JPWO2021259579A5 - - Google Patents

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Publication number
JPWO2021259579A5
JPWO2021259579A5 JP2022580244A JP2022580244A JPWO2021259579A5 JP WO2021259579 A5 JPWO2021259579 A5 JP WO2021259579A5 JP 2022580244 A JP2022580244 A JP 2022580244A JP 2022580244 A JP2022580244 A JP 2022580244A JP WO2021259579 A5 JPWO2021259579 A5 JP WO2021259579A5
Authority
JP
Japan
Prior art keywords
leak
base
test
test device
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022580244A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023531085A (ja
Publication date
Priority claimed from DE102020116939.6A external-priority patent/DE102020116939A1/de
Application filed filed Critical
Publication of JP2023531085A publication Critical patent/JP2023531085A/ja
Publication of JPWO2021259579A5 publication Critical patent/JPWO2021259579A5/ja
Pending legal-status Critical Current

Links

JP2022580244A 2020-06-26 2021-05-25 漏れ試験用装置 Pending JP2023531085A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020116939.6A DE102020116939A1 (de) 2020-06-26 2020-06-26 Prüfleckvorrichtung
DE102020116939.6 2020-06-26
PCT/EP2021/063920 WO2021259579A1 (de) 2020-06-26 2021-05-25 Pruefleckvorrichtung

Publications (2)

Publication Number Publication Date
JP2023531085A JP2023531085A (ja) 2023-07-20
JPWO2021259579A5 true JPWO2021259579A5 (es) 2024-01-19

Family

ID=76250313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022580244A Pending JP2023531085A (ja) 2020-06-26 2021-05-25 漏れ試験用装置

Country Status (7)

Country Link
US (1) US20230251159A1 (es)
EP (1) EP4172585A1 (es)
JP (1) JP2023531085A (es)
KR (1) KR20230027065A (es)
CN (1) CN115702332A (es)
DE (1) DE102020116939A1 (es)
WO (1) WO2021259579A1 (es)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022109454A1 (de) 2022-04-19 2023-10-19 Inficon Gmbh Testleckvorrichtung
DE102023102685A1 (de) 2023-02-03 2024-03-07 Asml Netherlands B.V. Referenzausgasungsprobe und Referenzausgasungssystem

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10122733A1 (de) 2001-05-10 2002-11-14 Inficon Gmbh Testleckvorrichtung
DE10162126A1 (de) * 2001-12-18 2003-07-03 Inficon Gmbh Gasdurchlass mit selektiv wirkenden Gasdurchtrittsflächen
EP2447694B1 (de) 2010-10-28 2014-05-21 Boehringer Ingelheim Pharma GmbH & Co. KG Prüfleck zur Überprüfung von Leckagemesssystemen
DE102014200907B4 (de) 2014-01-20 2020-03-05 Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses wiederum vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Braunschweig Referenzausgasungssystem und zugeordnetes Verfahren

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