KR100303230B1 - 용기내의기판의웨트처리를위한방법및장치 - Google Patents

용기내의기판의웨트처리를위한방법및장치 Download PDF

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Publication number
KR100303230B1
KR100303230B1 KR1019970708031A KR19970708031A KR100303230B1 KR 100303230 B1 KR100303230 B1 KR 100303230B1 KR 1019970708031 A KR1019970708031 A KR 1019970708031A KR 19970708031 A KR19970708031 A KR 19970708031A KR 100303230 B1 KR100303230 B1 KR 100303230B1
Authority
KR
South Korea
Prior art keywords
substrate
container
fluid
discharge device
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019970708031A
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English (en)
Korean (ko)
Other versions
KR19990014690A (ko
Inventor
루드비히 덴츨러
헬무트 하름스얀센
Original Assignee
핑큼
스티그 마이크로테크 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 핑큼, 스티그 마이크로테크 게엠베하 filed Critical 핑큼
Publication of KR19990014690A publication Critical patent/KR19990014690A/ko
Application granted granted Critical
Publication of KR100303230B1 publication Critical patent/KR100303230B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
    • B01D21/24—Feed or discharge mechanisms for settling tanks
    • B01D21/2433—Discharge mechanisms for floating particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1019970708031A 1995-05-12 1996-05-02 용기내의기판의웨트처리를위한방법및장치 Expired - Fee Related KR100303230B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19517573.5 1995-05-12
DE19517573A DE19517573C2 (de) 1995-05-12 1995-05-12 Verfahren und Vorrichtung zur Naßbehandlung von Substraten in einem Behälter
PCT/EP1996/001813 WO1996036068A1 (de) 1995-05-12 1996-05-02 Verfahren und vorrichtung zur nassbehandlung von substraten in einem behälter

Publications (2)

Publication Number Publication Date
KR19990014690A KR19990014690A (ko) 1999-02-25
KR100303230B1 true KR100303230B1 (ko) 2001-11-30

Family

ID=7761821

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970708031A Expired - Fee Related KR100303230B1 (ko) 1995-05-12 1996-05-02 용기내의기판의웨트처리를위한방법및장치

Country Status (10)

Country Link
US (1) US5879464A (enExample)
EP (1) EP0826232B1 (enExample)
JP (1) JP3088466B2 (enExample)
KR (1) KR100303230B1 (enExample)
CN (1) CN1079988C (enExample)
AT (1) ATE186423T1 (enExample)
CA (1) CA2217777A1 (enExample)
DE (2) DE19517573C2 (enExample)
TW (1) TW303309B (enExample)
WO (1) WO1996036068A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1116868A (ja) * 1997-06-27 1999-01-22 Toshiba Corp 薬液置換装置及び薬液置換方法
US6571806B2 (en) 1998-09-04 2003-06-03 Komag, Inc. Method for drying a substrate
US6216709B1 (en) 1998-09-04 2001-04-17 Komag, Inc. Method for drying a substrate
GB2351279B (en) * 1999-06-22 2001-08-01 John Joseph Devuyst Draining vessel
US6286231B1 (en) 2000-01-12 2001-09-11 Semitool, Inc. Method and apparatus for high-pressure wafer processing and drying
DE10359320A1 (de) * 2003-12-17 2005-07-21 Scp Germany Gmbh Vorrichtung und Verfahren zum Trocknen von Substraten
KR101951778B1 (ko) * 2017-07-25 2019-02-25 무진전자 주식회사 웨이퍼 에칭 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT208307B (de) * 1959-02-10 1960-03-25 Franz Dr Ing Boehm Zumeßvorrichtung zur proportionalen Einbringung von Chemikalienlösungen in periodisch beschickte Behälter
US4722752A (en) * 1986-06-16 1988-02-02 Robert F. Orr Apparatus and method for rinsing and drying silicon wafers
NL8900480A (nl) * 1989-02-27 1990-09-17 Philips Nv Werkwijze en inrichting voor het drogen van substraten na behandeling in een vloeistof.
CA2040989A1 (en) * 1990-05-01 1991-11-02 Ichiro Yoshida Washing/drying method and apparatus

Also Published As

Publication number Publication date
DE19517573C2 (de) 2000-11-02
JP3088466B2 (ja) 2000-09-18
US5879464A (en) 1999-03-09
CA2217777A1 (en) 1996-11-14
KR19990014690A (ko) 1999-02-25
DE59603571D1 (de) 1999-12-09
ATE186423T1 (de) 1999-11-15
CN1184557A (zh) 1998-06-10
CN1079988C (zh) 2002-02-27
DE19517573A1 (de) 1996-11-14
TW303309B (enExample) 1997-04-21
JPH10510101A (ja) 1998-09-29
EP0826232B1 (de) 1999-11-03
WO1996036068A1 (de) 1996-11-14
EP0826232A1 (de) 1998-03-04

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