KR100229790B1 - 유전층을 갖는 박막형광로 조절장치 - Google Patents
유전층을 갖는 박막형광로 조절장치 Download PDFInfo
- Publication number
- KR100229790B1 KR100229790B1 KR1019960002315A KR19960002315A KR100229790B1 KR 100229790 B1 KR100229790 B1 KR 100229790B1 KR 1019960002315 A KR1019960002315 A KR 1019960002315A KR 19960002315 A KR19960002315 A KR 19960002315A KR 100229790 B1 KR100229790 B1 KR 100229790B1
- Authority
- KR
- South Korea
- Prior art keywords
- thin film
- layer
- electrode
- film type
- mirror
- Prior art date
Links
- 239000010409 thin film Substances 0.000 claims abstract description 192
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000010410 layer Substances 0.000 claims description 105
- 238000000034 method Methods 0.000 claims description 39
- 230000003287 optical effect Effects 0.000 claims description 26
- 238000005530 etching Methods 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 238000003491 array Methods 0.000 claims description 14
- 239000011241 protective layer Substances 0.000 claims description 13
- 238000004544 sputter deposition Methods 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 5
- 238000001771 vacuum deposition Methods 0.000 claims description 5
- 239000003989 dielectric material Substances 0.000 abstract description 6
- 239000000126 substance Substances 0.000 abstract description 5
- 230000008569 process Effects 0.000 description 21
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- 230000001771 impaired effect Effects 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000012538 light obscuration Methods 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- ZBSCCQXBYNSKPV-UHFFFAOYSA-N oxolead;oxomagnesium;2,4,5-trioxa-1$l^{5},3$l^{5}-diniobabicyclo[1.1.1]pentane 1,3-dioxide Chemical compound [Mg]=O.[Pb]=O.[Pb]=O.[Pb]=O.O1[Nb]2(=O)O[Nb]1(=O)O2 ZBSCCQXBYNSKPV-UHFFFAOYSA-N 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0102—Constructional details, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Video Image Reproduction Devices For Color Tv Systems (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
- Projection Apparatus (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Priority Applications (15)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW085100044A TW348324B (en) | 1996-01-31 | 1996-01-04 | Thin film actuated mirror array having dielectric layers |
| KR1019960002315A KR100229790B1 (ko) | 1996-01-31 | 1996-01-31 | 유전층을 갖는 박막형광로 조절장치 |
| AR33563296A AR001149A1 (es) | 1996-01-31 | 1996-03-04 | Conjunto de M x N espejos accionados de película delgada que presenta capas dieléctricas y método para fabricación del mismo |
| PE1996000192A PE47197A1 (es) | 1996-01-31 | 1996-03-20 | Conjunto de espejos accionados de pelicula delgada provisto de capas dielectricas |
| UY24186A UY24186A1 (es) | 1996-01-31 | 1996-03-22 | Conjunto de espejos accionados de pelicula delgada teniendo capas dielectricas |
| AU52899/96A AU724477B2 (en) | 1996-01-31 | 1996-04-08 | Thin film actuated mirror array having dielectric layers |
| CA002216557A CA2216557A1 (en) | 1996-01-31 | 1996-04-08 | Thin film actuated mirror array having dielectric layers |
| PL96322490A PL179839B1 (pl) | 1996-01-31 | 1996-04-08 | i sposób wytwarzania ukladu cienkowarstwowych ruchomych zwierciadel,zawierajacego warstwy dielektryczne PL PL PL |
| JP52750197A JP4152437B2 (ja) | 1996-01-31 | 1996-04-08 | 薄膜アクチュエーテッドミラーアレイ及びその製造方法 |
| PCT/KR1996/000048 WO1997028653A1 (en) | 1996-01-31 | 1996-04-08 | Thin film actuated mirror array having dielectric layers |
| CZ973041A CZ304197A3 (cs) | 1996-01-31 | 1996-04-08 | Seskupení ovládaných zrcadel tenkého filmu s dielektrickými vrstvami |
| BR9607803A BR9607803A (pt) | 1996-01-31 | 1996-04-08 | Conjunto de espelhos atuados por um filme fino tendo camada dielétricas |
