TW369210U - An apparatus for detecting and aligning a substrate - Google Patents

An apparatus for detecting and aligning a substrate

Info

Publication number
TW369210U
TW369210U TW085200130U TW85200130U TW369210U TW 369210 U TW369210 U TW 369210U TW 085200130 U TW085200130 U TW 085200130U TW 85200130 U TW85200130 U TW 85200130U TW 369210 U TW369210 U TW 369210U
Authority
TW
Taiwan
Prior art keywords
aligning
detecting
substrate
Prior art date
Application number
TW085200130U
Other languages
English (en)
Chinese (zh)
Inventor
Tsutomu Hiroki
Shoichi Abe
Kiyotaka Akiyama
Tsutomu Satoyoshi
Original Assignee
Tokyo Electron Ltd
Tel Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Tel Engineering Ltd filed Critical Tokyo Electron Ltd
Publication of TW369210U publication Critical patent/TW369210U/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Drying Of Semiconductors (AREA)
TW085200130U 1994-02-15 1995-02-11 An apparatus for detecting and aligning a substrate TW369210U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04037594A JP3468430B2 (ja) 1994-02-15 1994-02-15 位置検出案内装置、位置検出案内方法及び真空処理装置

Publications (1)

Publication Number Publication Date
TW369210U true TW369210U (en) 1999-09-01

Family

ID=12578908

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085200130U TW369210U (en) 1994-02-15 1995-02-11 An apparatus for detecting and aligning a substrate

Country Status (3)

Country Link
JP (1) JP3468430B2 (ja)
KR (1) KR100273810B1 (ja)
TW (1) TW369210U (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6053983A (en) * 1997-05-08 2000-04-25 Tokyo Electron, Ltd. Wafer for carrying semiconductor wafers and method detecting wafers on carrier
TW442891B (en) 1998-11-17 2001-06-23 Tokyo Electron Ltd Vacuum processing system
JP4832682B2 (ja) * 2001-09-18 2011-12-07 東京エレクトロン株式会社 無人搬送車
KR100738661B1 (ko) * 2004-12-21 2007-07-11 주식회사 대우일렉트로닉스 씨알티 잔상 제거 회로
JP4642610B2 (ja) * 2005-09-05 2011-03-02 東京エレクトロン株式会社 基板位置合わせ装置および基板収容ユニット
JP5501688B2 (ja) * 2009-07-30 2014-05-28 東京エレクトロン株式会社 基板位置合わせ機構、それを用いた真空予備室および基板処理システム
CN103287852B (zh) * 2013-06-18 2015-06-03 深圳市华星光电技术有限公司 玻璃面板堆垛系统及堆垛方法
US9255896B2 (en) 2013-06-18 2016-02-09 Shenzhen China Star Optoelectronics Technology Co., Ltd Glass panel stocking system and stocking method

Also Published As

Publication number Publication date
JP3468430B2 (ja) 2003-11-17
JPH07231031A (ja) 1995-08-29
KR100273810B1 (ko) 2000-12-15
KR950034563A (ko) 1995-12-28

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