coated glass for use in displays and other electronic devices
US6838393B2 (en) * 2001-12-14 2005-01-04 Applied Materials, Inc. Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide
US6890850B2 (en) * 2001-12-14 2005-05-10 Applied Materials, Inc. Method of depositing dielectric materials in damascene applications
US6613389B2 (en) * 2001-12-26 2003-09-02 Dow Global Technologies, Inc. Coating process and composition for same
US20030183245A1 (en) * 2002-04-01 2003-10-02 Min-Shyan Sheu Surface silanization
US20030206337A1 (en) * 2002-05-06 2003-11-06 Eastman Kodak Company Exposure apparatus for irradiating a sensitized substrate
US6860010B2 (en) 2002-05-15 2005-03-01 Dow Global Technologies, Inc. Method of forming an automotive valve cover with integral positive crankcase ventilation
US6927178B2 (en) * 2002-07-11 2005-08-09 Applied Materials, Inc. Nitrogen-free dielectric anti-reflective coating and hardmask
US7105460B2 (en) * 2002-07-11 2006-09-12 Applied Materials Nitrogen-free dielectric anti-reflective coating and hardmask
US7128373B2 (en) * 2002-09-27 2006-10-31 Dow Global Technologies, Inc. Seating system and method of forming same
US6905773B2 (en) * 2002-10-22 2005-06-14 Schlage Lock Company Corrosion-resistant coatings and methods of manufacturing the same
CN1726252A (zh) * 2002-12-13 2006-01-25 陶氏环球技术公司 阻燃聚合物复合材料
US7250091B2 (en) * 2003-02-13 2007-07-31 Dow Global Technologies Inc Method of forming a seating system
US20040253378A1 (en) * 2003-06-12 2004-12-16 Applied Materials, Inc. Stress reduction of SIOC low k film by addition of alkylenes to OMCTS based processes
US7360519B2 (en) * 2003-07-10 2008-04-22 Dow Global Technologies, Inc. Engine intake manifold assembly
US20050037153A1 (en) * 2003-08-14 2005-02-17 Applied Materials, Inc. Stress reduction of sioc low k films
ES2308255T3 (es) * 2003-09-19 2008-12-01 Dow Global Technologies Inc. Piezas unidas adhesivamente a motores y transmisiones.
DE502004005258D1 (de) * 2004-02-03 2007-11-29 Ems Chemie Ag Werkstoffverbunde aus einem Formteil aus transparenten oder transluzenten, einfärbbaren Kunststoffformmassen
US7030041B2 (en) * 2004-03-15 2006-04-18 Applied Materials Inc. Adhesion improvement for low k dielectrics
WO2006028924A1 (en) 2004-09-01 2006-03-16 Dow Global Technologies Inc. Adhesion promoter
KR20070057200A (ko) * 2004-09-27 2007-06-04 다우 글로벌 테크놀로지스 인크. 플라즈마 강화 화학 기상 증착에 의한 다층 코팅
EP1807548A2 (en) * 2004-10-29 2007-07-18 Dow Gloval Technologies Inc. Abrasion resistant coatings by plasma enhanced chemical vapor deposition
US8182884B2 (en) * 2005-02-28 2012-05-22 GM Global Technology Operations LLC Process for application of a hydrophilic coating to fuel cell bipolar plates
DE102005016422A1 (de) * 2005-04-08 2006-10-12 Hugo Claus Gmbh + Co. Kg Komponente für eine Lackiereinrichtung und Vorrichtung zu ihrer Entlackung
US20070020451A1 (en) * 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings
ATE406413T1 (de) * 2006-01-27 2008-09-15 Ems Chemie Ag Photochrome formmassen und daraus hergestellte gegenstände
US20070212548A1 (en) * 2006-03-10 2007-09-13 Exatec Llc Glazing system with high glass transition temperature decorative ink
ZA200807902B (en) * 2006-04-19 2010-01-27 Dow Global Technologies Inc Method for blending materials in an extruder, the manufactured article and material pre-mix
US20070261224A1 (en) * 2006-05-11 2007-11-15 Dow Global Technologies Inc. Methods and articles in having a fringed microprotrusion surface structure
US8251688B2 (en) 2006-05-12 2012-08-28 PH Realty, Inc. Apparatus for a mold vacuum system and method of forming a sheet utilizing the system
US20080006819A1 (en) * 2006-06-19 2008-01-10 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
MX2008016342A (es) 2006-06-29 2009-01-19 Dow Global Technologies Inc Articulos termoplasticos y procesos para hacer los mismos usando un lote maestro mejorado.
US20080160298A1 (en) * 2006-12-28 2008-07-03 Chengtao Li Polycarbonate glazing system and method for making the same
US8241713B2 (en) * 2007-02-21 2012-08-14 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US7878054B2 (en) * 2007-02-28 2011-02-01 The Boeing Company Barrier coatings for polymeric substrates
