JPWO2022244309A1 - - Google Patents
Info
- Publication number
- JPWO2022244309A1 JPWO2022244309A1 JP2022530802A JP2022530802A JPWO2022244309A1 JP WO2022244309 A1 JPWO2022244309 A1 JP WO2022244309A1 JP 2022530802 A JP2022530802 A JP 2022530802A JP 2022530802 A JP2022530802 A JP 2022530802A JP WO2022244309 A1 JPWO2022244309 A1 JP WO2022244309A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022124611A JP7788358B2 (ja) | 2021-05-21 | 2022-08-04 | 膜厚測定装置及び膜厚測定方法 |
| JP2025241756A JP2026053393A (ja) | 2021-05-21 | 2025-12-08 | 膜厚測定装置及び膜厚測定方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021086172 | 2021-05-21 | ||
| JP2021086172 | 2021-05-21 | ||
| PCT/JP2022/002675 WO2022244309A1 (ja) | 2021-05-21 | 2022-01-25 | 膜厚測定装置及び膜厚測定方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022124611A Division JP7788358B2 (ja) | 2021-05-21 | 2022-08-04 | 膜厚測定装置及び膜厚測定方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP7121222B1 JP7121222B1 (ja) | 2022-08-17 |
| JPWO2022244309A1 true JPWO2022244309A1 (https=) | 2022-11-24 |
| JPWO2022244309A5 JPWO2022244309A5 (https=) | 2023-04-25 |
Family
ID=82850922
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022530802A Active JP7121222B1 (ja) | 2021-05-21 | 2022-01-25 | 膜厚測定装置及び膜厚測定方法 |
| JP2022124611A Active JP7788358B2 (ja) | 2021-05-21 | 2022-08-04 | 膜厚測定装置及び膜厚測定方法 |
| JP2025241756A Pending JP2026053393A (ja) | 2021-05-21 | 2025-12-08 | 膜厚測定装置及び膜厚測定方法 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022124611A Active JP7788358B2 (ja) | 2021-05-21 | 2022-08-04 | 膜厚測定装置及び膜厚測定方法 |
| JP2025241756A Pending JP2026053393A (ja) | 2021-05-21 | 2025-12-08 | 膜厚測定装置及び膜厚測定方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240240933A1 (https=) |
| EP (1) | EP4343274A4 (https=) |
| JP (3) | JP7121222B1 (https=) |
| KR (1) | KR20240011694A (https=) |
| CN (1) | CN117355724A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026074789A1 (ja) * | 2024-10-01 | 2026-04-09 | 浜松ホトニクス株式会社 | 膜厚測定方法及び膜厚測定装置 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6137575A (en) * | 1997-10-24 | 2000-10-24 | Canon Kabushiki Kaisha | Film thickness measuring method and apparatus |
| JP2001356050A (ja) * | 2000-06-14 | 2001-12-26 | Toray Ind Inc | 分光方法及びフィルムの製造方法 |
| JP3852556B2 (ja) * | 2000-09-08 | 2006-11-29 | オムロン株式会社 | 膜厚測定方法およびその方法を用いた膜厚センサ |
| JP3995579B2 (ja) * | 2002-10-18 | 2007-10-24 | 大日本スクリーン製造株式会社 | 膜厚測定装置および反射率測定装置 |
| JP2006153770A (ja) * | 2004-11-30 | 2006-06-15 | Omron Corp | 分光計測装置 |
| JP4834847B2 (ja) * | 2007-10-05 | 2011-12-14 | 大塚電子株式会社 | 多層膜解析装置および多層膜解析方法 |
| JP2010117161A (ja) | 2008-11-11 | 2010-05-27 | Nikon Corp | 検査装置 |
| JP2012063321A (ja) * | 2010-09-17 | 2012-03-29 | Hamamatsu Photonics Kk | 反射率測定装置、反射率測定方法、膜厚測定装置及び膜厚測定方法 |
| JP2013032981A (ja) * | 2011-08-02 | 2013-02-14 | Otsuka Denshi Co Ltd | 膜厚測定装置 |
| WO2013088871A1 (ja) | 2011-12-16 | 2013-06-20 | 東レエンジニアリング株式会社 | 干渉色のモデル適合による膜厚測定方法およびその装置 |
| JP5997578B2 (ja) | 2012-10-19 | 2016-09-28 | 東レエンジニアリング株式会社 | クロストーク補正係数算出方法およびクロストーク補正係数算出機能を備えた透明膜の膜厚測定装置 |
| JP2017044596A (ja) * | 2015-08-27 | 2017-03-02 | 東レエンジニアリング株式会社 | 膜厚測定装置および膜厚測定方法 |
| JP6762221B2 (ja) * | 2016-12-19 | 2020-09-30 | 大塚電子株式会社 | 光学特性測定装置および光学特性測定方法 |
| JP2019144118A (ja) * | 2018-02-21 | 2019-08-29 | Ｊｆｅテクノリサーチ株式会社 | 膜厚測定装置及び膜厚測定方法 |
-
2022
- 2022-01-25 CN CN202280036313.5A patent/CN117355724A/zh active Pending
- 2022-01-25 KR KR1020237039201A patent/KR20240011694A/ko active Pending
- 2022-01-25 US US18/561,390 patent/US20240240933A1/en active Pending
- 2022-01-25 JP JP2022530802A patent/JP7121222B1/ja active Active
- 2022-01-25 EP EP22804232.1A patent/EP4343274A4/en active Pending
- 2022-08-04 JP JP2022124611A patent/JP7788358B2/ja active Active
-
2025
- 2025-12-08 JP JP2025241756A patent/JP2026053393A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN117355724A (zh) | 2024-01-05 |
| JP2026053393A (ja) | 2026-03-25 |
| JP2022179471A (ja) | 2022-12-02 |
| JP7121222B1 (ja) | 2022-08-17 |
| EP4343274A1 (en) | 2024-03-27 |
| EP4343274A4 (en) | 2025-05-28 |
| US20240240933A1 (en) | 2024-07-18 |
| JP7788358B2 (ja) | 2025-12-18 |
| KR20240011694A (ko) | 2024-01-26 |
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