JPWO2024195024A1 - - Google Patents
Info
- Publication number
- JPWO2024195024A1 JPWO2024195024A1 JP2025507993A JP2025507993A JPWO2024195024A1 JP WO2024195024 A1 JPWO2024195024 A1 JP WO2024195024A1 JP 2025507993 A JP2025507993 A JP 2025507993A JP 2025507993 A JP2025507993 A JP 2025507993A JP WO2024195024 A1 JPWO2024195024 A1 JP WO2024195024A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Sampling And Sample Adjustment (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/011087 WO2024195024A1 (ja) | 2023-03-22 | 2023-03-22 | イオンミリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024195024A1 true JPWO2024195024A1 (https=) | 2024-09-26 |
| JPWO2024195024A5 JPWO2024195024A5 (https=) | 2025-10-14 |
Family
ID=92841100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025507993A Pending JPWO2024195024A1 (https=) | 2023-03-22 | 2023-03-22 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2024195024A1 (https=) |
| KR (1) | KR20250137690A (https=) |
| WO (1) | WO2024195024A1 (https=) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018013133A (ja) * | 2016-07-19 | 2018-01-25 | 株式会社デンソー | 電磁クラッチ |
| JP6928943B2 (ja) | 2017-03-28 | 2021-09-01 | 株式会社日立ハイテクサイエンス | 荷電粒子ビーム装置 |
-
2023
- 2023-03-22 KR KR1020257028124A patent/KR20250137690A/ko active Pending
- 2023-03-22 WO PCT/JP2023/011087 patent/WO2024195024A1/ja not_active Ceased
- 2023-03-22 JP JP2025507993A patent/JPWO2024195024A1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024195024A1 (ja) | 2024-09-26 |
| KR20250137690A (ko) | 2025-09-18 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20250731 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250731 |