DE69200351D1 - Verfahren zur Direktnitridierung von Metallen mit niedrigem Schmelzpunkt. - Google Patents

Verfahren zur Direktnitridierung von Metallen mit niedrigem Schmelzpunkt.

Info

Publication number
DE69200351D1
DE69200351D1 DE69200351T DE69200351T DE69200351D1 DE 69200351 D1 DE69200351 D1 DE 69200351D1 DE 69200351 T DE69200351 T DE 69200351T DE 69200351 T DE69200351 T DE 69200351T DE 69200351 D1 DE69200351 D1 DE 69200351D1
Authority
DE
Germany
Prior art keywords
metals
melting point
low melting
direct nitriding
nitriding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69200351T
Other languages
English (en)
Other versions
DE69200351T2 (de
Inventor
Dominique Dubots
Pierre Faure
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PEM ABRASIFS REFRACTAIRES, PARIS-LA-DEFENSE,, FR
Original Assignee
Pechiney Electrometallurgie SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pechiney Electrometallurgie SAS filed Critical Pechiney Electrometallurgie SAS
Application granted granted Critical
Publication of DE69200351D1 publication Critical patent/DE69200351D1/de
Publication of DE69200351T2 publication Critical patent/DE69200351T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/65—Reaction sintering of free metal- or free silicon-containing compositions
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0722—Preparation by direct nitridation of aluminium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/0828—Carbonitrides or oxycarbonitrides of metals, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/591—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Products (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Manufacture And Refinement Of Metals (AREA)
DE69200351T 1991-01-03 1992-01-02 Verfahren zur Direktnitridierung von Metallen mit niedrigem Schmelzpunkt. Expired - Lifetime DE69200351T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9100376A FR2671339B1 (fr) 1991-01-03 1991-01-03 Procede de nitruration directe de metaux a bas point de fusion.

Publications (2)

Publication Number Publication Date
DE69200351D1 true DE69200351D1 (de) 1994-10-06
DE69200351T2 DE69200351T2 (de) 1995-02-16

Family

ID=9408676

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69200351T Expired - Lifetime DE69200351T2 (de) 1991-01-03 1992-01-02 Verfahren zur Direktnitridierung von Metallen mit niedrigem Schmelzpunkt.

Country Status (12)

Country Link
US (1) US5314675A (de)
EP (1) EP0494129B1 (de)
JP (1) JP3177278B2 (de)
KR (1) KR100235522B1 (de)
AU (1) AU642331B2 (de)
BR (1) BR9200009A (de)
CA (1) CA2058682C (de)
DE (1) DE69200351T2 (de)
ES (1) ES2060460T3 (de)
FR (1) FR2671339B1 (de)
TW (1) TW197996B (de)
ZA (1) ZA9213B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4138481A1 (de) * 1991-11-22 1993-05-27 Kempten Elektroschmelz Gmbh Wiederaufarbeitung von gebrauchten verdampferschiffchen
JP2967094B2 (ja) * 1995-11-02 1999-10-25 工業技術院長 窒化アルミニウム焼結体、及び窒化アルミニウム粉末の製造方法
FR2745562B1 (fr) * 1996-03-04 1998-04-17 Pechiney Electrometallurgie Procede de preparation d'une poudre refractaire a partir de masses de contact usees issues de la production de silanes et produits refractaires obtenus
US5934900A (en) * 1996-03-29 1999-08-10 Integrated Thermal Sciences, Inc. Refractory nitride, carbide, ternary oxide, nitride/oxide, oxide/carbide, oxycarbide, and oxynitride materials and articles
IL151549A0 (en) 2000-03-01 2003-04-10 Cabot Corp Nitrided valve metals and processes for making the same
FR2836472B1 (fr) * 2002-02-28 2004-05-21 Pem Abrasifs Refractaires Grains abrasifs a base d'oxynitrure d'aluminium
WO2012056807A1 (ja) * 2010-10-25 2012-05-03 日本碍子株式会社 セラミックス材料、積層体、半導体製造装置用部材及びスパッタリングターゲット部材
WO2012056808A1 (ja) 2010-10-25 2012-05-03 日本碍子株式会社 セラミックス材料、半導体製造装置用部材、スパッタリングターゲット部材及びセラミックス材料の製造方法
JP5849650B2 (ja) * 2011-04-13 2016-01-27 株式会社デンソー 窒素とアルミニウムと他金属とを含む多元化合物の複合材料の製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1057005B (de) * 1956-03-29 1959-05-06 Electro Chimie Metal Verfahren zur Herstellung von Gegenstaenden aus Aluminiumnitrid
FR1149539A (fr) * 1956-04-17 1957-12-27 Electro Chimie Soc D Procédé de fabrication d'objets en nitrure d'aluminium
US2929126A (en) * 1956-04-19 1960-03-22 Electro Chimie Metal Process of making molded aluminum nitride articles
DE1057006B (de) * 1958-02-01 1959-05-06 Dipl Berging Hans Georg Habbel Verfahren zur Aufbereitung von Rohton
AU458193B2 (en) * 1970-09-26 1975-02-20 Joseph Lucas (Industries) Limited Silicon nitride products
GB2075965B (en) * 1980-05-14 1983-10-05 Dresser Ind Nitride bonded refractory shapes and their production
DE3588005T2 (de) * 1984-05-18 1995-08-24 Sumitomo Electric Industries Verfahren zum Sintern von keramischen Körpern mit einer verteilten Metallverstärkung.
US4944930A (en) * 1986-11-21 1990-07-31 Regents Of The University Of California Synthesis of fine-grained α-silicon nitride by a combustion process
US4877759A (en) * 1987-05-29 1989-10-31 Regents Of The University Of California One step process for producing dense aluminum nitride and composites thereof
US4990180A (en) * 1988-07-28 1991-02-05 The United States Of America As Represented By The United States Department Of Energy Combustion synthesis of low exothermic component rich composites
US5030600A (en) * 1988-10-06 1991-07-09 Benchmark Structural Ceramics Corp. Novel sialon composition

Also Published As

Publication number Publication date
FR2671339A1 (fr) 1992-07-10
ES2060460T3 (es) 1994-11-16
DE69200351T2 (de) 1995-02-16
EP0494129A1 (de) 1992-07-08
JPH04304359A (ja) 1992-10-27
ZA9213B (en) 1993-04-05
EP0494129B1 (de) 1994-08-31
US5314675A (en) 1994-05-24
CA2058682A1 (fr) 1992-07-04
KR100235522B1 (ko) 1999-12-15
AU642331B2 (en) 1993-10-14
FR2671339B1 (fr) 1993-08-27
KR920014709A (ko) 1992-08-25
TW197996B (de) 1993-01-11
JP3177278B2 (ja) 2001-06-18
CA2058682C (fr) 2002-03-26
BR9200009A (pt) 1992-09-08
AU1000792A (en) 1992-07-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PEM ABRASIFS REFRACTAIRES, PARIS-LA-DEFENSE,, FR