JP2022529131A5 - - Google Patents

Info

Publication number
JP2022529131A5
JP2022529131A5 JP2021559712A JP2021559712A JP2022529131A5 JP 2022529131 A5 JP2022529131 A5 JP 2022529131A5 JP 2021559712 A JP2021559712 A JP 2021559712A JP 2021559712 A JP2021559712 A JP 2021559712A JP 2022529131 A5 JP2022529131 A5 JP 2022529131A5
Authority
JP
Japan
Prior art keywords
resonator
layer
arms
tuning fork
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021559712A
Other languages
English (en)
Japanese (ja)
Other versions
JP7590340B2 (ja
JP2022529131A (ja
Filing date
Publication date
Priority claimed from FI20195305A external-priority patent/FI130145B/en
Application filed filed Critical
Publication of JP2022529131A publication Critical patent/JP2022529131A/ja
Publication of JP2022529131A5 publication Critical patent/JP2022529131A5/ja
Application granted granted Critical
Publication of JP7590340B2 publication Critical patent/JP7590340B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021559712A 2019-04-15 2020-04-15 微小電気機械共振器 Active JP7590340B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20195305 2019-04-15
FI20195305A FI130145B (en) 2019-04-15 2019-04-15 Microelectromechanical resonator
PCT/FI2020/050249 WO2020212648A1 (en) 2019-04-15 2020-04-15 Microelectromechanical resonator

Publications (3)

Publication Number Publication Date
JP2022529131A JP2022529131A (ja) 2022-06-17
JP2022529131A5 true JP2022529131A5 (https=) 2024-05-21
JP7590340B2 JP7590340B2 (ja) 2024-11-26

Family

ID=72837063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021559712A Active JP7590340B2 (ja) 2019-04-15 2020-04-15 微小電気機械共振器

Country Status (7)

Country Link
US (1) US12323131B2 (https=)
EP (1) EP3956983A4 (https=)
JP (1) JP7590340B2 (https=)
KR (1) KR102802116B1 (https=)
CN (2) CN113692707B (https=)
FI (1) FI130145B (https=)
WO (1) WO2020212648A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI129591B (en) 2020-11-06 2022-05-13 Kyocera Tikitin Oy Mems resonator with high quality factor and its use
FR3120700B1 (fr) * 2021-03-10 2023-02-10 Office National Detudes Rech Aerospatiales Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres
FI20216348A1 (en) * 2021-12-23 2023-06-24 Kyocera Tikitin Oy MEMS resonator
CN115236357B (zh) * 2022-07-04 2024-10-18 南京理工大学 具有单锚点固支音叉谐振器的硅微谐振梁加速度计结构
IT202200022845A1 (it) 2022-11-07 2024-05-07 Milano Politecnico Dispositivo meccanico unidirezionale
FI20235493A1 (en) * 2023-05-04 2024-11-05 Kyocera Tech Oy Mems resonator comprising in-phase and out-of-phase elements
FI132024B1 (en) * 2023-09-14 2026-04-17 Kyocera Tech Oy MEMS RESONATOR WITH A COUPLING DEVICE

