JPWO2022030628A5 - - Google Patents

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Publication number
JPWO2022030628A5
JPWO2022030628A5 JP2022541755A JP2022541755A JPWO2022030628A5 JP WO2022030628 A5 JPWO2022030628 A5 JP WO2022030628A5 JP 2022541755 A JP2022541755 A JP 2022541755A JP 2022541755 A JP2022541755 A JP 2022541755A JP WO2022030628 A5 JPWO2022030628 A5 JP WO2022030628A5
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Japan
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group
carbon atoms
ions
ion
processing liquid
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JP2022541755A
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English (en)
Japanese (ja)
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JP7854938B2 (ja
JPWO2022030628A1 (https=
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Priority claimed from PCT/JP2021/029372 external-priority patent/WO2022030628A1/ja
Publication of JPWO2022030628A1 publication Critical patent/JPWO2022030628A1/ja
Publication of JPWO2022030628A5 publication Critical patent/JPWO2022030628A5/ja
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JP2022541755A 2020-08-07 2021-08-06 次亜臭素酸イオン及びｐＨ緩衝剤を含む半導体ウェハの処理液 Active JP7854938B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020135398 2020-08-07
JP2020135398 2020-08-07
PCT/JP2021/029372 WO2022030628A1 (ja) 2020-08-07 2021-08-06 次亜臭素酸イオン及びｐＨ緩衝剤を含む半導体ウェハの処理液

Publications (3)

Publication Number Publication Date
JPWO2022030628A1 JPWO2022030628A1 (https=) 2022-02-10
JPWO2022030628A5 true JPWO2022030628A5 (https=) 2023-04-24
JP7854938B2 JP7854938B2 (ja) 2026-05-07

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