JPWO2023176373A5 - - Google Patents

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Publication number
JPWO2023176373A5
JPWO2023176373A5 JP2024507661A JP2024507661A JPWO2023176373A5 JP WO2023176373 A5 JPWO2023176373 A5 JP WO2023176373A5 JP 2024507661 A JP2024507661 A JP 2024507661A JP 2024507661 A JP2024507661 A JP 2024507661A JP WO2023176373 A5 JPWO2023176373 A5 JP WO2023176373A5
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JP
Japan
Prior art keywords
electrode
gate
semiconductor layer
length
source
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JP2024507661A
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English (en)
Japanese (ja)
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JPWO2023176373A1 (https=
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Priority claimed from PCT/JP2023/006800 external-priority patent/WO2023176373A1/ja
Publication of JPWO2023176373A1 publication Critical patent/JPWO2023176373A1/ja
Publication of JPWO2023176373A5 publication Critical patent/JPWO2023176373A5/ja
Pending legal-status Critical Current

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JP2024507661A 2022-03-15 2023-02-24 Pending JPWO2023176373A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022040038 2022-03-15
PCT/JP2023/006800 WO2023176373A1 (ja) 2022-03-15 2023-02-24 半導体装置

Publications (2)

Publication Number Publication Date
JPWO2023176373A1 JPWO2023176373A1 (https=) 2023-09-21
JPWO2023176373A5 true JPWO2023176373A5 (https=) 2024-11-21

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ID=88023474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024507661A Pending JPWO2023176373A1 (https=) 2022-03-15 2023-02-24

Country Status (3)

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US (1) US20240429297A1 (https=)
JP (1) JPWO2023176373A1 (https=)
WO (1) WO2023176373A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202404087A (zh) * 2022-06-30 2024-01-16 聯華電子股份有限公司 高電子遷移率電晶體元件的製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7535257B2 (ja) * 2020-03-31 2024-08-16 豊田合成株式会社 半導体素子および装置
WO2021200566A1 (ja) * 2020-03-31 2021-10-07 豊田合成株式会社 半導体素子および装置
CN115315813A (zh) * 2020-03-31 2022-11-08 丰田合成株式会社 半导体元件以及装置
WO2022113536A1 (ja) * 2020-11-26 2022-06-02 ローム株式会社 窒化物半導体装置およびその製造方法

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