KR100236995B1 - 하드코팅, 하드코팅에 의해 피복되는 공작물 및 하드코팅에 의해 공작물을 피복하는 코팅방법 - Google Patents

하드코팅, 하드코팅에 의해 피복되는 공작물 및 하드코팅에 의해 공작물을 피복하는 코팅방법 Download PDF

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Publication number
KR100236995B1
KR100236995B1 KR1019920008321A KR920008321A KR100236995B1 KR 100236995 B1 KR100236995 B1 KR 100236995B1 KR 1019920008321 A KR1019920008321 A KR 1019920008321A KR 920008321 A KR920008321 A KR 920008321A KR 100236995 B1 KR100236995 B1 KR 100236995B1
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KR
South Korea
Prior art keywords
coating
chromium
workpiece
hard coating
content
Prior art date
Application number
KR1019920008321A
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English (en)
Korean (ko)
Other versions
KR920021734A (ko
Inventor
슐츠 한스
베르그만 에리히
Original Assignee
하에펠리 에리흐
발처스 악티엔게젤샤프트
베그만 어스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하에펠리 에리흐, 발처스 악티엔게젤샤프트, 베그만 어스 filed Critical 하에펠리 에리흐
Publication of KR920021734A publication Critical patent/KR920021734A/ko
Application granted granted Critical
Publication of KR100236995B1 publication Critical patent/KR100236995B1/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR1019920008321A 1991-05-16 1992-05-16 하드코팅, 하드코팅에 의해 피복되는 공작물 및 하드코팅에 의해 공작물을 피복하는 코팅방법 KR100236995B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH147091 1991-05-16
CH01470/91-1 1991-05-16
CH1470/91-1 1991-05-16

Publications (2)

Publication Number Publication Date
KR920021734A KR920021734A (ko) 1992-12-18
KR100236995B1 true KR100236995B1 (ko) 2000-01-15

Family

ID=4211238

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920008321A KR100236995B1 (ko) 1991-05-16 1992-05-16 하드코팅, 하드코팅에 의해 피복되는 공작물 및 하드코팅에 의해 공작물을 피복하는 코팅방법

Country Status (8)

Country Link
US (2) US5310607A (fr)
EP (1) EP0513662B1 (fr)
JP (1) JP3323534B2 (fr)
KR (1) KR100236995B1 (fr)
CN (1) CN1035956C (fr)
AT (1) ATE134718T1 (fr)
BR (1) BR9201865A (fr)
DE (1) DE59205430D1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110073427A (ko) * 2008-10-10 2011-06-29 오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐 비 감마―상 큐빅 ＡｌＣｒＯ

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KR101660995B1 (ko) 2008-10-10 2016-09-28 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 비 감마―상 큐빅 ＡｌＣｒＯ

Also Published As

Publication number Publication date
JP3323534B2 (ja) 2002-09-09
KR920021734A (ko) 1992-12-18
JPH05208326A (ja) 1993-08-20
CN1035956C (zh) 1997-09-24
EP0513662A1 (fr) 1992-11-19
BR9201865A (pt) 1993-01-05
ATE134718T1 (de) 1996-03-15
US5447804A (en) 1995-09-05
DE59205430D1 (de) 1996-04-04
EP0513662B1 (fr) 1996-02-28
CN1069294A (zh) 1993-02-24
US5310607A (en) 1994-05-10

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