ATE547236T1 (de) * 2007-05-01 2012-03-15 Exatec Llc Kantensanierung und in-situ-reparatur einer plasmabeschichtung
CN101772588A (zh) * 2007-07-30 2010-07-07 陶氏环球技术公司 大气压等离子体增强化学气相沉积方法
US20090061200A1 (en) * 2007-08-31 2009-03-05 Tristar Plastics Corporation Hydrophobic Insulation Material
US9121090B2 (en) * 2008-02-20 2015-09-01 Daikyo Nishikawa Corporation Resin molded articles
ITMI20080773A1 (it) * 2008-04-24 2009-10-25 Moma S R L Dispositivo per applicazioni termoidrauliche con migliorate proprieta anticalcare e relativo metodo di ottenimento
DE102008052098B4 (de) * 2008-10-14 2013-04-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung photokatalytisch aktiver Titandioxidschichten
US20100098885A1 (en) * 2008-10-21 2010-04-22 United Technologies Corporation Plasma silanization support method and system
US20100098836A1 (en) * 2008-10-21 2010-04-22 United Technologies Corporation Method and system for monitoring silane deposition
WO2010088488A1 (en) 2009-01-30 2010-08-05 Dow Global Technologies Inc. Polymeric compositions and filled tpo articles having improved aesthetics
DK2251454T3 (da) 2009-05-13 2014-10-13 Sio2 Medical Products Inc Coating og inspektion af beholder
US7985188B2 (en) * 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
DE102009030810B4 (de) * 2009-06-26 2017-09-21 Alanod Gmbh & Co. Kg Beschichtung für einen optischen Reflektor
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US20110073251A1 (en) * 2009-09-29 2011-03-31 United Technologies Corporation Component bonding preparation method
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US8802603B2 (en) 2010-06-17 2014-08-12 Becton, Dickinson And Company Medical components having coated surfaces exhibiting low friction and low reactivity
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
FR2969162B1 (fr) * 2010-12-21 2014-04-18 Rhodia Operations Article ignifuge a base de polyamide comprenant un revetement par traitement plasma
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US8852693B2 (en) * 2011-05-19 2014-10-07 Liquipel Ip Llc Coated electronic devices and associated methods
KR101702471B1 (ko) * 2011-08-26 2017-02-03 엑사테크 엘.엘.씨. 유기 수지 라미네이트, 이의 제조 및 이용 방법, 및 이를 포함하는 제품
AU2012318242A1 (en) 2011-11-11 2013-05-30 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
WO2013165891A1 (en) * 2012-05-03 2013-11-07 3M Innovative Properties Company Durable solar mirror films
EP2846755A1 (en) 2012-05-09 2015-03-18 SiO2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US20150297800A1 (en) 2012-07-03 2015-10-22 Sio2 Medical Products, Inc. SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS
CA2890066C (en) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
WO2014078666A1 (en) 2012-11-16 2014-05-22 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
EP2925903B1 (en) 2012-11-30 2022-04-13 Si02 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
EP2961858B1 (en) 2013-03-01 2022-09-07 Si02 Medical Products, Inc. Coated syringe.
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
CN105392916B (zh) 2013-03-11 2019-03-08 Sio2医药产品公司 涂布包装材料
EP2971227B1 (en) 2013-03-15 2017-11-15 Si02 Medical Products, Inc. Coating method.
JP2015098617A (ja) * 2013-11-18 2015-05-28 株式会社島津製作所 成膜装置
US9435268B2 (en) * 2014-03-24 2016-09-06 General Electric Company Methods of Si based ceramic components volatilization control in a gas turbine engine
EP3693493A1 (en) 2014-03-28 2020-08-12 SiO2 Medical Products, Inc. Antistatic coatings for plastic vessels
JP6294189B2 (ja) * 2014-08-22 2018-03-14 本田技研工業株式会社 表面改質金属部材及びその製造方法
CN107592807B (zh) 2015-02-26 2022-04-15 Sio2医药产品公司 具有耐划伤且抗静电的涂层的环烯烃聚合物容器
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
WO2018118467A2 (en) * 2016-12-20 2018-06-28 Corning Incorporated Glass-based articles having crack mitigating single- and multi-layer films for retained article strength and scratch resistance
EP3630062A2 (en) * 2017-05-24 2020-04-08 SiO2 Medical Products, Inc. Sterilizable pharmaceutical package for ophthalmic formulations
FR3091875B1 (fr) * 2019-01-17 2021-09-24 Innovative Systems Et Tech Isytech Procédé et dispositif de traitement pour le dépôt d’un revêtement à effet barrière

