JPWO2025154283A5 - - Google Patents

Info

Publication number
JPWO2025154283A5
JPWO2025154283A5 JP2024564530A JP2024564530A JPWO2025154283A5 JP WO2025154283 A5 JPWO2025154283 A5 JP WO2025154283A5 JP 2024564530 A JP2024564530 A JP 2024564530A JP 2024564530 A JP2024564530 A JP 2024564530A JP WO2025154283 A5 JPWO2025154283 A5 JP WO2025154283A5
Authority
JP
Japan
Prior art keywords
chamber
air
clean room
clean
exhaust duct
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024564530A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2025154283A1 (https=
JP7825739B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2024/001524 external-priority patent/WO2025154283A1/ja
Publication of JPWO2025154283A1 publication Critical patent/JPWO2025154283A1/ja
Publication of JPWO2025154283A5 publication Critical patent/JPWO2025154283A5/ja
Application granted granted Critical
Publication of JP7825739B2 publication Critical patent/JP7825739B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2024564530A 2024-01-19 2024-01-19 クリーンルーム施設 Active JP7825739B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2024/001524 WO2025154283A1 (ja) 2024-01-19 2024-01-19 クリーンルーム施設

Publications (3)

Publication Number Publication Date
JPWO2025154283A1 JPWO2025154283A1 (https=) 2025-07-24
JPWO2025154283A5 true JPWO2025154283A5 (https=) 2025-12-16
JP7825739B2 JP7825739B2 (ja) 2026-03-06

Family

ID=96470902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024564530A Active JP7825739B2 (ja) 2024-01-19 2024-01-19 クリーンルーム施設

Country Status (3)

Country Link
JP (1) JP7825739B2 (https=)
TW (1) TW202530602A (https=)
WO (1) WO2025154283A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3521801B2 (ja) * 1999-06-16 2004-04-26 日立プラント建設株式会社 クリーンルーム設備
US8147301B2 (en) * 2006-01-19 2012-04-03 Ray Ghattas Air handling system for clean room
JP5286053B2 (ja) * 2008-10-29 2013-09-11 高砂熱学工業株式会社 クリーンルーム設備およびその運転方法
JP6501679B2 (ja) * 2015-08-31 2019-04-17 株式会社日立製作所 クリーンルーム用空調システム
CA3150088C (en) * 2019-12-04 2023-10-10 Mitsuru SEKIZAWA Air conditioning system
JP7649850B2 (ja) * 2021-06-04 2025-03-21 日立グローバルライフソリューションズ株式会社 空調システム
EP4491958A4 (en) * 2022-03-09 2026-01-14 Hitachi Global Life Solutions Inc CLEANROOM INSTALLATION

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