JP6024579B2 - Hemtを備えた半導体装置 - Google Patents
Hemtを備えた半導体装置 Download PDFInfo
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- JP6024579B2 JP6024579B2 JP2013083173A JP2013083173A JP6024579B2 JP 6024579 B2 JP6024579 B2 JP 6024579B2 JP 2013083173 A JP2013083173 A JP 2013083173A JP 2013083173 A JP2013083173 A JP 2013083173A JP 6024579 B2 JP6024579 B2 JP 6024579B2
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- 239000004065 semiconductor Substances 0.000 title claims description 56
- 239000000758 substrate Substances 0.000 description 15
- 229910002601 GaN Inorganic materials 0.000 description 13
- 230000005533 two-dimensional electron gas Effects 0.000 description 9
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 8
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 8
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 208000024891 symptom Diseases 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/201—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
- H01L29/205—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys in different semiconductor regions, e.g. heterojunctions
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
- H01L29/42376—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out characterised by the length or the sectional shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Description
本発明の第1実施形態について図面を参照しつつ説明する。本実施形態のHEMTを備えた半導体装置は、支持基板1、バッファ層2、電子走行層3、電子供給層4が順に積層された基板5を用いて構成されている。なお、本実施形態では、電子供給層4が本発明の第1半導体層に相当し、電子走行層3が本発明の第2半導体層に相当している。
本発明の第2実施形態について説明する。本実施形態は、第2実施形態に対してゲートリセス7の形状を変更したものであり、その他に関しては第1実施形態と同様であるため、ここでは説明を省略する。
本発明は上記した実施形態に限定されるものではなく、特許請求の範囲に記載した範囲内において適宜変更が可能である。
4 電子供給層(第1半導体層)
6a 第1−2次元電子ガス層
6b 第2−2次元電子ガス層
7 ゲートリセス
8 絶縁膜
9 ゲート電極
Claims (2)
- 第1半導体層(4)と、
前記第1半導体層とヘテロ接合されることにより、へテロ接合による第1−2次元電子ガス層(6a)が生成される第2半導体層(3)と、
前記第1半導体層に形成されたゲートリセス(7)と、
前記ゲートリセスの壁面に配置された絶縁膜(8)と、
前記絶縁膜上に配置されたゲート電極(9)と、
前記第1半導体層上に配置されたソース電極(10)と、
前記第1半導体層上に配置され、前記ゲート電極を挟んで前記ソース電極と反対側に配置されたドレイン電極(11)と、を備えるノーマリオフ型のHEMTを備えた半導体装置において、
前記ゲートリセスは、底面側の幅が開口部側の幅より狭く形成され、開口部側の幅が開口部の幅で一定とされ、底部側の幅が底面の幅で一定とされた階段状とされており、
前記ゲート電極は、前記ゲートリセスの底面から側面に沿って配置されていると共に、前記側面から前記第1半導体層における前記第2半導体層側と反対側の面まで延設され、前記ソース電極側の端部および前記ドレイン電極側の端部が前記第1半導体層における前記第2半導体層側と反対側の面に位置しており、
前記ゲート電極に所定の閾値以上の電圧が印加されたとき、前記第2半導体層には前記ゲート電圧による第2−2次元電子ガス層(6b)が前記第1−2次元電子ガス層の一部とオーバーラップする状態で生成されることを特徴とするHEMTを備えた半導体装置。 - 前記ゲートリセスは、前記第2半導体層に達していることを特徴とする請求項1に記載のHEMTを備えた半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013083173A JP6024579B2 (ja) | 2013-04-11 | 2013-04-11 | Hemtを備えた半導体装置 |
US14/780,753 US20160043209A1 (en) | 2013-04-11 | 2014-04-07 | Semiconductor device provided with hemt |
PCT/JP2014/001980 WO2014167825A1 (ja) | 2013-04-11 | 2014-04-07 | Hemtを備えた半導体装置 |
CN201480020350.2A CN105144356B (zh) | 2013-04-11 | 2014-04-07 | 具备hemt即高电子迁移率晶体管的半导体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013083173A JP6024579B2 (ja) | 2013-04-11 | 2013-04-11 | Hemtを備えた半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014207287A JP2014207287A (ja) | 2014-10-30 |
JP6024579B2 true JP6024579B2 (ja) | 2016-11-16 |
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013083173A Expired - Fee Related JP6024579B2 (ja) | 2013-04-11 | 2013-04-11 | Hemtを備えた半導体装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20160043209A1 (ja) |
JP (1) | JP6024579B2 (ja) |
CN (1) | CN105144356B (ja) |
WO (1) | WO2014167825A1 (ja) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016038859A1 (ja) * | 2014-09-08 | 2016-03-17 | 株式会社デンソー | 半導体装置 |
JP6377487B2 (ja) | 2014-10-08 | 2018-08-22 | 東洋ゴム工業株式会社 | ゴム組成物及び空気入りタイヤ |
JP6264270B2 (ja) * | 2014-12-02 | 2018-01-24 | 株式会社デンソー | 半導体装置 |
