KR100282464B1 - 열처리장치의 온도제어방법 및 장치 - Google Patents

열처리장치의 온도제어방법 및 장치 Download PDF

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Publication number
KR100282464B1
KR100282464B1 KR1019940022311A KR19940022311A KR100282464B1 KR 100282464 B1 KR100282464 B1 KR 100282464B1 KR 1019940022311 A KR1019940022311 A KR 1019940022311A KR 19940022311 A KR19940022311 A KR 19940022311A KR 100282464 B1 KR100282464 B1 KR 100282464B1
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KR
South Korea
Prior art keywords
signal
temperature
temperature rise
heat treatment
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1019940022311A
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English (en)
Korean (ko)
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KR950009971A (ko
Inventor
후지오 스즈키
Original Assignee
마쓰바 구니유키
도오교오 에레구토론 도오호쿠 가부시키가이샤
히가시 데쓰로
동경 엘렉트론주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24992193A external-priority patent/JPH0796169A/ja
Priority claimed from JP24992093A external-priority patent/JP3519436B2/ja
Priority claimed from JP24992293A external-priority patent/JPH0796170A/ja
Application filed by 마쓰바 구니유키, 도오교오 에레구토론 도오호쿠 가부시키가이샤, 히가시 데쓰로, 동경 엘렉트론주식회사 filed Critical 마쓰바 구니유키
Publication of KR950009971A publication Critical patent/KR950009971A/ko
Application granted granted Critical
Publication of KR100282464B1 publication Critical patent/KR100282464B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0602—Temperature monitoring
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/023—Industrial applications
    • H05B1/0233—Industrial applications for semiconductors manufacturing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1927—Control of temperature characterised by the use of electric means using a plurality of sensors
    • G05D23/193—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces
    • G05D23/1932—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces to control the temperature of a plurality of spaces
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
    • G05D23/22—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element being a thermocouple
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90—Thermal treatments, e.g. annealing or sintering

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Control Of Resistance Heating (AREA)
  • Control Of Temperature (AREA)
KR1019940022311A 1993-09-09 1994-09-06 열처리장치의 온도제어방법 및 장치 Expired - Lifetime KR100282464B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP93-249922 1993-09-09
JP24992193A JPH0796169A (ja) 1993-09-09 1993-09-09 熱処理装置の温度制御方法
JP24992093A JP3519436B2 (ja) 1993-09-09 1993-09-09 熱処理装置およびその温度制御方法
JP24992293A JPH0796170A (ja) 1993-09-09 1993-09-09 熱処理装置の温度制御方法
JP93-249920 1993-09-09
JP93-249921 1993-09-09

Publications (2)

Publication Number Publication Date
KR950009971A KR950009971A (ko) 1995-04-26
KR100282464B1 true KR100282464B1 (ko) 2001-04-02

Family

ID=27333879

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940022311A Expired - Lifetime KR100282464B1 (ko) 1993-09-09 1994-09-06 열처리장치의 온도제어방법 및 장치

Country Status (3)

Country Link
US (1) US5593608A (https=)
KR (1) KR100282464B1 (https=)
TW (1) TW266230B (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160117331A (ko) * 2015-03-31 2016-10-10 도쿄엘렉트론가부시키가이샤 열처리 장치, 열처리 방법 및 프로그램
KR20190126243A (ko) * 2018-05-01 2019-11-11 도쿄엘렉트론가부시키가이샤 온도 감시 장치, 열처리 장치 및 온도 감시 방법
KR102712038B1 (ko) * 2024-03-05 2024-10-02 (주) 예스티 고압 어닐링 장치

