JPWO2022043825A5 - - Google Patents

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Publication number
JPWO2022043825A5
JPWO2022043825A5 JP2022544880A JP2022544880A JPWO2022043825A5 JP WO2022043825 A5 JPWO2022043825 A5 JP WO2022043825A5 JP 2022544880 A JP2022544880 A JP 2022544880A JP 2022544880 A JP2022544880 A JP 2022544880A JP WO2022043825 A5 JPWO2022043825 A5 JP WO2022043825A5
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JP
Japan
Prior art keywords
insulating film
barrier insulating
semiconductor device
layer
oxide semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022544880A
Other languages
English (en)
Japanese (ja)
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JP7788384B2 (ja
JPWO2022043825A1 (https=
Filing date
Publication date
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Priority claimed from PCT/IB2021/057538 external-priority patent/WO2022043825A1/ja
Publication of JPWO2022043825A1 publication Critical patent/JPWO2022043825A1/ja
Publication of JPWO2022043825A5 publication Critical patent/JPWO2022043825A5/ja
Priority to JP2025239567A priority Critical patent/JP2026041935A/ja
Application granted granted Critical
Publication of JP7788384B2 publication Critical patent/JP7788384B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022544880A 2020-08-27 2021-08-17 半導体装置 Active JP7788384B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025239567A JP2026041935A (ja) 2020-08-27 2025-12-08 半導体装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020143470 2020-08-27
JP2020143470 2020-08-27
PCT/IB2021/057538 WO2022043825A1 (ja) 2020-08-27 2021-08-17 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025239567A Division JP2026041935A (ja) 2020-08-27 2025-12-08 半導体装置

Publications (3)

Publication Number Publication Date
JPWO2022043825A1 JPWO2022043825A1 (https=) 2022-03-03
JPWO2022043825A5 true JPWO2022043825A5 (https=) 2024-08-20
JP7788384B2 JP7788384B2 (ja) 2025-12-18

Family

ID=80354742

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022544880A Active JP7788384B2 (ja) 2020-08-27 2021-08-17 半導体装置
JP2025239567A Pending JP2026041935A (ja) 2020-08-27 2025-12-08 半導体装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025239567A Pending JP2026041935A (ja) 2020-08-27 2025-12-08 半導体装置

Country Status (6)

Country Link
US (1) US20230307550A1 (https=)
JP (2) JP7788384B2 (https=)
KR (1) KR20230054848A (https=)
CN (1) CN115997276A (https=)
DE (1) DE112021004474T5 (https=)
WO (1) WO2022043825A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230205872A1 (en) * 2021-12-23 2023-06-29 Advanced Micro Devices, Inc. Method and apparatus to address row hammer attacks at a host processor
WO2024042404A1 (ja) * 2022-08-24 2024-02-29 株式会社半導体エネルギー研究所 半導体装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101473684B1 (ko) 2009-12-25 2014-12-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR101809105B1 (ko) 2010-08-06 2017-12-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 집적 회로
KR102721654B1 (ko) 2016-03-11 2024-10-23 가부시키가이샤 한도오따이 에네루기 켄큐쇼 복합체 및 트랜지스터
US11107929B2 (en) * 2018-12-21 2021-08-31 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US11211461B2 (en) * 2018-12-28 2021-12-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and memory device
JP2020123612A (ja) * 2019-01-29 2020-08-13 株式会社半導体エネルギー研究所 半導体装置の製造方法、半導体装置の製造装置
WO2020157554A1 (ja) * 2019-01-29 2020-08-06 株式会社半導体エネルギー研究所 半導体装置、および半導体装置の作製方法

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