KR100273810B1 - 기판 위치검출 및 안내장치 - Google Patents

기판 위치검출 및 안내장치 Download PDF

Info

Publication number
KR100273810B1
KR100273810B1 KR1019950002816A KR19950002816A KR100273810B1 KR 100273810 B1 KR100273810 B1 KR 100273810B1 KR 1019950002816 A KR1019950002816 A KR 1019950002816A KR 19950002816 A KR19950002816 A KR 19950002816A KR 100273810 B1 KR100273810 B1 KR 100273810B1
Authority
KR
South Korea
Prior art keywords
substrate
cassette
lcd
substrates
chamber
Prior art date
Application number
KR1019950002816A
Other languages
English (en)
Korean (ko)
Other versions
KR950034563A (ko
Inventor
히로키쯔도무
아베쇼이치
아키야마기요타카
사토요시쯔토무
Original Assignee
기리야마겐지
테루.엔지니아링구가부시끼가이샤
히가시 데쓰로
동경 엘렉트론주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 기리야마겐지, 테루.엔지니아링구가부시끼가이샤, 히가시 데쓰로, 동경 엘렉트론주식회사 filed Critical 기리야마겐지
Publication of KR950034563A publication Critical patent/KR950034563A/ko
Application granted granted Critical
Publication of KR100273810B1 publication Critical patent/KR100273810B1/ko

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Drying Of Semiconductors (AREA)
KR1019950002816A 1994-02-15 1995-02-15 기판 위치검출 및 안내장치 KR100273810B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP04037594A JP3468430B2 (ja) 1994-02-15 1994-02-15 位置検出案内装置、位置検出案内方法及び真空処理装置
JP94-40375 1994-02-15

Publications (2)

Publication Number Publication Date
KR950034563A KR950034563A (ko) 1995-12-28
KR100273810B1 true KR100273810B1 (ko) 2000-12-15

Family

ID=12578908

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950002816A KR100273810B1 (ko) 1994-02-15 1995-02-15 기판 위치검출 및 안내장치

Country Status (3)

Country Link
JP (1) JP3468430B2 (ja)
KR (1) KR100273810B1 (ja)
TW (1) TW369210U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100860143B1 (ko) * 2005-09-05 2008-09-24 도쿄엘렉트론가부시키가이샤 기판 위치 맞춤 장치 및 기판 수용 유닛
KR101321612B1 (ko) * 2009-07-30 2013-10-23 도쿄엘렉트론가부시키가이샤 기판 위치맞춤 기구, 그것을 이용한 진공 예비실 및 기판 처리 시스템

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6053983A (en) * 1997-05-08 2000-04-25 Tokyo Electron, Ltd. Wafer for carrying semiconductor wafers and method detecting wafers on carrier
TW442891B (en) 1998-11-17 2001-06-23 Tokyo Electron Ltd Vacuum processing system
JP4832682B2 (ja) * 2001-09-18 2011-12-07 東京エレクトロン株式会社 無人搬送車
KR100738661B1 (ko) * 2004-12-21 2007-07-11 주식회사 대우일렉트로닉스 씨알티 잔상 제거 회로
CN103287852B (zh) * 2013-06-18 2015-06-03 深圳市华星光电技术有限公司 玻璃面板堆垛系统及堆垛方法
US9255896B2 (en) 2013-06-18 2016-02-09 Shenzhen China Star Optoelectronics Technology Co., Ltd Glass panel stocking system and stocking method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100860143B1 (ko) * 2005-09-05 2008-09-24 도쿄엘렉트론가부시키가이샤 기판 위치 맞춤 장치 및 기판 수용 유닛
KR100952524B1 (ko) * 2005-09-05 2010-04-12 도쿄엘렉트론가부시키가이샤 기판 수용 유닛
KR101321612B1 (ko) * 2009-07-30 2013-10-23 도쿄엘렉트론가부시키가이샤 기판 위치맞춤 기구, 그것을 이용한 진공 예비실 및 기판 처리 시스템

Also Published As

Publication number Publication date
JP3468430B2 (ja) 2003-11-17
KR950034563A (ko) 1995-12-28
TW369210U (en) 1999-09-01
JPH07231031A (ja) 1995-08-29

Similar Documents

Publication Publication Date Title
US5636960A (en) Apparatus for detecting and aligning a substrate
US5558482A (en) Multi-chamber system
US6203268B1 (en) Positioning apparatus for substrates to be processed
US4311427A (en) Wafer transfer system
EP0555891B1 (en) Vacuum processing system and method
EP0506044B1 (en) Load-lock unit and wafer transfer system
KR100702844B1 (ko) 로드락 챔버 및 그를 이용한 반도체 제조설비
KR100273810B1 (ko) 기판 위치검출 및 안내장치
US8132996B2 (en) Gate valve and substrate-treating apparatus including the same
US4842680A (en) Advanced vacuum processor
KR20040014213A (ko) 레티클 핸들링 방법, 레티클 핸들링 장치 및 노광장치
US20020187024A1 (en) Apparatus for storing and moving a carrier
KR100218238B1 (ko) 기판정렬장치 및 기판정렬방법
US4943457A (en) Vacuum slice carrier
JP3500455B2 (ja) 処理装置
KR100256215B1 (ko) 멀티챔버 시스템
JP3335983B2 (ja) Ｌｃｄ用ガラス基板の位置合わせ機構及び真空処理装置
KR101706735B1 (ko) 반송 유닛, 이를 포함하는 기판 처리 장치 및 기판 처리 방법
JP2008130369A (ja) 真空装置
CN111164745A (zh) 盒开启器
JP3065843B2 (ja) 被処理体の検出装置
JPH05294405A (ja) 基板検出装置
JP3391584B2 (ja) 処理装置
JP3160691B2 (ja) 処理装置
KR20070059528A (ko) 기판감지센서를 가지는 기판이송수단

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20110811

Year of fee payment: 12

LAPS Lapse due to unpaid annual fee