CN113330219A - 干式粗真空泵 - Google Patents

干式粗真空泵 Download PDF

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Publication number
CN113330219A
CN113330219A CN202080010259.8A CN202080010259A CN113330219A CN 113330219 A CN113330219 A CN 113330219A CN 202080010259 A CN202080010259 A CN 202080010259A CN 113330219 A CN113330219 A CN 113330219A
Authority
CN
China
Prior art keywords
vacuum pump
purge gas
duct
stage
purge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080010259.8A
Other languages
English (en)
Chinese (zh)
Inventor
P·德科尔德
A·登格里维尔
P·高迪纳特
Y·格勒尼耶
T·尼尔
Y·勒马康
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Publication of CN113330219A publication Critical patent/CN113330219A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/806—Pipes for fluids; Fittings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CN202080010259.8A 2019-02-14 2020-01-22 干式粗真空泵 Pending CN113330219A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1901520A FR3092879B1 (fr) 2019-02-14 2019-02-14 Pompe à vide primaire de type sèche
FRFR1901520 2019-02-14
PCT/EP2020/051542 WO2020164877A1 (fr) 2019-02-14 2020-01-22 Pompe à vide primaire de type sèche

Publications (1)

Publication Number Publication Date
CN113330219A true CN113330219A (zh) 2021-08-31

Family

ID=66776608

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080010259.8A Pending CN113330219A (zh) 2019-02-14 2020-01-22 干式粗真空泵

Country Status (8)

Country Link
US (1) US20220120279A1 (fr)
EP (1) EP3924625A1 (fr)
JP (1) JP2022520431A (fr)
KR (1) KR20210126547A (fr)
CN (1) CN113330219A (fr)
FR (1) FR3092879B1 (fr)
TW (1) TWI825265B (fr)
WO (1) WO2020164877A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3129851A1 (fr) * 2021-12-08 2023-06-09 Pfeiffer Vacuum Ligne de vide et installation comportant la ligne de vide
CN116428185A (zh) * 2023-04-12 2023-07-14 北京通嘉宏瑞科技有限公司 真空泵以及气体供给系统

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4762980A (en) * 1986-08-07 1988-08-09 Thermar Corporation Electrical resistance fluid heating apparatus
JPH01237397A (ja) * 1988-03-18 1989-09-21 Hitachi Ltd 真空ポンプ
GB0614616D0 (en) * 2006-07-24 2006-08-30 Boc Group Plc Vacuum pump
CN102762867A (zh) * 2009-12-24 2012-10-31 爱德华兹有限公司 具有吹扫气体系统的干式真空泵和吹扫方法
CN103089647A (zh) * 2011-11-08 2013-05-08 大卫·金 多级干式真空泵
US20140112650A1 (en) * 2012-10-19 2014-04-24 Edwards Vacuum, Inc. Cartridge heater apparatus
CN104541061A (zh) * 2012-07-19 2015-04-22 阿迪克森真空产品公司 用于泵浦加工室的方法和设备
CN107250550A (zh) * 2015-02-23 2017-10-13 爱德华兹有限公司 气体供应装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003269250A1 (en) * 2002-10-14 2004-05-04 The Boc Group Plc Rotary piston vacuum pump with washing installation
US20040118343A1 (en) * 2002-12-18 2004-06-24 Tapp Frederick L. Vacuum chamber load lock purging method and apparatus
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ
KR20060021696A (ko) * 2004-09-03 2006-03-08 삼성전자주식회사 반도체 제조 설비의 진공펌프
GB0519742D0 (en) * 2005-09-28 2005-11-09 Boc Group Plc Method of pumping gas
JP5304934B2 (ja) * 2012-07-25 2013-10-02 富士通セミコンダクター株式会社 真空ポンプの運転方法及び半導体装置の製造方法
US10385448B2 (en) * 2012-09-26 2019-08-20 Applied Materials, Inc. Apparatus and method for purging gaseous compounds
JP2014185584A (ja) * 2013-03-22 2014-10-02 Technos:Kk ドライ真空ポンプの内部で副生成物が凝固堆積することを防止する方法及び窒素ガス昇温装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4762980A (en) * 1986-08-07 1988-08-09 Thermar Corporation Electrical resistance fluid heating apparatus
JPH01237397A (ja) * 1988-03-18 1989-09-21 Hitachi Ltd 真空ポンプ
GB0614616D0 (en) * 2006-07-24 2006-08-30 Boc Group Plc Vacuum pump
CN102762867A (zh) * 2009-12-24 2012-10-31 爱德华兹有限公司 具有吹扫气体系统的干式真空泵和吹扫方法
CN103089647A (zh) * 2011-11-08 2013-05-08 大卫·金 多级干式真空泵
CN104541061A (zh) * 2012-07-19 2015-04-22 阿迪克森真空产品公司 用于泵浦加工室的方法和设备
US20140112650A1 (en) * 2012-10-19 2014-04-24 Edwards Vacuum, Inc. Cartridge heater apparatus
CN107250550A (zh) * 2015-02-23 2017-10-13 爱德华兹有限公司 气体供应装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3129851A1 (fr) * 2021-12-08 2023-06-09 Pfeiffer Vacuum Ligne de vide et installation comportant la ligne de vide
WO2023104639A1 (fr) * 2021-12-08 2023-06-15 Pfeiffer Vacuum Ligne de vide et installation comportant la ligne de vide
CN116428185A (zh) * 2023-04-12 2023-07-14 北京通嘉宏瑞科技有限公司 真空泵以及气体供给系统

Also Published As

Publication number Publication date
KR20210126547A (ko) 2021-10-20
EP3924625A1 (fr) 2021-12-22
WO2020164877A1 (fr) 2020-08-20
TWI825265B (zh) 2023-12-11
US20220120279A1 (en) 2022-04-21
TW202043621A (zh) 2020-12-01
JP2022520431A (ja) 2022-03-30
FR3092879A1 (fr) 2020-08-21
FR3092879B1 (fr) 2021-02-19

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SE01 Entry into force of request for substantive examination
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Application publication date: 20210831