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1077787A (en) * 1975-11-21 1980-05-20 National Aeronautics And Space Administration Abrasion resistant coatings for plastic surfaces
US4260647A (en) * 1979-06-13 1981-04-07 Rca Corporation Method of depositing an abrasive layer
US4493855A (en) * 1982-12-23 1985-01-15 International Business Machines Corporation Use of plasma polymerized organosilicon films in fabrication of lift-off masks
US4599243A (en) * 1982-12-23 1986-07-08 International Business Machines Corporation Use of plasma polymerized organosilicon films in fabrication of lift-off masks
FR2540128B1 (fr) * 1983-01-27 1986-02-21 Rhone Poulenc Spec Chim Compositions organopolysiloxaniques contenant des polyacyloxysilanes et durcissant tres rapidement en elastomeres en presence d'accelerateur du type hydroxyde metallique
EP0182367B1 (en) * 1984-11-20 1990-04-18 Hitachi Maxell Ltd. Magnetic recording medium and production of the same
JPS61159426A (ja) * 1984-12-28 1986-07-19 Stanley Electric Co Ltd プラズマ重合体膜の形成方法
DE3521318A1 (de) * 1985-06-14 1986-12-18 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zum behandeln, insbesondere zum beschichten, von substraten mittels einer plasmaentladung
US4755426A (en) * 1986-01-18 1988-07-05 Hitachi Maxell, Ltd. Magnetic recording medium and production of the same
DE3624467A1 (de) * 1986-07-19 1988-01-28 Leybold Heraeus Gmbh & Co Kg Verfahren zum herstellen transparenter schutzschichten aus siliziumverbindungen
JP2560708B2 (ja) * 1987-01-22 1996-12-04 株式会社ブリヂストン プラスチツク表面の硬化保護膜及びその製造方法
US4927704A (en) * 1987-08-24 1990-05-22 General Electric Company Abrasion-resistant plastic articles and method for making them
US5041303A (en) * 1988-03-07 1991-08-20 Polyplasma Incorporated Process for modifying large polymeric surfaces
US4894352A (en) * 1988-10-26 1990-01-16 Texas Instruments Inc. Deposition of silicon-containing films using organosilicon compounds and nitrogen trifluoride
DE3838412A1 (de) * 1988-11-12 1990-05-17 Ara Werk Kraemer Gmbh & Co Kaltvulkanisierbare siliconkautschukmasse, verfahren zu ihrer herstellung und verwendung
JP2854890B2 (ja) * 1989-09-13 1999-02-10 東レ・ダウコーニング・シリコーン株式会社 気体分離膜
JPH03108136A (ja) * 1989-09-20 1991-05-08 Sekisui Chem Co Ltd 光情報記録媒体およびその製造方法
JPH03126881A (ja) * 1989-10-11 1991-05-30 Ulvac Japan Ltd マグネトロンエッチング装置

