TW202530602A - 無塵室設施 - Google Patents

無塵室設施

Info

Publication number
TW202530602A
TW202530602A TW113138604A TW113138604A TW202530602A TW 202530602 A TW202530602 A TW 202530602A TW 113138604 A TW113138604 A TW 113138604A TW 113138604 A TW113138604 A TW 113138604A TW 202530602 A TW202530602 A TW 202530602A
Authority
TW
Taiwan
Prior art keywords
chamber
cleanroom
air
exhaust
cleanrooms
Prior art date
Application number
TW113138604A
Other languages
English (en)
Chinese (zh)
Inventor
今口信弘
西村典俊
松崎和仁
Original Assignee
日商日立環球生活方案股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日立環球生活方案股份有限公司 filed Critical 日商日立環球生活方案股份有限公司
Publication of TW202530602A publication Critical patent/TW202530602A/zh

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00Ventilation
    • F24F7/04Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
TW113138604A 2024-01-19 2024-10-11 無塵室設施 TW202530602A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2024/001524 WO2025154283A1 (ja) 2024-01-19 2024-01-19 クリーンルーム施設
WOPCT/JP2024/001524 2024-01-19

Publications (1)

Publication Number Publication Date
TW202530602A true TW202530602A (zh) 2025-08-01

Family

ID=96470902

Family Applications (1)

Application Number Title Priority Date Filing Date
TW113138604A TW202530602A (zh) 2024-01-19 2024-10-11 無塵室設施

Country Status (3)

Country Link
JP (1) JP7825739B2 (https=)
TW (1) TW202530602A (https=)
WO (1) WO2025154283A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3521801B2 (ja) * 1999-06-16 2004-04-26 日立プラント建設株式会社 クリーンルーム設備
US8147301B2 (en) * 2006-01-19 2012-04-03 Ray Ghattas Air handling system for clean room
JP5286053B2 (ja) * 2008-10-29 2013-09-11 高砂熱学工業株式会社 クリーンルーム設備およびその運転方法
JP6501679B2 (ja) * 2015-08-31 2019-04-17 株式会社日立製作所 クリーンルーム用空調システム
CA3150088C (en) * 2019-12-04 2023-10-10 Mitsuru SEKIZAWA Air conditioning system
JP7649850B2 (ja) * 2021-06-04 2025-03-21 日立グローバルライフソリューションズ株式会社 空調システム
EP4491958A4 (en) * 2022-03-09 2026-01-14 Hitachi Global Life Solutions Inc CLEANROOM INSTALLATION

Also Published As

Publication number Publication date
WO2025154283A1 (ja) 2025-07-24
JPWO2025154283A1 (https=) 2025-07-24
JP7825739B2 (ja) 2026-03-06

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