| HU9801148A HUP9801148A3 (en) | 1996-01-31 | 1996-04-08 | Thin film actuated mirror array having dielectric layers |
| CN96192838A CN1104815C (zh) | 1996-01-31 | 1996-04-08 | 具有介质层的薄膜可驱动反射镜阵列 |
| MXPA/A/1997/007476A MXPA97007476A (en) | 1996-01-31 | 1997-09-30 | Formulation of mirrors operated by peliculelelgae that has dielectri coats |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960002315A KR100229790B1 (ko) | 1996-01-31 | 1996-01-31 | 유전층을 갖는 박막형광로 조절장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR970060514A KR970060514A (ko) | 1997-08-12 |
| KR100229790B1 true KR100229790B1 (ko) | 1999-11-15 |
Family
ID=36955865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960002315A KR100229790B1 (ko) | 1996-01-31 | 1996-01-31 | 유전층을 갖는 박막형광로 조절장치 |
Country Status (14)
| Country | Link |
|---|---|
| JP (1) | JP4152437B2 (pl) |
| KR (1) | KR100229790B1 (pl) |
| CN (1) | CN1104815C (pl) |
| AR (1) | AR001149A1 (pl) |
| AU (1) | AU724477B2 (pl) |
| BR (1) | BR9607803A (pl) |
| CA (1) | CA2216557A1 (pl) |
| CZ (1) | CZ304197A3 (pl) |
| HU (1) | HUP9801148A3 (pl) |
| PE (1) | PE47197A1 (pl) |
| PL (1) | PL179839B1 (pl) |
| TW (1) | TW348324B (pl) |
| UY (1) | UY24186A1 (pl) |
| WO (1) | WO1997028653A1 (pl) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4582380B2 (ja) * | 2001-05-11 | 2010-11-17 | ソニー株式会社 | 光変調素子とそれを用いた光学装置、および光変調素子の製造方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5260798A (en) * | 1989-11-01 | 1993-11-09 | Aura Systems, Inc. | Pixel intensity modulator |
| US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
| CA2175198A1 (en) * | 1993-10-29 | 1995-05-04 | Jeong Beom Ji | Thin film actuated mirror array and methods for its manufacture |
| CA2176111A1 (en) * | 1993-11-09 | 1995-05-18 | Jeong Beom Ji | Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof |
| US5355008A (en) * | 1993-11-19 | 1994-10-11 | Micrel, Inc. | Diamond shaped gate mesh for cellular MOS transistor array |
-
1996
- 1996-01-04 TW TW085100044A patent/TW348324B/zh active
- 1996-01-31 KR KR1019960002315A patent/KR100229790B1/ko not_active IP Right Cessation
- 1996-03-04 AR AR33563296A patent/AR001149A1/es unknown
- 1996-03-20 PE PE1996000192A patent/PE47197A1/es not_active Application Discontinuation
- 1996-03-22 UY UY24186A patent/UY24186A1/es not_active IP Right Cessation
- 1996-04-08 PL PL96322490A patent/PL179839B1/pl unknown
- 1996-04-08 WO PCT/KR1996/000048 patent/WO1997028653A1/en not_active Application Discontinuation
- 1996-04-08 HU HU9801148A patent/HUP9801148A3/hu unknown
- 1996-04-08 CN CN96192838A patent/CN1104815C/zh not_active Expired - Fee Related
- 1996-04-08 CA CA002216557A patent/CA2216557A1/en not_active Abandoned
- 1996-04-08 JP JP52750197A patent/JP4152437B2/ja not_active Expired - Fee Related
- 1996-04-08 CZ CZ973041A patent/CZ304197A3/cs unknown
- 1996-04-08 AU AU52899/96A patent/AU724477B2/en not_active Ceased
- 1996-04-08 BR BR9607803A patent/BR9607803A/pt not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| WO1997028653A1 (en) | 1997-08-07 |
| JP4152437B2 (ja) | 2008-09-17 |
| CN1104815C (zh) | 2003-04-02 |
| BR9607803A (pt) | 1998-07-07 |
| UY24186A1 (es) | 1996-06-21 |
| CZ304197A3 (cs) | 1998-04-15 |
| PL179839B1 (pl) | 2000-11-30 |
| TW348324B (en) | 1998-12-21 |
| KR970060514A (ko) | 1997-08-12 |
| HUP9801148A3 (en) | 2002-07-29 |
| AU724477B2 (en) | 2000-09-21 |
| JPH11503538A (ja) | 1999-03-26 |
| PE47197A1 (es) | 1998-02-06 |
| PL322490A1 (en) | 1998-02-02 |
| CN1179871A (zh) | 1998-04-22 |
| AR001149A1 (es) | 1997-09-24 |
| AU5289996A (en) | 1997-08-22 |
| CA2216557A1 (en) | 1997-08-07 |
| HUP9801148A2 (hu) | 1998-08-28 |
| MX9707476A (es) | 1997-11-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 20040728 Year of fee payment: 6 |
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| LAPS | Lapse due to unpaid annual fee |