JPWO2023156883A5 - - Google Patents
Info
- Publication number
- JPWO2023156883A5 JPWO2023156883A5 JP2024500696A JP2024500696A JPWO2023156883A5 JP WO2023156883 A5 JPWO2023156883 A5 JP WO2023156883A5 JP 2024500696 A JP2024500696 A JP 2024500696A JP 2024500696 A JP2024500696 A JP 2024500696A JP WO2023156883 A5 JPWO2023156883 A5 JP WO2023156883A5
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- conductor
- opening
- metal oxide
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022023944 | 2022-02-18 | ||
| PCT/IB2023/051094 WO2023156883A1 (ja) | 2022-02-18 | 2023-02-08 | 半導体装置、及び半導体装置の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023156883A1 JPWO2023156883A1 (https=) | 2023-08-24 |
| JPWO2023156883A5 true JPWO2023156883A5 (https=) | 2026-01-29 |
Family
ID=87577751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024500696A Pending JPWO2023156883A1 (https=) | 2022-02-18 | 2023-02-08 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250151254A1 (https=) |
| JP (1) | JPWO2023156883A1 (https=) |
| KR (1) | KR20240152314A (https=) |
| CN (1) | CN118696612A (https=) |
| WO (1) | WO2023156883A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025078928A1 (ja) * | 2023-10-13 | 2025-04-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2018220471A1 (ja) * | 2017-06-02 | 2020-05-21 | 株式会社半導体エネルギー研究所 | 記憶装置及びその動作方法 |
| WO2020008304A1 (ja) * | 2018-07-06 | 2020-01-09 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
| WO2020157553A1 (ja) * | 2019-01-29 | 2020-08-06 | 株式会社半導体エネルギー研究所 | 記憶装置 |
| TWI842855B (zh) * | 2019-03-29 | 2024-05-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
| CN114424339A (zh) | 2019-09-20 | 2022-04-29 | 株式会社半导体能源研究所 | 半导体装置及半导体装置的制造方法 |
-
2023
- 2023-02-08 JP JP2024500696A patent/JPWO2023156883A1/ja active Pending
- 2023-02-08 WO PCT/IB2023/051094 patent/WO2023156883A1/ja not_active Ceased
- 2023-02-08 US US18/838,009 patent/US20250151254A1/en active Pending
- 2023-02-08 CN CN202380021550.9A patent/CN118696612A/zh active Pending
- 2023-02-08 KR KR1020247026976A patent/KR20240152314A/ko active Pending
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