KR100214915B1 - 반도체 구조체와 동적 랜덤 액세스 메모리 장치와 전기적 절연 방법 및 반도체 구조체 준비 방법 - Google Patents

반도체 구조체와 동적 랜덤 액세스 메모리 장치와 전기적 절연 방법 및 반도체 구조체 준비 방법 Download PDF

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Publication number
KR100214915B1
KR100214915B1 KR1019960038200A KR19960038200A KR100214915B1 KR 100214915 B1 KR100214915 B1 KR 100214915B1 KR 1019960038200 A KR1019960038200 A KR 1019960038200A KR 19960038200 A KR19960038200 A KR 19960038200A KR 100214915 B1 KR100214915 B1 KR 100214915B1
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KR
South Korea
Prior art keywords
conductor
lower conductor
stud
capacitor
bit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019960038200A
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English (en)
Korean (ko)
Other versions
KR970024220A (ko
Inventor
존 에드워드 크로닌
존 케네스 데브로제
웡 힝
Original Assignee
포만 제프리 엘
인터내셔널 비지네스 머신즈 코포레이션
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Publication of KR970024220A publication Critical patent/KR970024220A/ko
Application granted granted Critical
Publication of KR100214915B1 publication Critical patent/KR100214915B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
KR1019960038200A 1995-10-06 1996-09-04 반도체 구조체와 동적 랜덤 액세스 메모리 장치와 전기적 절연 방법 및 반도체 구조체 준비 방법 Expired - Fee Related KR100214915B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/540,387 US5602051A (en) 1995-10-06 1995-10-06 Method of making stacked electrical device having regions of electrical isolation and electrical connection on a given stack level
US08/540,387 1995-10-06
US8/540,387 1995-10-06

Publications (2)

Publication Number Publication Date
KR970024220A KR970024220A (ko) 1997-05-30
KR100214915B1 true KR100214915B1 (ko) 1999-08-02

Family

ID=24155241

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960038200A Expired - Fee Related KR100214915B1 (ko) 1995-10-06 1996-09-04 반도체 구조체와 동적 랜덤 액세스 메모리 장치와 전기적 절연 방법 및 반도체 구조체 준비 방법

Country Status (6)

Country Link
US (2) US5602051A (enExample)
EP (1) EP0767493A2 (enExample)
JP (1) JP3245070B2 (enExample)
KR (1) KR100214915B1 (enExample)
SG (1) SG43376A1 (enExample)
TW (1) TW318269B (enExample)

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* Cited by examiner, † Cited by third party
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JPH08293543A (ja) * 1995-04-25 1996-11-05 Mitsubishi Electric Corp 半導体装置及びその製造方法
US6429473B1 (en) * 1996-07-30 2002-08-06 International Business Machines Corporation DRAM cell with stacked capacitor self-aligned to bitline
JPH10173046A (ja) * 1996-12-10 1998-06-26 Sony Corp 半導体装置の製造方法
JPH10189898A (ja) * 1996-12-24 1998-07-21 Mitsubishi Electric Corp 半導体装置およびその製造方法
JP3577195B2 (ja) 1997-05-15 2004-10-13 株式会社ルネサステクノロジ 半導体装置およびその製造方法
US6104054A (en) * 1998-05-13 2000-08-15 Texas Instruments Incorporated Space-efficient layout method to reduce the effect of substrate capacitance in dielectrically isolated process technologies
FR2785720B1 (fr) * 1998-11-05 2003-01-03 St Microelectronics Sa Fabrication de memoire dram et de transistors mos
JP3626058B2 (ja) * 2000-01-25 2005-03-02 Ｎｅｃエレクトロニクス株式会社 半導体装置の製造方法
US6507063B2 (en) 2000-04-17 2003-01-14 International Business Machines Corporation Poly-poly/MOS capacitor having a gate encapsulating first electrode layer
JP3953715B2 (ja) * 2000-07-31 2007-08-08 富士通株式会社 半導体装置及びその製造方法
US6563162B2 (en) * 2001-03-21 2003-05-13 Samsung Electronics Co., Ltd. Semiconductor memory device for reducing parasitic bit line capacitance and method of fabricating the same
US20040163445A1 (en) * 2002-10-17 2004-08-26 Dimeo Frank Apparatus and process for sensing fluoro species in semiconductor processing systems
US7080545B2 (en) * 2002-10-17 2006-07-25 Advanced Technology Materials, Inc. Apparatus and process for sensing fluoro species in semiconductor processing systems
US7296458B2 (en) * 2002-10-17 2007-11-20 Advanced Technology Materials, Inc Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same
KR100797896B1 (ko) * 2004-11-12 2008-01-24 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 다양한 동작 전압들을 갖는 집적 회로들을 절연시키기 위한반도체 구조
KR100668833B1 (ko) * 2004-12-17 2007-01-16 주식회사 하이닉스반도체 반도체소자의 캐패시터 제조방법
US20060211253A1 (en) * 2005-03-16 2006-09-21 Ing-Shin Chen Method and apparatus for monitoring plasma conditions in an etching plasma processing facility
US10147735B2 (en) * 2015-03-13 2018-12-04 Toshiba Memory Corporation Semiconductor memory device and production method thereof
KR102490277B1 (ko) * 2017-09-26 2023-01-18 삼성전자주식회사 반도체 장치 및 그 제조 방법
KR20230067339A (ko) 2021-11-09 2023-05-16 삼성전자주식회사 집적회로 소자

