JPWO2024014473A5 - - Google Patents
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- Publication number
- JPWO2024014473A5 JPWO2024014473A5 JP2024533732A JP2024533732A JPWO2024014473A5 JP WO2024014473 A5 JPWO2024014473 A5 JP WO2024014473A5 JP 2024533732 A JP2024533732 A JP 2024533732A JP 2024533732 A JP2024533732 A JP 2024533732A JP WO2024014473 A5 JPWO2024014473 A5 JP WO2024014473A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- layer
- wiring
- dielectric constant
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 30
- 238000002161 passivation Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022114107 | 2022-07-15 | ||
| PCT/JP2023/025696 WO2024014473A1 (ja) | 2022-07-15 | 2023-07-12 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024014473A1 JPWO2024014473A1 (https=) | 2024-01-18 |
| JPWO2024014473A5 true JPWO2024014473A5 (https=) | 2025-03-26 |
Family
ID=89536746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024533732A Pending JPWO2024014473A1 (https=) | 2022-07-15 | 2023-07-12 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2024014473A1 (https=) |
| WO (1) | WO2024014473A1 (https=) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002289609A (ja) * | 2001-03-27 | 2002-10-04 | Toshiba Corp | 半導体装置及びその製造方法 |
| US9502284B2 (en) * | 2013-12-31 | 2016-11-22 | Texas Instruments Incorporated | Metal thin film resistor and process |
| WO2022149371A1 (ja) * | 2021-01-08 | 2022-07-14 | ローム株式会社 | 電子部品 |
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2023
- 2023-07-12 JP JP2024533732A patent/JPWO2024014473A1/ja active Pending
- 2023-07-12 WO PCT/JP2023/025696 patent/WO2024014473A1/ja not_active Ceased