JPWO2020164877A5 - - Google Patents

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Publication number
JPWO2020164877A5
JPWO2020164877A5 JP2021547372A JP2021547372A JPWO2020164877A5 JP WO2020164877 A5 JPWO2020164877 A5 JP WO2020164877A5 JP 2021547372 A JP2021547372 A JP 2021547372A JP 2021547372 A JP2021547372 A JP 2021547372A JP WO2020164877 A5 JPWO2020164877 A5 JP WO2020164877A5
Authority
JP
Japan
Prior art keywords
purge gas
duct
vacuum pump
outlet
roughing vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021547372A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022520431A (ja
Publication date
Priority claimed from FR1901520A external-priority patent/FR3092879B1/fr
Application filed filed Critical
Publication of JP2022520431A publication Critical patent/JP2022520431A/ja
Publication of JPWO2020164877A5 publication Critical patent/JPWO2020164877A5/ja
Pending legal-status Critical Current

Links

JP2021547372A 2019-02-14 2020-01-22 ドライタイプの粗引き真空ポンプ Pending JP2022520431A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1901520 2019-02-14
FR1901520A FR3092879B1 (fr) 2019-02-14 2019-02-14 Pompe à vide primaire de type sèche
PCT/EP2020/051542 WO2020164877A1 (fr) 2019-02-14 2020-01-22 Pompe à vide primaire de type sèche

Publications (2)

Publication Number Publication Date
JP2022520431A JP2022520431A (ja) 2022-03-30
JPWO2020164877A5 true JPWO2020164877A5 (fr) 2022-12-20

Family

ID=66776608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021547372A Pending JP2022520431A (ja) 2019-02-14 2020-01-22 ドライタイプの粗引き真空ポンプ

Country Status (8)

Country Link
US (1) US20220120279A1 (fr)
EP (1) EP3924625A1 (fr)
JP (1) JP2022520431A (fr)
KR (1) KR20210126547A (fr)
CN (1) CN113330219A (fr)
FR (1) FR3092879B1 (fr)
TW (1) TWI825265B (fr)
WO (1) WO2020164877A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3129851A1 (fr) * 2021-12-08 2023-06-09 Pfeiffer Vacuum Ligne de vide et installation comportant la ligne de vide
WO2024209194A1 (fr) * 2023-04-05 2024-10-10 Edwards Limited Pompe à vide
CN116428185A (zh) * 2023-04-12 2023-07-14 北京通嘉宏瑞科技有限公司 真空泵以及气体供给系统

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4762980A (en) * 1986-08-07 1988-08-09 Thermar Corporation Electrical resistance fluid heating apparatus
JPH086708B2 (ja) * 1988-03-18 1996-01-29 株式会社日立製作所 真空ポンプ
WO2004036047A1 (fr) * 2002-10-14 2004-04-29 The Boc Group Plc Pompe a vide a piston rotatif pourvue d'un equipement de lavage
US20040118343A1 (en) * 2002-12-18 2004-06-24 Tapp Frederick L. Vacuum chamber load lock purging method and apparatus
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ
KR20060021696A (ko) * 2004-09-03 2006-03-08 삼성전자주식회사 반도체 제조 설비의 진공펌프
GB0519742D0 (en) * 2005-09-28 2005-11-09 Boc Group Plc Method of pumping gas
GB2440341B (en) * 2006-07-24 2011-09-21 Boc Group Plc Vacuum pump
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
JP2011163150A (ja) * 2010-02-05 2011-08-25 Toyota Industries Corp 水素ガスの排気方法及び真空ポンプ装置
KR101286187B1 (ko) * 2011-11-08 2013-07-15 데이비드 김 다단형 건식 진공펌프
FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes
JP5304934B2 (ja) * 2012-07-25 2013-10-02 富士通セミコンダクター株式会社 真空ポンプの運転方法及び半導体装置の製造方法
WO2014052388A1 (fr) * 2012-09-26 2014-04-03 Applied Materials, Inc. Appareil et procédé de purge de composants gazeux
US20140112650A1 (en) * 2012-10-19 2014-04-24 Edwards Vacuum, Inc. Cartridge heater apparatus
JP2014185584A (ja) * 2013-03-22 2014-10-02 Technos:Kk ドライ真空ポンプの内部で副生成物が凝固堆積することを防止する方法及び窒素ガス昇温装置
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus

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