JPWO2022260025A5 - - Google Patents
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- Publication number
- JPWO2022260025A5 JPWO2022260025A5 JP2023527864A JP2023527864A JPWO2022260025A5 JP WO2022260025 A5 JPWO2022260025 A5 JP WO2022260025A5 JP 2023527864 A JP2023527864 A JP 2023527864A JP 2023527864 A JP2023527864 A JP 2023527864A JP WO2022260025 A5 JPWO2022260025 A5 JP WO2022260025A5
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- halogen
- producing
- alkaline solution
- oxyacid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052736 halogen Inorganic materials 0.000 claims 20
- 150000002367 halogens Chemical class 0.000 claims 20
- 238000004519 manufacturing process Methods 0.000 claims 10
- 239000012670 alkaline solution Substances 0.000 claims 8
- 239000002253 acid Substances 0.000 claims 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 4
- 239000007789 gas Substances 0.000 claims 4
- 239000007791 liquid phase Substances 0.000 claims 4
- 229910052760 oxygen Inorganic materials 0.000 claims 4
- 239000001301 oxygen Substances 0.000 claims 4
- 239000012071 phase Substances 0.000 claims 4
- 239000007788 liquid Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021094936 | 2021-06-07 | ||
| PCT/JP2022/022882 WO2022260025A1 (ja) | 2021-06-07 | 2022-06-07 | ハロゲン酸素酸の製造方法及びその製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022260025A1 JPWO2022260025A1 (https=) | 2022-12-15 |
| JPWO2022260025A5 true JPWO2022260025A5 (https=) | 2025-05-22 |
Family
ID=84425002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023527864A Pending JPWO2022260025A1 (https=) | 2021-06-07 | 2022-06-07 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240116849A1 (https=) |
| JP (1) | JPWO2022260025A1 (https=) |
| KR (1) | KR20240018343A (https=) |
| CN (1) | CN115916741B (https=) |
| TW (1) | TW202313454A (https=) |
| WO (1) | WO2022260025A1 (https=) |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53118278A (en) | 1977-03-25 | 1978-10-16 | Daiwa Kikai Seisakusho | Reaction apparatus |
| US4744956A (en) * | 1986-02-12 | 1988-05-17 | Quantum Technologies, Inc. | Continuous reaction of gases with liquids |
| US4869833A (en) * | 1986-04-03 | 1989-09-26 | Vertech Treatment Systems, Inc. | Method and apparatus for controlled chemical reactions |
| US4721575A (en) * | 1986-04-03 | 1988-01-26 | Vertech Treatment Systems, Inc. | Method and apparatus for controlled chemical reactions |
| JPH01274835A (ja) * | 1988-04-28 | 1989-11-02 | Quantum Technol Inc | 気体と液体との連続反応方法および装置 |
| JP2005021798A (ja) | 2003-07-01 | 2005-01-27 | Teeiku Wan Sogo Jimusho:Kk | オゾン水製造方法、オゾン水製造装置 |
| BRPI0418529A (pt) * | 2004-02-11 | 2007-05-15 | Mallinckrodt Baker Inc | composições de limpeza para microeletrÈnicos contendo ácidos de halogênio oxigenados, sais e derivados dos mesmos |
| JP2007105668A (ja) * | 2005-10-14 | 2007-04-26 | Mitsubishi Chemicals Corp | 気液反応方法及びそのための装置 |
| JP4360501B1 (ja) | 2009-03-25 | 2009-11-11 | 日本▲まき▼線工業株式会社 | オゾン水生成装置及びオゾン水生成方法 |
| JP2012192383A (ja) * | 2011-03-18 | 2012-10-11 | Mitsubishi Rayon Co Ltd | 化合物の製造方法 |
| JP6760915B2 (ja) * | 2017-12-05 | 2020-09-23 | 大陽日酸株式会社 | フロー式反応装置 |
| US11572533B2 (en) * | 2018-05-23 | 2023-02-07 | Tokuyama Corporation | Quaternary alkylammonium hypochlorite solution, method for manufacturing same, and method for cleaning semiconductor wafer |
| KR102769981B1 (ko) * | 2019-11-22 | 2025-02-18 | 가부시끼가이샤 도꾸야마 | 차아염소산 제 4 급 알킬암모늄 용액, 그 제조 방법 및 반도체 웨이퍼의 처리 방법 |
| JP7797124B2 (ja) * | 2020-06-25 | 2026-01-13 | 株式会社トクヤマ | ハロゲン酸素酸溶液の製造方法及び製造装置 |
| CN112410805A (zh) * | 2020-12-14 | 2021-02-26 | 浙江大学 | 管状推流式次氯酸钠发生器 |
-
2022
- 2022-06-07 CN CN202280004499.6A patent/CN115916741B/zh active Active
- 2022-06-07 WO PCT/JP2022/022882 patent/WO2022260025A1/ja not_active Ceased
- 2022-06-07 JP JP2023527864A patent/JPWO2022260025A1/ja active Pending
- 2022-06-07 US US17/920,921 patent/US20240116849A1/en active Pending
- 2022-06-07 KR KR1020227039831A patent/KR20240018343A/ko active Pending
- 2022-06-07 TW TW111120983A patent/TW202313454A/zh unknown
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