JPWO2020212648A5 - - Google Patents
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- JPWO2020212648A5 JPWO2020212648A5 JP2021559712A JP2021559712A JPWO2020212648A5 JP WO2020212648 A5 JPWO2020212648 A5 JP WO2020212648A5 JP 2021559712 A JP2021559712 A JP 2021559712A JP 2021559712 A JP2021559712 A JP 2021559712A JP WO2020212648 A5 JPWO2020212648 A5 JP WO2020212648A5
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- Prior art keywords
- resonator
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- silicon
- Prior art date
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 50
- 229910052710 silicon Inorganic materials 0.000 description 50
- 239000010703 silicon Substances 0.000 description 50
- 239000000463 material Substances 0.000 description 39
- 239000013078 crystal Substances 0.000 description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 20
- 238000004873 anchoring Methods 0.000 description 13
- 239000004020 conductor Substances 0.000 description 9
- 229910052814 silicon oxide Inorganic materials 0.000 description 9
- 230000008901 benefit Effects 0.000 description 7
- 238000007667 floating Methods 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 102100022057 Hepatocyte nuclear factor 1-alpha Human genes 0.000 description 6
- 101001045751 Homo sapiens Hepatocyte nuclear factor 1-alpha Proteins 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000005452 bending Methods 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 4
- 229910052906 cristobalite Inorganic materials 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 229910052682 stishovite Inorganic materials 0.000 description 4
- 230000026683 transduction Effects 0.000 description 4
- 238000010361 transduction Methods 0.000 description 4
- 229910052905 tridymite Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 235000020825 overweight Nutrition 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- NFACJZMKEDPNKN-UHFFFAOYSA-N trichlorfon Chemical compound COP(=O)(OC)C(O)C(Cl)(Cl)Cl NFACJZMKEDPNKN-UHFFFAOYSA-N 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000009461 vacuum packaging Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20195305 | 2019-04-15 | ||
| FI20195305A FI130145B (en) | 2019-04-15 | 2019-04-15 | Microelectromechanical resonator |
| PCT/FI2020/050249 WO2020212648A1 (en) | 2019-04-15 | 2020-04-15 | Microelectromechanical resonator |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2022529131A JP2022529131A (ja) | 2022-06-17 |
| JPWO2020212648A5 true JPWO2020212648A5 (https=) | 2024-05-21 |
| JP2022529131A5 JP2022529131A5 (https=) | 2024-05-21 |
| JP7590340B2 JP7590340B2 (ja) | 2024-11-26 |
Family
ID=72837063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021559712A Active JP7590340B2 (ja) | 2019-04-15 | 2020-04-15 | 微小電気機械共振器 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US12323131B2 (https=) |
| EP (1) | EP3956983A4 (https=) |
| JP (1) | JP7590340B2 (https=) |
| KR (1) | KR102802116B1 (https=) |
| CN (2) | CN113692707B (https=) |
| FI (1) | FI130145B (https=) |
| WO (1) | WO2020212648A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI129591B (en) * | 2020-11-06 | 2022-05-13 | Kyocera Tikitin Oy | Mems resonator with high quality factor and its use |
| FR3120700B1 (fr) * | 2021-03-10 | 2023-02-10 | Office National Detudes Rech Aerospatiales | Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres |
| FI20216348A1 (en) * | 2021-12-23 | 2023-06-24 | Kyocera Tikitin Oy | MEMS resonator |
| CN115236357B (zh) * | 2022-07-04 | 2024-10-18 | 南京理工大学 | 具有单锚点固支音叉谐振器的硅微谐振梁加速度计结构 |
| IT202200022845A1 (it) | 2022-11-07 | 2024-05-07 | Milano Politecnico | Dispositivo meccanico unidirezionale |
| FI20235493A1 (en) * | 2023-05-04 | 2024-11-05 | Kyocera Tech Oy | Mems resonator comprising in-phase and out-of-phase elements |
| FI132024B1 (fi) * | 2023-09-14 | 2026-04-17 | Kyocera Tech Oy | Liittimen sisältävä mems-resonaattori |
Family Cites Families (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6722197B2 (en) | 2001-06-19 | 2004-04-20 | Honeywell International Inc. | Coupled micromachined structure |
