JPWO2023042022A5 - - Google Patents
Info
- Publication number
- JPWO2023042022A5 JPWO2023042022A5 JP2023547933A JP2023547933A JPWO2023042022A5 JP WO2023042022 A5 JPWO2023042022 A5 JP WO2023042022A5 JP 2023547933 A JP2023547933 A JP 2023547933A JP 2023547933 A JP2023547933 A JP 2023547933A JP WO2023042022 A5 JPWO2023042022 A5 JP WO2023042022A5
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- insulator
- opening
- semiconductor device
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021151971 | 2021-09-17 | ||
| PCT/IB2022/058239 WO2023042022A1 (ja) | 2021-09-17 | 2022-09-02 | 半導体装置、記憶装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023042022A1 JPWO2023042022A1 (https=) | 2023-03-23 |
| JPWO2023042022A5 true JPWO2023042022A5 (https=) | 2025-09-09 |
Family
ID=85602489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023547933A Pending JPWO2023042022A1 (https=) | 2021-09-17 | 2022-09-02 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20240298435A1 (https=) |
| EP (1) | EP4404275A4 (https=) |
| JP (1) | JPWO2023042022A1 (https=) |
| KR (1) | KR20240056760A (https=) |
| CN (1) | CN117941078A (https=) |
| DE (1) | DE112022004444T5 (https=) |
| TW (1) | TW202320239A (https=) |
| WO (1) | WO2023042022A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024025325A (ja) * | 2022-08-12 | 2024-02-26 | キオクシア株式会社 | 半導体装置 |
| WO2024252246A1 (ja) * | 2023-06-09 | 2024-12-12 | 株式会社半導体エネルギー研究所 | 半導体装置、半導体装置の作製方法 |
| WO2025163448A1 (ja) * | 2024-01-31 | 2025-08-07 | 株式会社半導体エネルギー研究所 | 半導体装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG165252A1 (en) * | 2009-03-25 | 2010-10-28 | Unisantis Electronics Jp Ltd | Semiconductor device and production method therefor |
| TWI435448B (zh) * | 2010-12-22 | 2014-04-21 | Chunghwa Picture Tubes Ltd | 垂直式電晶體結構 |
| WO2012121265A1 (en) * | 2011-03-10 | 2012-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and method for manufacturing the same |
| JP2015026782A (ja) * | 2013-07-29 | 2015-02-05 | マイクロン テクノロジー， インク． | 半導体装置及びその製造方法 |
| JP6509514B2 (ja) * | 2014-09-17 | 2019-05-08 | 東芝メモリ株式会社 | 不揮発性半導体記憶装置及びその製造方法 |
| JP7109928B2 (ja) * | 2018-01-31 | 2022-08-01 | キオクシア株式会社 | トランジスタ及び半導体記憶装置並びにトランジスタの製造方法 |
| CN112005350A (zh) * | 2018-04-27 | 2020-11-27 | 株式会社半导体能源研究所 | 半导体装置 |
| JP2021108331A (ja) | 2019-12-27 | 2021-07-29 | キオクシア株式会社 | 半導体記憶装置 |
| JP2021114563A (ja) * | 2020-01-20 | 2021-08-05 | キオクシア株式会社 | 半導体記憶装置 |
| US12089412B2 (en) * | 2020-03-26 | 2024-09-10 | Intel NDTM US LLC | Vertical string driver with extended gate junction structure |
-
2022
- 2022-09-02 US US18/689,964 patent/US20240298435A1/en active Pending
- 2022-09-02 WO PCT/IB2022/058239 patent/WO2023042022A1/ja not_active Ceased
- 2022-09-02 JP JP2023547933A patent/JPWO2023042022A1/ja active Pending
- 2022-09-02 KR KR1020247012305A patent/KR20240056760A/ko active Pending
- 2022-09-02 EP EP22869491.5A patent/EP4404275A4/en active Pending
- 2022-09-02 CN CN202280059623.9A patent/CN117941078A/zh active Pending
- 2022-09-02 DE DE112022004444.6T patent/DE112022004444T5/de active Pending
- 2022-09-08 TW TW111134109A patent/TW202320239A/zh unknown