KR20240088682A - 수지 조성물 및 그 경화물 및 그것을 사용한 적층체, 정전 척 및 플라즈마 처리 장치 - Google Patents

수지 조성물 및 그 경화물 및 그것을 사용한 적층체, 정전 척 및 플라즈마 처리 장치 Download PDF

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KR20240088682A
KR20240088682A KR1020247006352A KR20247006352A KR20240088682A KR 20240088682 A KR20240088682 A KR 20240088682A KR 1020247006352 A KR1020247006352 A KR 1020247006352A KR 20247006352 A KR20247006352 A KR 20247006352A KR 20240088682 A KR20240088682 A KR 20240088682A
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South Korea
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resin composition
group
conductive filler
polyimide
carbon atoms
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KR1020247006352A
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Korean (ko)
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아키라 시마다
카즈야 키구치
요헤이 사카베
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도레이 카부시키가이샤
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KR1020247006352A 2021-10-19 2022-10-05 수지 조성물 및 그 경화물 및 그것을 사용한 적층체, 정전 척 및 플라즈마 처리 장치 Pending KR20240088682A (ko)

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JP2021170659 2021-10-19
JPJP-P-2021-170659 2021-10-19
PCT/JP2022/037230 WO2023068044A1 (ja) 2021-10-19 2022-10-05 樹脂組成物およびその硬化物ならびにそれを用いた積層体、静電チャックおよびプラズマ処理装置

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KR20240088682A true KR20240088682A (ko) 2024-06-20

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