KR20250137690A - 이온 밀링 장치 - Google Patents

이온 밀링 장치

Info

Publication number
KR20250137690A
KR20250137690A KR1020257028124A KR20257028124A KR20250137690A KR 20250137690 A KR20250137690 A KR 20250137690A KR 1020257028124 A KR1020257028124 A KR 1020257028124A KR 20257028124 A KR20257028124 A KR 20257028124A KR 20250137690 A KR20250137690 A KR 20250137690A
Authority
KR
South Korea
Prior art keywords
power transmission
stage
milling device
transmission unit
ion milling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257028124A
Other languages
English (en)
Korean (ko)
Inventor
쇼타 아이다
히사유키 다카스
나오히로 후지타
Original Assignee
주식회사 히타치하이테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 히타치하이테크 filed Critical 주식회사 히타치하이테크
Publication of KR20250137690A publication Critical patent/KR20250137690A/ko
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Drying Of Semiconductors (AREA)
KR1020257028124A 2023-03-22 2023-03-22 이온 밀링 장치 Pending KR20250137690A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/011087 WO2024195024A1 (ja) 2023-03-22 2023-03-22 イオンミリング装置

Publications (1)

Publication Number Publication Date
KR20250137690A true KR20250137690A (ko) 2025-09-18

Family

ID=92841100

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257028124A Pending KR20250137690A (ko) 2023-03-22 2023-03-22 이온 밀링 장치

Country Status (3)

Country Link
JP (1) JPWO2024195024A1 (https=)
KR (1) KR20250137690A (https=)
WO (1) WO2024195024A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018166042A (ja) 2017-03-28 2018-10-25 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018013133A (ja) * 2016-07-19 2018-01-25 株式会社デンソー 電磁クラッチ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018166042A (ja) 2017-03-28 2018-10-25 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPWO2024195024A1 (https=) 2024-09-26
WO2024195024A1 (ja) 2024-09-26

Similar Documents

Publication Publication Date Title
JP4070602B2 (ja) イオン注入用のハイブリッド走査システム及び方法
TWI698900B (zh) 離子研磨裝置及離子研磨裝置的離子源調整方法
CN101061563B (zh) 经改进的扫描离子注入期间的离子束利用
US7057192B2 (en) Radial scan arm and collimator for serial processing of semiconductor wafers with ribbon beams
KR20250137690A (ko) 이온 밀링 장치
KR102720982B1 (ko) 이온 밀링 장치
JP2009070886A (ja) イオン注入方法及びイオン注入装置
KR102292249B1 (ko) 입자가속시스템 및 입자가속시스템의 조정방법
JP4818977B2 (ja) 高速原子線源および高速原子線放出方法ならびに表面改質装置
KR102823067B1 (ko) 이온 밀링 장치
JP2007317650A5 (https=)
US20230197401A1 (en) Apparatus and Method for Milling Sample
KR102904382B1 (ko) 이온 밀링 장치 및 그것을 이용한 가공 방법
US7550715B2 (en) Fast atom bombardment source, fast atom beam emission method, and surface modification apparatus
JP2018022701A (ja) イオンガン及びイオンミリング装置、イオンミリング方法
WO2024195014A1 (ja) イオンミリング装置及びそれを用いた加工方法
JP5999967B2 (ja) 照射方法、処理装置
US20250308834A1 (en) Ion milling device and ion milling method
JP2014007313A (ja) 基板保持装置、基板処理装置
KR20240130798A (ko) 이온 밀링 장치
JP2025041874A (ja) 原子線発生装置および接合装置
JPH073131U (ja) イオン注入装置
WO2024201722A1 (ja) イオンミリング装置、メンテナンス方法及びイオンミリング装置の収束電極
JP2008147142A (ja) イオン注入装置
KR20070075860A (ko) 이온 주입 장치

Legal Events

Date Code Title Description
D11 Substantive examination requested

Free format text: ST27 STATUS EVENT CODE: A-1-2-D10-D11-EXM-PA0201 (AS PROVIDED BY THE NATIONAL OFFICE)

E13 Pre-grant limitation requested

Free format text: ST27 STATUS EVENT CODE: A-2-3-E10-E13-LIM-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

P11 Amendment of application requested

Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P11-NAP-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13 Application amended

Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P13-NAP-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

Q12 Application published

Free format text: ST27 STATUS EVENT CODE: A-1-1-Q10-Q12-NAP-PG1501 (AS PROVIDED BY THE NATIONAL OFFICE)

PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701