JPWO2024180611A5 - - Google Patents

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Publication number
JPWO2024180611A5
JPWO2024180611A5 JP2023553025A JP2023553025A JPWO2024180611A5 JP WO2024180611 A5 JPWO2024180611 A5 JP WO2024180611A5 JP 2023553025 A JP2023553025 A JP 2023553025A JP 2023553025 A JP2023553025 A JP 2023553025A JP WO2024180611 A5 JPWO2024180611 A5 JP WO2024180611A5
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JP
Japan
Prior art keywords
plug
outer edge
joint portion
hole
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023553025A
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English (en)
Japanese (ja)
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JPWO2024180611A1 (https=
JP7657310B2 (ja
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Priority claimed from PCT/JP2023/007066 external-priority patent/WO2024180611A1/ja
Publication of JPWO2024180611A1 publication Critical patent/JPWO2024180611A1/ja
Publication of JPWO2024180611A5 publication Critical patent/JPWO2024180611A5/ja
Application granted granted Critical
Publication of JP7657310B2 publication Critical patent/JP7657310B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023553025A 2023-02-27 2023-02-27 ウエハ載置台 Active JP7657310B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/007066 WO2024180611A1 (ja) 2023-02-27 2023-02-27 ウエハ載置台

Publications (3)

Publication Number Publication Date
JPWO2024180611A1 JPWO2024180611A1 (https=) 2024-09-06
JPWO2024180611A5 true JPWO2024180611A5 (https=) 2025-02-04
JP7657310B2 JP7657310B2 (ja) 2025-04-04

Family

ID=92461088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023553025A Active JP7657310B2 (ja) 2023-02-27 2023-02-27 ウエハ載置台

Country Status (6)

Country Link
US (1) US12451385B2 (https=)
JP (1) JP7657310B2 (https=)
KR (1) KR102721433B1 (https=)
CN (1) CN120677559A (https=)
TW (1) TW202435355A (https=)
WO (1) WO2024180611A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025134287A1 (ja) * 2023-12-20 2025-06-26 日本碍子株式会社 半導体製造装置用部材

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5539609A (en) * 1992-12-02 1996-07-23 Applied Materials, Inc. Electrostatic chuck usable in high density plasma
US6108189A (en) * 1996-04-26 2000-08-22 Applied Materials, Inc. Electrostatic chuck having improved gas conduits
US6581275B2 (en) * 2001-01-22 2003-06-24 Applied Materials Inc. Fabricating an electrostatic chuck having plasma resistant gas conduits
JP4557814B2 (ja) 2005-06-09 2010-10-06 パナソニック株式会社 プラズマ処理装置
JP5449750B2 (ja) * 2008-11-19 2014-03-19 株式会社日本セラテック 静電チャックおよびその製造方法
US11227749B2 (en) * 2016-02-18 2022-01-18 Lam Research Corporation 3D printed plasma arrestor for an electrostatic chuck
JP6767829B2 (ja) 2016-09-27 2020-10-14 日本特殊陶業株式会社 対象物載置用部材
JP6865145B2 (ja) * 2016-12-16 2021-04-28 日本特殊陶業株式会社 保持装置
JP6994981B2 (ja) 2018-02-26 2022-01-14 東京エレクトロン株式会社 プラズマ処理装置及び載置台の製造方法
WO2020004478A1 (ja) * 2018-06-29 2020-01-02 北陸成型工業株式会社 静電チャック
KR102590641B1 (ko) * 2018-12-14 2023-10-17 닛폰 하츠죠 가부시키가이샤 유로가 형성된 플레이트
JP6729735B1 (ja) 2019-03-05 2020-07-22 Toto株式会社 静電チャック
US20200411355A1 (en) 2019-06-28 2020-12-31 Applied Materials, Inc. Apparatus for reduction or prevention of arcing in a substrate support
JP7299805B2 (ja) * 2019-09-09 2023-06-28 日本特殊陶業株式会社 保持装置
JP7600025B2 (ja) * 2021-04-23 2024-12-16 新光電気工業株式会社 静電吸着部材及び基板固定装置
JP7645724B2 (ja) * 2021-06-25 2025-03-14 東京エレクトロン株式会社 プラズマ処理装置及び基板支持部
JP7255659B1 (ja) * 2021-11-25 2023-04-11 住友大阪セメント株式会社 静電チャック装置
JP7560675B1 (ja) * 2022-12-05 2024-10-02 日本碍子株式会社 半導体製造装置用部材

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