| US6549099B2 (en) | 2001-06-29 | 2003-04-15 | Hewlett-Packard Company | Electrically-coupled mechanical band-pass filter |
| US7068126B2 (en) * | 2004-03-04 | 2006-06-27 | Discera | Method and apparatus for frequency tuning of a micro-mechanical resonator |
| US7227432B2 (en) | 2005-06-30 | 2007-06-05 | Robert Bosch Gmbh | MEMS resonator array structure and method of operating and using same |
| US7420318B1 (en) | 2006-03-20 | 2008-09-02 | The United States Of America As Represented By The Secretary Of The Army | Lateral piezoelectric microelectromechanical system (MEMS) actuation and sensing device |
| FR2910742B1 (fr) * | 2006-12-22 | 2009-05-01 | Commissariat Energie Atomique | Oscillateur mecanique forme d'un reseau d'oscillateurs elementaires |
| DE102008021175A1 (de) * | 2007-05-23 | 2009-01-15 | Sony Corp. | Resonator, Oszillator und Kommunikationsvorrichtung |
| SG190064A1 (en) * | 2010-11-08 | 2013-06-28 | Agency Science Tech & Res | A piezoelectric resonator |
| WO2012081457A1 (ja) | 2010-12-15 | 2012-06-21 | 株式会社村田製作所 | 振動ジャイロ |
| FI126586B (fi) | 2011-02-17 | 2017-02-28 | Teknologian Tutkimuskeskus Vtt Oy | Uudet mikromekaaniset laitteet |
| CN103460592B (zh) * | 2011-04-07 | 2016-04-06 | 株式会社村田制作所 | 压电发电装置 |
| WO2013005625A1 (ja) | 2011-07-04 | 2013-01-10 | 株式会社村田製作所 | 振動子および振動ジャイロ |
| EP2544370B1 (en) * | 2011-07-06 | 2020-01-01 | Nxp B.V. | MEMS resonator |
| FI124624B (en) * | 2012-06-29 | 2014-11-14 | Murata Manufacturing Co | Improved oscillating gyroscope |
| US20140230549A1 (en) | 2013-02-19 | 2014-08-21 | Freescale Semiconductor, Inc. | Spring system for mems device |
| WO2014188317A1 (en) | 2013-05-20 | 2014-11-27 | Murata Manufacturing Co., Ltd. | An improved microelectromechanical resonator |
| CN107005223B (zh) | 2014-10-03 | 2021-06-04 | 芬兰国家技术研究中心股份公司 | 温度补偿梁谐振器 |
| US9923545B2 (en) * | 2014-10-22 | 2018-03-20 | Microchip Technology Incorporated | Compound spring MEMS resonators for frequency and timing generation |
| US9866200B2 (en) * | 2014-10-22 | 2018-01-09 | Microchip Technology Incorporated | Multiple coil spring MEMS resonator |
| JP2016099269A (ja) * | 2014-11-25 | 2016-05-30 | セイコーエプソン株式会社 | ジャイロセンサー、電子機器、および移動体 |
| FI20155094A (fi) | 2015-02-11 | 2016-08-12 | Murata Manufacturing Co | Mikromekaaninen kulmanopeusanturi |
| US20160370180A1 (en) | 2015-06-17 | 2016-12-22 | Freescale Semiconductor, Inc. | Inertial sensor with couple spring for common mode rejection |
| EP3311486B1 (en) * | 2015-06-19 | 2020-12-02 | SiTime Corporation | Microelectromechanical resonator |
| WO2017110126A1 (ja) | 2015-12-21 | 2017-06-29 | 株式会社村田製作所 | 共振子及び共振装置 |
| ITUA20162170A1 (it) * | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo |
| WO2017203757A1 (ja) | 2016-05-25 | 2017-11-30 | 株式会社村田製作所 | 共振子及び共振装置 |
| US20180231090A1 (en) | 2016-05-26 | 2018-08-16 | Honeywell International Inc. | Systems and methods for a tuned mass damper in mems resonators |
| EP3444947B1 (en) | 2016-05-26 | 2023-03-22 | Murata Manufacturing Co., Ltd. | Resonator and resonance device |
| CN109155615B (zh) | 2016-06-01 | 2022-08-26 | 株式会社村田制作所 | 谐振子以及谐振装置 |
| WO2017212677A1 (ja) | 2016-06-08 | 2017-12-14 | 株式会社村田製作所 | 共振装置製造方法 |
| WO2018008198A1 (ja) | 2016-07-05 | 2018-01-11 | 株式会社村田製作所 | 共振子及び共振装置 |
| IT201600106928A1 (it) | 2016-10-24 | 2018-04-24 | St Microelectronics Srl | Giroscopio triassiale mems a modulazione di frequenza |
| US10429407B2 (en) | 2017-03-27 | 2019-10-01 | Nxp Usa, Inc. | Three-axis inertial sensor for detecting linear acceleration forces |
| WO2019058632A1 (ja) | 2017-09-19 | 2019-03-28 | 株式会社村田製作所 | 共振子及び共振装置 |
-
2019
- 2019-04-15 FI FI20195305A patent/FI130145B/en active
-
2020
- 2020-04-15 WO PCT/FI2020/050249 patent/WO2020212648A1/en not_active Ceased
- 2020-04-15 CN CN202080028930.1A patent/CN113692707B/zh active Active
- 2020-04-15 JP JP2021559712A patent/JP7590340B2/ja active Active
- 2020-04-15 US US17/602,351 patent/US12323131B2/en active Active
- 2020-04-15 KR KR1020217036930A patent/KR102802116B1/ko active Active
- 2020-04-15 EP EP20790942.5A patent/EP3956983A4/en active Pending
- 2020-04-15 CN CN202512042562.3A patent/CN121690115A/zh active Pending
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