Also Published As

Publication number Publication date
JPH08505186A (ja) 1996-06-04
KR950704535A (ko) 1995-11-20
US5320875A (en) 1994-06-14
JP3488458B2 (ja) 2004-01-19
MX9306910A (es) 1994-06-30
EP0674722B1 (en) 1998-05-06
KR100299403B1 (ko) 2001-11-22
TW375536B (en) 1999-12-01
US5298587A (en) 1994-03-29
TW296394B (enExample) 1997-01-21
DE69318424D1 (de) 1998-06-10
CA2147486C (en) 2005-06-28
WO1994014998A1 (en) 1994-07-07
KR100360579B1 (ko) 2002-11-13
CA2147486A1 (en) 1994-07-07
DE69318424T2 (de) 1998-12-17
EP0674722A1 (en) 1995-10-04

Similar Documents

Publication Publication Date Title
KR100344334B1 (ko) 플라즈마 발생장치
US5494712A (en) Method of forming a plasma polymerized film
CA2119561C (en) Apparatus for rapid plasma treatments and method
JP2634637B2 (ja) 酸化ケイ素をベースとした硬い、酸素又は水分の浸透を防止するフィルムを沈着させる方法と装置
EP0285870B1 (en) A method for forming abrasion-resistant polycarbonate articles
US5616369A (en) Process for barrier coating of plastic objects
US5378284A (en) Apparatus for coating substrates using a microwave ECR plasma source
US5156882A (en) Method of preparing UV absorbant and abrasion-resistant transparent plastic articles
EP0327639B1 (en) Abrasion-resistant plastic articles and method for making them
US6130002A (en) Process for producing organically modified oxide, oxynitride or nitride layers by vacuum deposition
KR100392840B1 (ko) 저온 플라즈마 중합법을 이용한 중합박막의 형성방법
KR100375131B1 (ko) 플라스틱 기판에 금속막을 코팅하기 위한 진공코팅장치 및코팅방법
US4776298A (en) Apparatus for performing a plasma enhanced chemical vapor deposition on an edge of a polycarbonate sheet
EP4565727A1 (en) Decoratively coated polymer substrates and process for obtaining the same
JPS63179937A (ja) プラスチツク表面の硬化保護膜及びその製造方法
d’Agostino Plasma-Surface Interactions

Legal Events

Date Code Title Description
A107 Divisional application of patent
A201 Request for examination
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20001229

PA0201 Request for examination
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20011128

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20020425

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20020703

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20020704

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
G170 Re-publication after modification of scope of protection [patent]
PG1701 Publication of correction

Patent event code: PG17011E01I

Patent event date: 20020912

Comment text: Request for Publication of Correction

PR1001 Payment of annual fee

Payment date: 20050311

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20060626

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20070625

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20080623

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 20090623

Start annual number: 8

End annual number: 8

PR1001 Payment of annual fee

Payment date: 20100630

Start annual number: 9

End annual number: 9

PR1001 Payment of annual fee

Payment date: 20110617

Start annual number: 10

End annual number: 10

PR1001 Payment of annual fee

Payment date: 20120620

Start annual number: 11

End annual number: 11

FPAY Annual fee payment

Payment date: 20130620

Year of fee payment: 12

PR1001 Payment of annual fee

Payment date: 20130620

Start annual number: 12

End annual number: 12

EXPY Expiration of term
PC1801 Expiration of term