JP7825739B2 - クリーンルーム施設 - Google Patents

クリーンルーム施設

Info

Publication number
JP7825739B2
JP7825739B2 JP2024564530A JP2024564530A JP7825739B2 JP 7825739 B2 JP7825739 B2 JP 7825739B2 JP 2024564530 A JP2024564530 A JP 2024564530A JP 2024564530 A JP2024564530 A JP 2024564530A JP 7825739 B2 JP7825739 B2 JP 7825739B2
Authority
JP
Japan
Prior art keywords
chamber
clean room
air
clean
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024564530A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2025154283A1 (https=
JPWO2025154283A5 (https=
Inventor
信弘 今口
典俊 西村
和仁 松崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Global Life Solutions Inc
Original Assignee
Hitachi Global Life Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Global Life Solutions Inc filed Critical Hitachi Global Life Solutions Inc
Publication of JPWO2025154283A1 publication Critical patent/JPWO2025154283A1/ja
Publication of JPWO2025154283A5 publication Critical patent/JPWO2025154283A5/ja
Application granted granted Critical
Publication of JP7825739B2 publication Critical patent/JP7825739B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP2024564530A 2024-01-19 2024-01-19 クリーンルーム施設 Active JP7825739B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2024/001524 WO2025154283A1 (ja) 2024-01-19 2024-01-19 クリーンルーム施設

Publications (3)

Publication Number Publication Date
JPWO2025154283A1 JPWO2025154283A1 (https=) 2025-07-24
JPWO2025154283A5 JPWO2025154283A5 (https=) 2025-12-16
JP7825739B2 true JP7825739B2 (ja) 2026-03-06

Family

ID=96470902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024564530A Active JP7825739B2 (ja) 2024-01-19 2024-01-19 クリーンルーム施設

Country Status (3)

Country Link
JP (1) JP7825739B2 (https=)
TW (1) TW202530602A (https=)
WO (1) WO2025154283A1 (https=)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000356379A (ja) 1999-06-16 2000-12-26 Hitachi Plant Eng & Constr Co Ltd クリーンルーム設備
JP2010133566A (ja) 2008-10-29 2010-06-17 Takasago Thermal Eng Co Ltd クリーンルーム設備およびその運転方法
US20120190287A1 (en) 2006-01-19 2012-07-26 Ray Ghattas Air handling system for clean room
JP2017048940A (ja) 2015-08-31 2017-03-09 株式会社日立製作所 クリーンルーム用空調システム
WO2021111550A1 (ja) 2019-12-04 2021-06-10 日立グローバルライフソリューションズ株式会社 空調システム
WO2022254705A1 (ja) 2021-06-04 2022-12-08 日立グローバルライフソリューションズ株式会社 空調システム
WO2023170808A1 (ja) 2022-03-09 2023-09-14 日立グローバルライフソリューションズ株式会社 クリーンルーム施設

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000356379A (ja) 1999-06-16 2000-12-26 Hitachi Plant Eng & Constr Co Ltd クリーンルーム設備
US20120190287A1 (en) 2006-01-19 2012-07-26 Ray Ghattas Air handling system for clean room
JP2010133566A (ja) 2008-10-29 2010-06-17 Takasago Thermal Eng Co Ltd クリーンルーム設備およびその運転方法
JP2017048940A (ja) 2015-08-31 2017-03-09 株式会社日立製作所 クリーンルーム用空調システム
WO2021111550A1 (ja) 2019-12-04 2021-06-10 日立グローバルライフソリューションズ株式会社 空調システム
WO2022254705A1 (ja) 2021-06-04 2022-12-08 日立グローバルライフソリューションズ株式会社 空調システム
WO2023170808A1 (ja) 2022-03-09 2023-09-14 日立グローバルライフソリューションズ株式会社 クリーンルーム施設

Also Published As

Publication number Publication date
WO2025154283A1 (ja) 2025-07-24
JPWO2025154283A1 (https=) 2025-07-24
TW202530602A (zh) 2025-08-01

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