JPWO2024195024A5 - - Google Patents

Info

Publication number
JPWO2024195024A5
JPWO2024195024A5 JP2025507993A JP2025507993A JPWO2024195024A5 JP WO2024195024 A5 JPWO2024195024 A5 JP WO2024195024A5 JP 2025507993 A JP2025507993 A JP 2025507993A JP 2025507993 A JP2025507993 A JP 2025507993A JP WO2024195024 A5 JPWO2024195024 A5 JP WO2024195024A5
Authority
JP
Japan
Prior art keywords
power transmission
milling apparatus
ion milling
transmission unit
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025507993A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024195024A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/011087 external-priority patent/WO2024195024A1/ja
Publication of JPWO2024195024A1 publication Critical patent/JPWO2024195024A1/ja
Publication of JPWO2024195024A5 publication Critical patent/JPWO2024195024A5/ja
Pending legal-status Critical Current

Links

JP2025507993A 2023-03-22 2023-03-22 Pending JPWO2024195024A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/011087 WO2024195024A1 (ja) 2023-03-22 2023-03-22 イオンミリング装置

Publications (2)

Publication Number Publication Date
JPWO2024195024A1 JPWO2024195024A1 (https=) 2024-09-26
JPWO2024195024A5 true JPWO2024195024A5 (https=) 2025-10-14

Family

ID=92841100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025507993A Pending JPWO2024195024A1 (https=) 2023-03-22 2023-03-22

Country Status (3)

Country Link
JP (1) JPWO2024195024A1 (https=)
KR (1) KR20250137690A (https=)
WO (1) WO2024195024A1 (https=)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018013133A (ja) * 2016-07-19 2018-01-25 株式会社デンソー 電磁クラッチ
JP6928943B2 (ja) 2017-03-28 2021-09-01 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置

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