JPWO2021259579A5 - - Google Patents
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- Publication number
- JPWO2021259579A5 JPWO2021259579A5 JP2022580244A JP2022580244A JPWO2021259579A5 JP WO2021259579 A5 JPWO2021259579 A5 JP WO2021259579A5 JP 2022580244 A JP2022580244 A JP 2022580244A JP 2022580244 A JP2022580244 A JP 2022580244A JP WO2021259579 A5 JPWO2021259579 A5 JP WO2021259579A5
- Authority
- JP
- Japan
- Prior art keywords
- leak
- base
- test
- test device
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 description 7
- 125000006850 spacer group Chemical group 0.000 description 6
- 239000012530 fluid Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 1
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102020116939.6A DE102020116939A1 (de) | 2020-06-26 | 2020-06-26 | Prüfleckvorrichtung |
DE102020116939.6 | 2020-06-26 | ||
PCT/EP2021/063920 WO2021259579A1 (de) | 2020-06-26 | 2021-05-25 | Pruefleckvorrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2023531085A JP2023531085A (ja) | 2023-07-20 |
JPWO2021259579A5 true JPWO2021259579A5 (es) | 2024-01-19 |
Family
ID=76250313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022580244A Pending JP2023531085A (ja) | 2020-06-26 | 2021-05-25 | 漏れ試験用装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20230251159A1 (es) |
EP (1) | EP4172585A1 (es) |
JP (1) | JP2023531085A (es) |
KR (1) | KR20230027065A (es) |
CN (1) | CN115702332A (es) |
DE (1) | DE102020116939A1 (es) |
WO (1) | WO2021259579A1 (es) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102022109454A1 (de) | 2022-04-19 | 2023-10-19 | Inficon Gmbh | Testleckvorrichtung |
DE102023102685A1 (de) | 2023-02-03 | 2024-03-07 | Asml Netherlands B.V. | Referenzausgasungsprobe und Referenzausgasungssystem |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10122733A1 (de) | 2001-05-10 | 2002-11-14 | Inficon Gmbh | Testleckvorrichtung |
DE10162126A1 (de) * | 2001-12-18 | 2003-07-03 | Inficon Gmbh | Gasdurchlass mit selektiv wirkenden Gasdurchtrittsflächen |
EP2447694B1 (de) | 2010-10-28 | 2014-05-21 | Boehringer Ingelheim Pharma GmbH & Co. KG | Prüfleck zur Überprüfung von Leckagemesssystemen |
DE102014200907B4 (de) | 2014-01-20 | 2020-03-05 | Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses wiederum vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Braunschweig | Referenzausgasungssystem und zugeordnetes Verfahren |
-
2020
- 2020-06-26 DE DE102020116939.6A patent/DE102020116939A1/de active Pending
-
2021
- 2021-05-25 JP JP2022580244A patent/JP2023531085A/ja active Pending
- 2021-05-25 WO PCT/EP2021/063920 patent/WO2021259579A1/de unknown
- 2021-05-25 CN CN202180044462.1A patent/CN115702332A/zh active Pending
- 2021-05-25 EP EP21729458.6A patent/EP4172585A1/de active Pending
- 2021-05-25 KR KR1020227044835A patent/KR20230027065A/ko unknown
- 2021-05-25 US US18/011,695 patent/US20230251159A1/en active Pending
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