KR0136684B1 - Semiconductor device and manufacture thereof - Google Patents

Semiconductor device and manufacture thereof

Info

Publication number
KR0136684B1
KR0136684B1 KR94011528A KR19940011528A KR0136684B1 KR 0136684 B1 KR0136684 B1 KR 0136684B1 KR 94011528 A KR94011528 A KR 94011528A KR 19940011528 A KR19940011528 A KR 19940011528A KR 0136684 B1 KR0136684 B1 KR 0136684B1
Authority
KR
South Korea
Prior art keywords
manufacture
semiconductor device
semiconductor
Prior art date
Application number
KR94011528A
Other languages
English (en)
Inventor
Kosaku Yano
Tetsuya Ueda
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Application granted granted Critical
Publication of KR0136684B1 publication Critical patent/KR0136684B1/ko

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5226Via connections in a multilevel interconnection structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76805Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics the opening being a via or contact hole penetrating the underlying conductor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR94011528A 1993-06-01 1994-05-26 Semiconductor device and manufacture thereof KR0136684B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13033993 1993-06-01

Publications (1)

Publication Number Publication Date
KR0136684B1 true KR0136684B1 (en) 1998-04-29

Family

ID=15032019

Family Applications (1)

Application Number Title Priority Date Filing Date
KR94011528A KR0136684B1 (en) 1993-06-01 1994-05-26 Semiconductor device and manufacture thereof

Country Status (2)

Country Link
US (2) US5760429A (ko)
KR (1) KR0136684B1 (ko)

Cited By (1)

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KR20150141777A (ko) * 2014-06-10 2015-12-21 삼성전자주식회사 논리 셀 및 이를 포함하는 집적회로 소자와 논리 셀의 제조 방법 및 집적회로 소자의 제조 방법

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JP2009111013A (ja) * 2007-10-26 2009-05-21 Rohm Co Ltd 半導体装置
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US7928577B2 (en) 2008-07-16 2011-04-19 Micron Technology, Inc. Interconnect structures for integration of multi-layered integrated circuit devices and methods for forming the same
US9293366B2 (en) 2010-04-28 2016-03-22 Taiwan Semiconductor Manufacturing Company, Ltd. Through-substrate vias with improved connections
JP2012216643A (ja) * 2011-03-31 2012-11-08 Toshiba Corp 半導体記憶装置及びその製造方法
TWI551207B (zh) * 2014-09-12 2016-09-21 矽品精密工業股份有限公司 基板結構及其製法
US10777510B2 (en) 2016-11-28 2020-09-15 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device including dummy via anchored to dummy metal layer
US10559594B2 (en) * 2017-04-11 2020-02-11 Ahmad Tarakji Approach to the manufacturing of monolithic 3-dimensional high-rise integrated-circuits with vertically-stacked double-sided fully-depleted silicon-on-insulator transistors
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150141777A (ko) * 2014-06-10 2015-12-21 삼성전자주식회사 논리 셀 및 이를 포함하는 집적회로 소자와 논리 셀의 제조 방법 및 집적회로 소자의 제조 방법

Also Published As

Publication number Publication date
US6022804A (en) 2000-02-08
US5760429A (en) 1998-06-02

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