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US5237528A (en) * 1982-11-04 1993-08-17 Hitachi, Ltd. Semiconductor memory
US5214496A (en) * 1982-11-04 1993-05-25 Hitachi, Ltd. Semiconductor memory
JP2602219B2 (ja) * 1987-02-06 1997-04-23 株式会社日立製作所 半導体記憶装置
KR920005632B1 (ko) * 1987-03-20 1992-07-10 가부시기가이샤 히다찌세이사꾸쇼 다층 산화 실리콘 질화 실리콘 유전체의 반도체장치 및 그의 제조방법
US5196910A (en) * 1987-04-24 1993-03-23 Hitachi, Ltd. Semiconductor memory device with recessed array region
JPH0821682B2 (ja) * 1987-04-24 1996-03-04 株式会社日立製作所 半導体装置の製造方法
US5264712A (en) * 1989-03-20 1993-11-23 Hitachi, Ltd. Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same
JP2590171B2 (ja) * 1988-01-08 1997-03-12 株式会社日立製作所 半導体記憶装置
US5140389A (en) * 1988-01-08 1992-08-18 Hitachi, Ltd. Semiconductor memory device having stacked capacitor cells
JPH0414868A (ja) * 1990-05-09 1992-01-20 Hitachi Ltd 半導体記憶装置とその製造方法
JPH04342164A (ja) * 1991-05-20 1992-11-27 Hitachi Ltd 半導体集積回路装置の形成方法
US5338700A (en) * 1993-04-14 1994-08-16 Micron Semiconductor, Inc. Method of forming a bit line over capacitor array of memory cells
US5478772A (en) * 1993-04-02 1995-12-26 Micron Technology, Inc. Method for forming a storage cell capacitor compatible with high dielectric constant materials
US5340765A (en) * 1993-08-13 1994-08-23 Micron Semiconductor, Inc. Method for forming enhanced capacitance stacked capacitor structures using hemi-spherical grain polysilicon
KR970000229B1 (ko) * 1993-08-30 1997-01-06 현대전자산업 주식회사 디램 캐패시터의 제조방법

Also Published As

Publication number Publication date
US5804853A (en) 1998-09-08
TW318269B (enExample) 1997-10-21
KR970024220A (ko) 1997-05-30
SG43376A1 (en) 1997-10-17
US5602051A (en) 1997-02-11
EP0767493A2 (en) 1997-04-09
JPH09129851A (ja) 1997-05-16
JP3245070B2 (ja) 2002-01-07

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