JPWO2024014473A5 - - Google Patents

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Publication number
JPWO2024014473A5
JPWO2024014473A5 JP2024533732A JP2024533732A JPWO2024014473A5 JP WO2024014473 A5 JPWO2024014473 A5 JP WO2024014473A5 JP 2024533732 A JP2024533732 A JP 2024533732A JP 2024533732 A JP2024533732 A JP 2024533732A JP WO2024014473 A5 JPWO2024014473 A5 JP WO2024014473A5
Authority
JP
Japan
Prior art keywords
insulating layer
layer
wiring
dielectric constant
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024533732A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024014473A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/025696 external-priority patent/WO2024014473A1/ja
Publication of JPWO2024014473A1 publication Critical patent/JPWO2024014473A1/ja
Publication of JPWO2024014473A5 publication Critical patent/JPWO2024014473A5/ja
Pending legal-status Critical Current

Links

JP2024533732A 2022-07-15 2023-07-12 Pending JPWO2024014473A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022114107 2022-07-15
PCT/JP2023/025696 WO2024014473A1 (ja) 2022-07-15 2023-07-12 半導体装置

Publications (2)

Publication Number Publication Date
JPWO2024014473A1 JPWO2024014473A1 (https=) 2024-01-18
JPWO2024014473A5 true JPWO2024014473A5 (https=) 2025-03-26

Family

ID=89536746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024533732A Pending JPWO2024014473A1 (https=) 2022-07-15 2023-07-12

Country Status (2)

Country Link
JP (1) JPWO2024014473A1 (https=)
WO (1) WO2024014473A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002289609A (ja) * 2001-03-27 2002-10-04 Toshiba Corp 半導体装置及びその製造方法
US9502284B2 (en) * 2013-12-31 2016-11-22 Texas Instruments Incorporated Metal thin film resistor and process
WO2022149371A1 (ja) * 2021-01-08 2022-07-14 ローム株式会社 電子部品

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