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EP1036407A1 (en) 1997-11-03 2000-09-20 ASM America, Inc. Method of processing wafers with low mass support
JP3246891B2 (ja) * 1998-02-03 2002-01-15 東京エレクトロン株式会社 熱処理装置
DE19855637A1 (de) * 1998-12-02 2000-06-15 Aixtron Ag Verfahren und System zur Halbleiterkristallherstellung mit Temperaturverwaltung
US6303411B1 (en) 1999-05-03 2001-10-16 Vortek Industries Ltd. Spatially resolved temperature measurement and irradiance control
US6495805B2 (en) * 2000-06-30 2002-12-17 Tokyo Electron Limited Method of determining set temperature trajectory for heat treatment system
JP3901958B2 (ja) * 2000-08-24 2007-04-04 東京エレクトロン株式会社 熱処理装置設定温度の作成方法、および熱処理方法
DE10032465A1 (de) 2000-07-04 2002-01-31 Steag Rtp Systems Gmbh Verfahren und Vorrichtung zum thermischen Behandeln von Objekten
JP3497450B2 (ja) * 2000-07-06 2004-02-16 東京エレクトロン株式会社 バッチ式熱処理装置及びその制御方法
US6594446B2 (en) * 2000-12-04 2003-07-15 Vortek Industries Ltd. Heat-treating methods and systems
JP2003133299A (ja) * 2001-10-24 2003-05-09 Oki Electric Ind Co Ltd 半導体製造装置および半導体製造方法
JP2005515425A (ja) * 2001-12-26 2005-05-26 ボルテック インダストリーズ リミテッド 温度測定および熱処理方法およびシステム
KR20120045040A (ko) 2002-12-20 2012-05-08 맷슨 테크날러지 캐나다 인코퍼레이티드 피가공물 지지 방법
WO2005010970A1 (ja) * 2003-07-28 2005-02-03 Hitachi Kokusai Electric Inc. 基板処理装置及び基板処理方法
WO2005059991A1 (en) * 2003-12-19 2005-06-30 Mattson Technology Canada Inc. Apparatuses and methods for suppressing thermally induced motion of a workpiece
KR100849012B1 (ko) * 2005-02-17 2008-07-30 도쿄엘렉트론가부시키가이샤 열처리 장치 및 열처리 방법
JP5967859B2 (ja) * 2006-11-15 2016-08-10 マトソン テクノロジー、インコーポレイテッド 熱処理中の被加工物を支持するシステムおよび方法
US7515986B2 (en) * 2007-04-20 2009-04-07 The Boeing Company Methods and systems for controlling and adjusting heat distribution over a part bed
CN102089873A (zh) 2008-05-16 2011-06-08 加拿大马特森技术有限公司 工件破损防止方法及设备
JP5504793B2 (ja) * 2009-09-26 2014-05-28 東京エレクトロン株式会社 熱処理装置及び冷却方法
US9513003B2 (en) * 2010-08-16 2016-12-06 Purpose Company Limited Combustion apparatus, method for combustion control, board, combustion control system and water heater
US8950470B2 (en) * 2010-12-30 2015-02-10 Poole Ventura, Inc. Thermal diffusion chamber control device and method
US9885123B2 (en) 2011-03-16 2018-02-06 Asm America, Inc. Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow
US10007255B2 (en) * 2014-06-27 2018-06-26 Sunedison Semiconductor Limited (Uen201334164H) Systems and methods for controlling temperatures in an epitaxial reactor
KR101605717B1 (ko) * 2014-07-16 2016-03-23 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
US20170207078A1 (en) * 2016-01-15 2017-07-20 Taiwan Semiconductor Manufacturing Co., Ltd. Atomic layer deposition apparatus and semiconductor process
JP6651408B2 (ja) * 2016-04-28 2020-02-19 光洋サーモシステム株式会社 熱処理装置
KR102287466B1 (ko) * 2016-11-30 2021-08-06 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치, 반도체 장치의 제조 방법 및 프로그램

Family Cites Families (8)

* Cited by examiner, † Cited by third party
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JPS601306B2 (ja) * 1978-08-09 1985-01-14 工業技術院長 ホルミルスチルバゾリウム塩類とその製造方法
US4467182A (en) * 1981-09-16 1984-08-21 Nordson Corporation Control circuit
JPS6044792A (ja) * 1983-08-19 1985-03-09 井関農機株式会社 穀粒乾燥機
JPH0630027B2 (ja) * 1986-01-08 1994-04-20 大日本スクリ−ン製造株式会社 半導体基板の熱処理装置における温度制御方法および温度制御装置
US4952227A (en) * 1989-05-22 1990-08-28 Libbey-Owens-Ford Co. Apparatus for processing glass
US5026971A (en) * 1990-01-08 1991-06-25 General Electric Company Temperature control system for a heating oven using a glass-ceramic temperature sensor
EP0469758B1 (en) * 1990-07-30 1998-03-04 Black & Decker Inc. Apparatus for controlling heating of a liquid
US5120936A (en) * 1990-08-22 1992-06-09 Industrial Technology Research Institute Multiplex heating system with temperature control

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160117331A (ko) * 2015-03-31 2016-10-10 도쿄엘렉트론가부시키가이샤 열처리 장치, 열처리 방법 및 프로그램
KR102013484B1 (ko) * 2015-03-31 2019-08-22 도쿄엘렉트론가부시키가이샤 열처리 장치, 열처리 방법 및 프로그램
KR20190126243A (ko) * 2018-05-01 2019-11-11 도쿄엘렉트론가부시키가이샤 온도 감시 장치, 열처리 장치 및 온도 감시 방법
KR102452021B1 (ko) 2018-05-01 2022-10-06 도쿄엘렉트론가부시키가이샤 온도 감시 장치, 열처리 장치 및 온도 감시 방법
KR102712038B1 (ko) * 2024-03-05 2024-10-02 (주) 예스티 고압 어닐링 장치

Also Published As

Publication number Publication date
US5593608A (en) 1997-01-14
TW266230B (https=) 1995-12-21
KR950009971A (ko) 1995-04-26

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