JPWO2023068044A5 - - Google Patents
Info
- Publication number
- JPWO2023068044A5 JPWO2023068044A5 JP2022562652A JP2022562652A JPWO2023068044A5 JP WO2023068044 A5 JPWO2023068044 A5 JP WO2023068044A5 JP 2022562652 A JP2022562652 A JP 2022562652A JP 2022562652 A JP2022562652 A JP 2022562652A JP WO2023068044 A5 JPWO2023068044 A5 JP WO2023068044A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- resin composition
- less
- represent
- carbon atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021170659 | 2021-10-19 | ||
| PCT/JP2022/037230 WO2023068044A1 (ja) | 2021-10-19 | 2022-10-05 | 樹脂組成物およびその硬化物ならびにそれを用いた積層体、静電チャックおよびプラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023068044A1 JPWO2023068044A1 (https=) | 2023-04-27 |
| JPWO2023068044A5 true JPWO2023068044A5 (https=) | 2025-09-22 |
Family
ID=86058088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022562652A Pending JPWO2023068044A1 (https=) | 2021-10-19 | 2022-10-05 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240400825A1 (https=) |
| JP (1) | JPWO2023068044A1 (https=) |
| KR (1) | KR20240088682A (https=) |
| CN (1) | CN118119667A (https=) |
| TW (1) | TW202317706A (https=) |
| WO (1) | WO2023068044A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2024062923A1 (https=) * | 2022-09-21 | 2024-03-28 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5935372A (en) * | 1997-04-29 | 1999-08-10 | Occidental Chemical Corporation | Adhesive sealant for bonding metal parts to ceramics |
| JP4959778B2 (ja) * | 2009-12-10 | 2012-06-27 | 信越化学工業株式会社 | 光硬化性樹脂組成物、該組成物を用いたフィルム状接着剤及び接着シート |
| JP5422413B2 (ja) | 2010-01-25 | 2014-02-19 | 電気化学工業株式会社 | 放熱部材及びその製造方法 |
| JP6065438B2 (ja) * | 2012-07-25 | 2017-01-25 | 日立化成株式会社 | プリプレグ、これを用いた積層板及び多層プリント配線板 |
| JP6816551B2 (ja) * | 2017-02-17 | 2021-01-20 | 昭和電工マテリアルズ株式会社 | コアレス基板用熱硬化性樹脂組成物、コアレス基板用プリプレグ、コアレス基板、コアレス基板の製造方法及び半導体パッケージ |
| JP6621882B2 (ja) | 2018-08-08 | 2019-12-18 | 東京エレクトロン株式会社 | エッチング装置 |
| JP7352173B2 (ja) * | 2019-12-10 | 2023-09-28 | 東レ株式会社 | 組成物、硬化物、多層シート、放熱部品、並びに電子部品 |
| US12217994B2 (en) * | 2020-03-26 | 2025-02-04 | Tomoegawa Corporation | Electrostatic chuck device and sleeve for electrostatic chuck device |
-
2022
- 2022-10-05 US US18/699,619 patent/US20240400825A1/en active Pending
- 2022-10-05 KR KR1020247006352A patent/KR20240088682A/ko active Pending
- 2022-10-05 WO PCT/JP2022/037230 patent/WO2023068044A1/ja not_active Ceased
- 2022-10-05 JP JP2022562652A patent/JPWO2023068044A1/ja active Pending
- 2022-10-05 CN CN202280070009.2A patent/CN118119667A/zh active Pending
- 2022-10-14 TW TW111138929A patent/TW202317706A/zh unknown
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