JPWO2023190868A5 - - Google Patents

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Publication number
JPWO2023190868A5
JPWO2023190868A5 JP2024512795A JP2024512795A JPWO2023190868A5 JP WO2023190868 A5 JPWO2023190868 A5 JP WO2023190868A5 JP 2024512795 A JP2024512795 A JP 2024512795A JP 2024512795 A JP2024512795 A JP 2024512795A JP WO2023190868 A5 JPWO2023190868 A5 JP WO2023190868A5
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JP
Japan
Prior art keywords
arm
support portion
substrate
main body
end portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024512795A
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English (en)
Japanese (ja)
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JPWO2023190868A1 (cg-RX-API-DMAC7.html
JP7818692B2 (ja
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Priority claimed from PCT/JP2022/016244 external-priority patent/WO2023188181A1/ja
Application filed filed Critical
Publication of JPWO2023190868A1 publication Critical patent/JPWO2023190868A1/ja
Publication of JPWO2023190868A5 publication Critical patent/JPWO2023190868A5/ja
Application granted granted Critical
Publication of JP7818692B2 publication Critical patent/JP7818692B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2024512795A 2022-03-30 2023-03-30 基板搬送システム及び移載ロボット Active JP7818692B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/JP2022/016244 WO2023188181A1 (ja) 2022-03-30 2022-03-30 基板搬送システム及び移載ロボット
JPPCT/JP2022/016244 2022-03-30
PCT/JP2023/013176 WO2023190868A1 (ja) 2022-03-30 2023-03-30 基板搬送システム及び移載ロボット

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2026017665A Division JP2026071332A (ja) 2022-03-30 2026-02-05 移載ロボット及び基板搬送システム

Publications (3)

Publication Number Publication Date
JPWO2023190868A1 JPWO2023190868A1 (cg-RX-API-DMAC7.html) 2023-10-05
JPWO2023190868A5 true JPWO2023190868A5 (cg-RX-API-DMAC7.html) 2024-12-20
JP7818692B2 JP7818692B2 (ja) 2026-02-20

Family

ID=88199748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024512795A Active JP7818692B2 (ja) 2022-03-30 2023-03-30 基板搬送システム及び移載ロボット

Country Status (5)

Country Link
US (1) US20250018578A1 (cg-RX-API-DMAC7.html)
JP (1) JP7818692B2 (cg-RX-API-DMAC7.html)
CN (1) CN118974905A (cg-RX-API-DMAC7.html)
TW (1) TWI867482B (cg-RX-API-DMAC7.html)
WO (2) WO2023188181A1 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102862151B1 (ko) * 2022-12-13 2025-09-18 세메스 주식회사 지지 유닛, 라인 스토리지 유닛 및 이를 포함하는 반송 시스템

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6121743A (en) * 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
JP4852719B2 (ja) * 2005-12-05 2012-01-11 日本電産サンキョー株式会社 多関節型ロボット
JP4746027B2 (ja) * 2007-12-10 2011-08-10 川崎重工業株式会社 基板搬送方法
JP5316521B2 (ja) * 2010-03-31 2013-10-16 株式会社安川電機 基板搬送システム、基板処理システムおよび基板搬送ロボット
JP5462064B2 (ja) * 2010-04-28 2014-04-02 日本電産サンキョー株式会社 産業用ロボット
JP5621796B2 (ja) * 2012-01-31 2014-11-12 株式会社安川電機 搬送システム
JP5990359B2 (ja) * 2012-10-04 2016-09-14 平田機工株式会社 搬入出ロボット
KR20160055010A (ko) 2014-11-07 2016-05-17 삼성전자주식회사 웨이퍼 이송 로봇 및 그 제어 방법
US10580682B2 (en) * 2017-02-15 2020-03-03 Persimmon Technologies, Corp. Material-handling robot with multiple end-effectors
US10155309B1 (en) * 2017-11-16 2018-12-18 Lam Research Corporation Wafer handling robots with rotational joint encoders

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