JPWO2023135896A5 - - Google Patents
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- Publication number
- JPWO2023135896A5 JPWO2023135896A5 JP2023573852A JP2023573852A JPWO2023135896A5 JP WO2023135896 A5 JPWO2023135896 A5 JP WO2023135896A5 JP 2023573852 A JP2023573852 A JP 2023573852A JP 2023573852 A JP2023573852 A JP 2023573852A JP WO2023135896 A5 JPWO2023135896 A5 JP WO2023135896A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- width
- semiconductor device
- gate trench
- field plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022002323 | 2022-01-11 | ||
| PCT/JP2022/040078 WO2023135896A1 (ja) | 2022-01-11 | 2022-10-27 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023135896A1 JPWO2023135896A1 (https=) | 2023-07-20 |
| JPWO2023135896A5 true JPWO2023135896A5 (https=) | 2024-09-20 |
Family
ID=87278767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023573852A Pending JPWO2023135896A1 (https=) | 2022-01-11 | 2022-10-27 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240355889A1 (https=) |
| JP (1) | JPWO2023135896A1 (https=) |
| CN (1) | CN118541809A (https=) |
| DE (1) | DE112022005871T5 (https=) |
| WO (1) | WO2023135896A1 (https=) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6967352B2 (ja) | 2017-02-07 | 2021-11-17 | ローム株式会社 | 半導体装置および半導体装置の製造方法、ならびに、半導体ウエハ構造物 |
| US10950699B2 (en) * | 2019-08-05 | 2021-03-16 | Vishay-Siliconix, LLC | Termination for vertical trench shielded devices |
| JP7461218B2 (ja) * | 2020-05-22 | 2024-04-03 | ローム株式会社 | 半導体装置 |
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2022
- 2022-10-27 WO PCT/JP2022/040078 patent/WO2023135896A1/ja not_active Ceased
- 2022-10-27 CN CN202280087437.6A patent/CN118541809A/zh active Pending
- 2022-10-27 DE DE112022005871.4T patent/DE112022005871T5/de active Pending
- 2022-10-27 JP JP2023573852A patent/JPWO2023135896A1/ja active Pending
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2024
- 2024-07-02 US US18/761,637 patent/US20240355889A1/en active Pending