JPWO2022065428A1 - - Google Patents

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Publication number
JPWO2022065428A1
JPWO2022065428A1 JP2022552067A JP2022552067A JPWO2022065428A1 JP WO2022065428 A1 JPWO2022065428 A1 JP WO2022065428A1 JP 2022552067 A JP2022552067 A JP 2022552067A JP 2022552067 A JP2022552067 A JP 2022552067A JP WO2022065428 A1 JPWO2022065428 A1 JP WO2022065428A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022552067A
Other versions
JP7336605B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JPWO2022065428A1 publication Critical patent/JPWO2022065428A1/ja
Application granted granted Critical
Publication of JP7336605B2 publication Critical patent/JP7336605B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2022552067A 2020-09-25 2021-09-24 電子顕微鏡 Active JP7336605B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/JP2020/036200 WO2022064628A1 (ja) 2020-09-25 2020-09-25 電子顕微鏡
JPPCT/JP2020/036200 2020-09-25
PCT/JP2021/035071 WO2022065428A1 (ja) 2020-09-25 2021-09-24 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPWO2022065428A1 true JPWO2022065428A1 (ja) 2022-03-31
JP7336605B2 JP7336605B2 (ja) 2023-08-31

Family

ID=80846385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022552067A Active JP7336605B2 (ja) 2020-09-25 2021-09-24 電子顕微鏡

Country Status (4)

Country Link
US (1) US20230238212A1 (ja)
JP (1) JP7336605B2 (ja)
DE (1) DE112021002456T5 (ja)
WO (2) WO2022064628A1 (ja)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61232544A (ja) * 1985-04-08 1986-10-16 Hitachi Ltd 電位検出装置
JPH04149944A (ja) * 1990-10-12 1992-05-22 Hitachi Ltd 走査形電子顕微鏡、及び走査形電子顕微鏡による試料像形成方法
JPH0883589A (ja) * 1994-09-13 1996-03-26 Hitachi Ltd 走査型電子顕微鏡
WO2001075929A1 (fr) * 2000-03-31 2001-10-11 Hitachi, Ltd. Microscope electronique a balayage
JP2008066065A (ja) * 2006-09-06 2008-03-21 Hitachi High-Technologies Corp 走査電子顕微鏡の信号検出装置およびその表示装置
JP2009092663A (ja) * 2008-10-20 2009-04-30 Ricoh Co Ltd 表面電荷分布測定方法および装置
WO2011055520A1 (ja) * 2009-11-06 2011-05-12 株式会社日立ハイテクノロジーズ 電子顕微鏡
US20140284476A1 (en) * 2013-03-25 2014-09-25 Hermes Microvision, Inc. Energy Filter for Charged Particle Beam Apparatus
US20180364563A1 (en) * 2017-06-20 2018-12-20 Applied Materials, Inc. Method and apparatus for inspecting a sample

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH052365U (ja) * 1991-02-27 1993-01-14 サンユー電子株式会社 ステレオ表示装置
JP2001057172A (ja) 1999-08-18 2001-02-27 Jeol Ltd 走査電子顕微鏡
CZ302126B6 (cs) 2000-07-07 2010-11-03 Leo Elektronenmikroskopie Gmbh Detektor pro prístroje vyzarující korpuskulární zárení, prístroj vyzarující korpuskulární zárení a zpusob detekování existence produktu vzájemného pusobení v tomto prístroji
JP4292068B2 (ja) 2003-12-11 2009-07-08 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP5075375B2 (ja) 2006-08-11 2012-11-21 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP2008210702A (ja) 2007-02-27 2008-09-11 Hitachi High-Technologies Corp 荷電粒子ビーム装置及び印加電圧制御方法
US8222600B2 (en) 2009-05-24 2012-07-17 El-Mul Technologies Ltd. Charged particle detection system and method
JP5470596B1 (ja) * 2013-08-12 2014-04-16 株式会社日立ハイテクノロジーズ 機能解除モードと機能拡張モードを有する荷電粒子線装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61232544A (ja) * 1985-04-08 1986-10-16 Hitachi Ltd 電位検出装置
JPH04149944A (ja) * 1990-10-12 1992-05-22 Hitachi Ltd 走査形電子顕微鏡、及び走査形電子顕微鏡による試料像形成方法
JPH0883589A (ja) * 1994-09-13 1996-03-26 Hitachi Ltd 走査型電子顕微鏡
WO2001075929A1 (fr) * 2000-03-31 2001-10-11 Hitachi, Ltd. Microscope electronique a balayage
JP2008066065A (ja) * 2006-09-06 2008-03-21 Hitachi High-Technologies Corp 走査電子顕微鏡の信号検出装置およびその表示装置
JP2009092663A (ja) * 2008-10-20 2009-04-30 Ricoh Co Ltd 表面電荷分布測定方法および装置
WO2011055520A1 (ja) * 2009-11-06 2011-05-12 株式会社日立ハイテクノロジーズ 電子顕微鏡
US20140284476A1 (en) * 2013-03-25 2014-09-25 Hermes Microvision, Inc. Energy Filter for Charged Particle Beam Apparatus
US20180364563A1 (en) * 2017-06-20 2018-12-20 Applied Materials, Inc. Method and apparatus for inspecting a sample

Also Published As

Publication number Publication date
DE112021002456T5 (de) 2023-03-02
WO2022064628A1 (ja) 2022-03-31
US20230238212A1 (en) 2023-07-27
JP7336605B2 (ja) 2023-08-31
WO2022065428A1 (ja) 2022-03-31

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