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6722197B2 (en) 2001-06-19 2004-04-20 Honeywell International Inc. Coupled micromachined structure
US6549099B2 (en) 2001-06-29 2003-04-15 Hewlett-Packard Company Electrically-coupled mechanical band-pass filter
US7068126B2 (en) * 2004-03-04 2006-06-27 Discera Method and apparatus for frequency tuning of a micro-mechanical resonator
US7227432B2 (en) 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
US7420318B1 (en) 2006-03-20 2008-09-02 The United States Of America As Represented By The Secretary Of The Army Lateral piezoelectric microelectromechanical system (MEMS) actuation and sensing device
FR2910742B1 (fr) * 2006-12-22 2009-05-01 Commissariat Energie Atomique Oscillateur mecanique forme d'un reseau d'oscillateurs elementaires
DE102008021175A1 (de) * 2007-05-23 2009-01-15 Sony Corp. Resonator, Oszillator und Kommunikationsvorrichtung
SG190064A1 (en) * 2010-11-08 2013-06-28 Agency Science Tech & Res A piezoelectric resonator
WO2012081457A1 (ja) * 2010-12-15 2012-06-21 株式会社村田製作所 振動ジャイロ
FI126586B (fi) 2011-02-17 2017-02-28 Teknologian Tutkimuskeskus Vtt Oy Uudet mikromekaaniset laitteet
EP2662971B1 (en) * 2011-04-07 2016-01-20 Murata Manufacturing Co., Ltd. Piezoelectric power generator
WO2013005625A1 (ja) 2011-07-04 2013-01-10 株式会社村田製作所 振動子および振動ジャイロ
EP2544370B1 (en) * 2011-07-06 2020-01-01 Nxp B.V. MEMS resonator
FI124624B (en) * 2012-06-29 2014-11-14 Murata Manufacturing Co Improved oscillating gyroscope
US20140230549A1 (en) 2013-02-19 2014-08-21 Freescale Semiconductor, Inc. Spring system for mems device
WO2014188317A1 (en) * 2013-05-20 2014-11-27 Murata Manufacturing Co., Ltd. An improved microelectromechanical resonator
CN107005223B (zh) 2014-10-03 2021-06-04 芬兰国家技术研究中心股份公司 温度补偿梁谐振器
US9923545B2 (en) * 2014-10-22 2018-03-20 Microchip Technology Incorporated Compound spring MEMS resonators for frequency and timing generation
US9866200B2 (en) * 2014-10-22 2018-01-09 Microchip Technology Incorporated Multiple coil spring MEMS resonator
JP2016099269A (ja) 2014-11-25 2016-05-30 セイコーエプソン株式会社 ジャイロセンサー、電子機器、および移動体
FI20155094A (fi) 2015-02-11 2016-08-12 Murata Manufacturing Co Mikromekaaninen kulmanopeusanturi
US20160370180A1 (en) 2015-06-17 2016-12-22 Freescale Semiconductor, Inc. Inertial sensor with couple spring for common mode rejection
CN114726339A (zh) 2015-06-19 2022-07-08 芯时光公司 微机电谐振器
WO2017110126A1 (ja) 2015-12-21 2017-06-29 株式会社村田製作所 共振子及び共振装置
ITUA20162170A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo
CN109075766B (zh) 2016-05-25 2022-04-19 株式会社村田制作所 谐振器和谐振装置
WO2017203741A1 (ja) 2016-05-26 2017-11-30 株式会社村田製作所 共振子及び共振装置
US20180231090A1 (en) 2016-05-26 2018-08-16 Honeywell International Inc. Systems and methods for a tuned mass damper in mems resonators
JP6742601B2 (ja) 2016-06-01 2020-08-19 株式会社村田製作所 共振子及び共振装置
WO2017212677A1 (ja) 2016-06-08 2017-12-14 株式会社村田製作所 共振装置製造方法
WO2018008198A1 (ja) 2016-07-05 2018-01-11 株式会社村田製作所 共振子及び共振装置
IT201600106928A1 (it) 2016-10-24 2018-04-24 St Microelectronics Srl Giroscopio triassiale mems a modulazione di frequenza
US10429407B2 (en) 2017-03-27 2019-10-01 Nxp Usa, Inc. Three-axis inertial sensor for detecting linear acceleration forces
CN111133677B (zh) 2017-09-19 2023-07-18 株式会社村田制作所 谐振器以及谐振装置

Similar Documents

Publication Publication Date Title
JP7590340B2 (ja) 微小電気機械共振器
JP2022529131A5 (https=)
US12328110B2 (en) Microelectromechanical system resonator assembly
EP2603976B1 (en) Micromechanical resonator and method for manufacturing thereof
US8629739B2 (en) Out-of plane MEMS resonator with static out-of-plane deflection
EP1925075B1 (en) Breath-mode ring resonator structure, and method of designing, operating and using same
US7876177B2 (en) Resonator having an output electrode underneath first and second electrode arms
WO2012020173A1 (en) Micromechanical resonator array and method for manufacturing thereof
CN100568720C (zh) 扭转谐振器和采用其的滤波器
US11277112B2 (en) Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
US20250055440A1 (en) Mems resonator
JP2023530743A (ja) Ｍｅｍｓレゾネータおよびその製造方法
US20250070745A1 (en) Mems resonator
WO2022096774A1 (en) Mems resonator with high quality factor and its use
CN117559950A (zh) 一种复合结构微机械谐振器及其加工方法
JP2004276200A (ja) マイクロ構造体およびその製造方法
CN121844496A (zh) 具有耦合器的mems谐振器
JP2026513055A (ja) スラント型共振器
CN121124763A (zh) 一种压电驱动硅基mems谐振器
Olsson et al. Contour mode resonators with acoustic reflectors