KR100235522B1 - 저융점 금속의 직접 질화 방법 - Google Patents

저융점 금속의 직접 질화 방법 Download PDF

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Publication number
KR100235522B1
KR100235522B1 KR1019920000002A KR920000002A KR100235522B1 KR 100235522 B1 KR100235522 B1 KR 100235522B1 KR 1019920000002 A KR1019920000002 A KR 1019920000002A KR 920000002 A KR920000002 A KR 920000002A KR 100235522 B1 KR100235522 B1 KR 100235522B1
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KR
South Korea
Prior art keywords
metal
refractory
nitriding
powder
nitrogen
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Expired - Lifetime
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KR1019920000002A
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English (en)
Korean (ko)
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KR920014709A (ko
Inventor
뒤보 도미니끄
포레 삐에르
Original Assignee
다니엘 볼론
펨 아브라시프 레프락떼르
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Publication of KR920014709A publication Critical patent/KR920014709A/ko
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/65—Reaction sintering of free metal- or free silicon-containing compositions
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0722—Preparation by direct nitridation of aluminium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/0828—Carbonitrides or oxycarbonitrides of metals, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/591—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Products (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Manufacture And Refinement Of Metals (AREA)
KR1019920000002A 1991-01-03 1992-01-03 저융점 금속의 직접 질화 방법 Expired - Lifetime KR100235522B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9100376A FR2671339B1 (fr) 1991-01-03 1991-01-03 Procede de nitruration directe de metaux a bas point de fusion.
FR9100376 1991-01-03

Publications (2)

Publication Number Publication Date
KR920014709A KR920014709A (ko) 1992-08-25
KR100235522B1 true KR100235522B1 (ko) 1999-12-15

Family

ID=9408676

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920000002A Expired - Lifetime KR100235522B1 (ko) 1991-01-03 1992-01-03 저융점 금속의 직접 질화 방법

Country Status (12)

Country Link
US (1) US5314675A (https=)
EP (1) EP0494129B1 (https=)
JP (1) JP3177278B2 (https=)
KR (1) KR100235522B1 (https=)
AU (1) AU642331B2 (https=)
BR (1) BR9200009A (https=)
CA (1) CA2058682C (https=)
DE (1) DE69200351T2 (https=)
ES (1) ES2060460T3 (https=)
FR (1) FR2671339B1 (https=)
TW (1) TW197996B (https=)
ZA (1) ZA9213B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130121664A (ko) * 2010-10-25 2013-11-06 엔지케이 인슐레이터 엘티디 세라믹스 재료, 반도체 제조 장치용 부재, 스퍼터링 타겟 부재 및 세라믹스 재료의 제조 방법

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4138481A1 (de) * 1991-11-22 1993-05-27 Kempten Elektroschmelz Gmbh Wiederaufarbeitung von gebrauchten verdampferschiffchen
JP2967094B2 (ja) * 1995-11-02 1999-10-25 工業技術院長 窒化アルミニウム焼結体、及び窒化アルミニウム粉末の製造方法
FR2745562B1 (fr) * 1996-03-04 1998-04-17 Pechiney Electrometallurgie Procede de preparation d'une poudre refractaire a partir de masses de contact usees issues de la production de silanes et produits refractaires obtenus
US5934900A (en) * 1996-03-29 1999-08-10 Integrated Thermal Sciences, Inc. Refractory nitride, carbide, ternary oxide, nitride/oxide, oxide/carbide, oxycarbide, and oxynitride materials and articles
BR0108905A (pt) 2000-03-01 2003-03-18 Cabot Corp Metais nitrificados para válvula e processos para fabricação dos mesmos
FR2836472B1 (fr) * 2002-02-28 2004-05-21 Pem Abrasifs Refractaires Grains abrasifs a base d'oxynitrure d'aluminium
WO2012056807A1 (ja) * 2010-10-25 2012-05-03 日本碍子株式会社 セラミックス材料、積層体、半導体製造装置用部材及びスパッタリングターゲット部材
JP5849650B2 (ja) * 2011-04-13 2016-01-27 株式会社デンソー 窒素とアルミニウムと他金属とを含む多元化合物の複合材料の製造方法
CN118183640B (zh) * 2024-03-26 2025-10-10 闽都创新实验室 一种单一原料合成纳米AlON粉体的方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1057005B (de) * 1956-03-29 1959-05-06 Electro Chimie Metal Verfahren zur Herstellung von Gegenstaenden aus Aluminiumnitrid
FR1149539A (fr) * 1956-04-17 1957-12-27 Electro Chimie Soc D Procédé de fabrication d'objets en nitrure d'aluminium
US2929126A (en) * 1956-04-19 1960-03-22 Electro Chimie Metal Process of making molded aluminum nitride articles
DE1057006B (de) * 1958-02-01 1959-05-06 Dipl Berging Hans Georg Habbel Verfahren zur Aufbereitung von Rohton
CA953479A (en) * 1970-09-26 1974-08-27 Lucas (Joseph) (Industries) Limited Silicon nitride products
GB2075965B (en) * 1980-05-14 1983-10-05 Dresser Ind Nitride bonded refractory shapes and their production
EP0165707B1 (en) * 1984-05-18 1991-10-23 Sumitomo Electric Industries Limited Method of sintering ceramics and metal-dispersed reinforced ceramics obtained thereby
US4944930A (en) * 1986-11-21 1990-07-31 Regents Of The University Of California Synthesis of fine-grained α-silicon nitride by a combustion process
US4877759A (en) * 1987-05-29 1989-10-31 Regents Of The University Of California One step process for producing dense aluminum nitride and composites thereof
US4990180A (en) * 1988-07-28 1991-02-05 The United States Of America As Represented By The United States Department Of Energy Combustion synthesis of low exothermic component rich composites
US5030600A (en) * 1988-10-06 1991-07-09 Benchmark Structural Ceramics Corp. Novel sialon composition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130121664A (ko) * 2010-10-25 2013-11-06 엔지케이 인슐레이터 엘티디 세라믹스 재료, 반도체 제조 장치용 부재, 스퍼터링 타겟 부재 및 세라믹스 재료의 제조 방법
KR101881171B1 (ko) * 2010-10-25 2018-07-23 엔지케이 인슐레이터 엘티디 세라믹스 재료, 반도체 제조 장치용 부재, 스퍼터링 타겟 부재 및 세라믹스 재료의 제조 방법

Also Published As

Publication number Publication date
US5314675A (en) 1994-05-24
ZA9213B (en) 1993-04-05
JPH04304359A (ja) 1992-10-27
BR9200009A (pt) 1992-09-08
KR920014709A (ko) 1992-08-25
AU642331B2 (en) 1993-10-14
DE69200351D1 (de) 1994-10-06
EP0494129A1 (fr) 1992-07-08
CA2058682A1 (fr) 1992-07-04
CA2058682C (fr) 2002-03-26
FR2671339A1 (fr) 1992-07-10
EP0494129B1 (fr) 1994-08-31
DE69200351T2 (de) 1995-02-16
TW197996B (https=) 1993-01-11
AU1000792A (en) 1992-07-09
FR2671339B1 (fr) 1993-08-27
JP3177278B2 (ja) 2001-06-18
ES2060460T3 (es) 1994-11-16

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