JP6404697B2 (ja) * | 2014-12-10 | 2018-10-10 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の製造方法 |
US10177061B2 (en) | 2015-02-12 | 2019-01-08 | Infineon Technologies Austria Ag | Semiconductor device |
JP2017092083A (ja) * | 2015-11-02 | 2017-05-25 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
ITUB20155536A1 (it) | 2015-11-12 | 2017-05-12 | St Microelectronics Srl | Transistore hemt di tipo normalmente spento includente una trincea contenente una regione di gate e formante almeno un gradino, e relativo procedimento di fabbricazione |
JP6629252B2 (ja) * | 2017-02-01 | 2020-01-15 | 株式会社東芝 | 半導体装置の製造方法 |
CN111527592A (zh) | 2017-12-28 | 2020-08-11 | 罗姆股份有限公司 | 氮化物半导体装置 |
US10700190B2 (en) * | 2018-01-23 | 2020-06-30 | Vanguard International Semiconductor Corporation | Semiconductor devices and methods for manufacturing the same |
US11699749B2 (en) * | 2018-07-12 | 2023-07-11 | Namlab Ggmbh | Heterostructure of an electronic circuit having a semiconductor device |
CN110890414B (zh) * | 2018-09-07 | 2023-03-24 | 世界先进积体电路股份有限公司 | 半导体装置及其制造方法 |
JP2019009462A (ja) * | 2018-09-13 | 2019-01-17 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP7175804B2 (ja) | 2019-03-14 | 2022-11-21 | 株式会社東芝 | 半導体装置及びその製造方法 |
CN110808212B (zh) * | 2019-11-08 | 2022-08-30 | 中国电子科技集团公司第十三研究所 | 氧化镓场效应晶体管及其制备方法 |
JP7084371B2 (ja) * | 2019-11-13 | 2022-06-14 | 株式会社サイオクス | 半導体装置、および、構造体の製造方法 |
JP7354029B2 (ja) | 2020-03-13 | 2023-10-02 | 株式会社東芝 | 半導体装置、半導体装置の製造方法、電源回路、及び、コンピュータ |
CN115428168A (zh) | 2020-04-23 | 2022-12-02 | 罗姆股份有限公司 | 氮化物半导体装置 |
JPWO2022091742A1 (ja) * | 2020-10-29 | 2022-05-05 | ||
CN113097291B (zh) * | 2021-03-31 | 2022-08-26 | 浙江集迈科微电子有限公司 | GaN器件结构及其制备方法 |
CN117716496A (zh) | 2021-08-03 | 2024-03-15 | 新唐科技日本株式会社 | 可变电容元件 |
WO2023039746A1 (en) * | 2021-09-15 | 2023-03-23 | Innoscience (Suzhou) Technology Co., Ltd. | Nitride-based semiconductor device and method for manufacturing thereof |
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US9048302B2 (en) * | 2008-01-11 | 2015-06-02 | The Furukawa Electric Co., Ltd | Field effect transistor having semiconductor operating layer formed with an inclined side wall |
WO2010006255A2 (en) * | 2008-07-10 | 2010-01-14 | Springs Window Fashions, Llc | All in one window covering cutdown machine |
JP5346515B2 (ja) * | 2008-07-24 | 2013-11-20 | シャープ株式会社 | ヘテロ接合電界効果トランジスタ |
KR20110026798A (ko) * | 2009-09-08 | 2011-03-16 | 삼성전기주식회사 | 반도체 소자 및 그 제조 방법 |
JP5589329B2 (ja) * | 2009-09-24 | 2014-09-17 | 豊田合成株式会社 | Iii族窒化物半導体からなる半導体装置、電力変換装置 |
KR20120027988A (ko) * | 2010-09-14 | 2012-03-22 | 삼성엘이디 주식회사 | 질화갈륨계 반도체소자 및 그 제조방법 |
JP5801560B2 (ja) * | 2011-01-21 | 2015-10-28 | 株式会社豊田中央研究所 | 半導体装置 |
US9024357B2 (en) * | 2011-04-15 | 2015-05-05 | Stmicroelectronics S.R.L. | Method for manufacturing a HEMT transistor and corresponding HEMT transistor |
JP2013030604A (ja) * | 2011-07-28 | 2013-02-07 | Tokyo Institute Of Technology | 電界効果トランジスタ |
JP2013089673A (ja) * | 2011-10-14 | 2013-05-13 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
-
2013
- 2013-04-11 JP JP2013083173A patent/JP6024579B2/ja not_active Expired - Fee Related
-
2014
- 2014-04-07 CN CN201480020350.2A patent/CN105144356B/zh not_active Expired - Fee Related
- 2014-04-07 WO PCT/JP2014/001980 patent/WO2014167825A1/ja active Application Filing
- 2014-04-07 US US14/780,753 patent/US20160043209A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
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CN105144356A (zh) | 2015-12-09 |
WO2014167825A1 (ja) | 2014-10-16 |
US20160043209A1 (en) | 2016-02-11 |
CN105144356B (zh) | 2017-12-01 |
JP2014207287A (ja) | 2014-10-30 |
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