TWI825265B - 乾式粗真空泵 - Google Patents

乾式粗真空泵 Download PDF

Info

Publication number
TWI825265B
TWI825265B TW109103240A TW109103240A TWI825265B TW I825265 B TWI825265 B TW I825265B TW 109103240 A TW109103240 A TW 109103240A TW 109103240 A TW109103240 A TW 109103240A TW I825265 B TWI825265 B TW I825265B
Authority
TW
Taiwan
Prior art keywords
vacuum pump
conduit
flushing
flushing gas
gas
Prior art date
Application number
TW109103240A
Other languages
English (en)
Chinese (zh)
Other versions
TW202043621A (zh
Inventor
希瑞 尼爾
皮爾瑞克 格迪納
亞尼克 葛蘭爾
保羅 迪科德
洋恩 萊馬克德
安東尼 登格維爾
Original Assignee
法商普發真空公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 法商普發真空公司 filed Critical 法商普發真空公司
Publication of TW202043621A publication Critical patent/TW202043621A/zh
Application granted granted Critical
Publication of TWI825265B publication Critical patent/TWI825265B/zh

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/806—Pipes for fluids; Fittings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
TW109103240A 2019-02-14 2020-02-03 乾式粗真空泵 TWI825265B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1901520 2019-02-14
FR1901520A FR3092879B1 (fr) 2019-02-14 2019-02-14 Pompe à vide primaire de type sèche

Publications (2)

Publication Number Publication Date
TW202043621A TW202043621A (zh) 2020-12-01
TWI825265B true TWI825265B (zh) 2023-12-11

Family

ID=66776608

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109103240A TWI825265B (zh) 2019-02-14 2020-02-03 乾式粗真空泵

Country Status (8)

Country Link
US (1) US20220120279A1 (fr)
EP (1) EP3924625A1 (fr)
JP (1) JP2022520431A (fr)
KR (1) KR20210126547A (fr)
CN (1) CN113330219A (fr)
FR (1) FR3092879B1 (fr)
TW (1) TWI825265B (fr)
WO (1) WO2020164877A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3129851A1 (fr) * 2021-12-08 2023-06-09 Pfeiffer Vacuum Ligne de vide et installation comportant la ligne de vide
WO2024209194A1 (fr) * 2023-04-05 2024-10-10 Edwards Limited Pompe à vide
CN116428185A (zh) * 2023-04-12 2023-07-14 北京通嘉宏瑞科技有限公司 真空泵以及气体供给系统

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004293466A (ja) * 2003-03-27 2004-10-21 Aisin Seiki Co Ltd 真空ポンプ
TW200509196A (en) * 2002-12-18 2005-03-01 Boc Group Inc Vacuum chamber load lock purging method and apparatus
KR20060021696A (ko) * 2004-09-03 2006-03-08 삼성전자주식회사 반도체 제조 설비의 진공펌프
GB2440341A (en) * 2006-07-24 2008-01-30 Boc Group Plc Vacuum pump with purge gas channel
TW201421533A (zh) * 2012-09-26 2014-06-01 Applied Materials Inc 用於清除氣態化合物之方法及設備

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4762980A (en) * 1986-08-07 1988-08-09 Thermar Corporation Electrical resistance fluid heating apparatus
JPH086708B2 (ja) * 1988-03-18 1996-01-29 株式会社日立製作所 真空ポンプ
WO2004036047A1 (fr) * 2002-10-14 2004-04-29 The Boc Group Plc Pompe a vide a piston rotatif pourvue d'un equipement de lavage
GB0519742D0 (en) * 2005-09-28 2005-11-09 Boc Group Plc Method of pumping gas
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
JP2011163150A (ja) * 2010-02-05 2011-08-25 Toyota Industries Corp 水素ガスの排気方法及び真空ポンプ装置
KR101286187B1 (ko) * 2011-11-08 2013-07-15 데이비드 김 다단형 건식 진공펌프
FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes
JP5304934B2 (ja) * 2012-07-25 2013-10-02 富士通セミコンダクター株式会社 真空ポンプの運転方法及び半導体装置の製造方法
US20140112650A1 (en) * 2012-10-19 2014-04-24 Edwards Vacuum, Inc. Cartridge heater apparatus
JP2014185584A (ja) * 2013-03-22 2014-10-02 Technos:Kk ドライ真空ポンプの内部で副生成物が凝固堆積することを防止する方法及び窒素ガス昇温装置
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200509196A (en) * 2002-12-18 2005-03-01 Boc Group Inc Vacuum chamber load lock purging method and apparatus
JP2004293466A (ja) * 2003-03-27 2004-10-21 Aisin Seiki Co Ltd 真空ポンプ
KR20060021696A (ko) * 2004-09-03 2006-03-08 삼성전자주식회사 반도체 제조 설비의 진공펌프
GB2440341A (en) * 2006-07-24 2008-01-30 Boc Group Plc Vacuum pump with purge gas channel
TW201421533A (zh) * 2012-09-26 2014-06-01 Applied Materials Inc 用於清除氣態化合物之方法及設備

Also Published As

Publication number Publication date
KR20210126547A (ko) 2021-10-20
EP3924625A1 (fr) 2021-12-22
WO2020164877A1 (fr) 2020-08-20
FR3092879B1 (fr) 2021-02-19
TW202043621A (zh) 2020-12-01
FR3092879A1 (fr) 2020-08-21
JP2022520431A (ja) 2022-03-30
CN113330219A (zh) 2021-08-31
US20220120279A1 (en) 2022-04-21

Similar Documents

Publication Publication Date Title
TWI825265B (zh) 乾式粗真空泵
US7861536B2 (en) Ejector controlled twin air source gas turbine pressurizing air system
CN105143787B (zh) 压缩机轴承冷却
RU2661123C2 (ru) Способы и системы для предотвращения протечки смазочного масла в газовых турбинах
CN105051466A (zh) 压缩机轴承冷却
US20180030983A1 (en) Vacuum pump with cooling apparatus
US11149733B2 (en) Liquid-injected compressor or expander element and method for controlling the liquid injection of a compressor or expander device
TWI706084B (zh) 幫浦系統
US12098727B2 (en) Integrated oil system manifold
TW201512542A (zh) 乾燥粗抽真空泵
US12117001B2 (en) Screw compressor with oil injection at multiple volume ratios
CN103423173A (zh) 用于机器的温度控制系统及其操作方法
JP4232505B2 (ja) 真空ポンプ
KR101774065B1 (ko) 진공 펌프용 내부식 샤프트 시일 장치
JP6511321B2 (ja) 給油式容積型圧縮機
CN113518863A (zh) 涡轮分子真空泵和净化方法
RU135742U1 (ru) Система уплотнений турбокомпрессора
TWM645939U (zh) 熱管理系統及真空泵抽系統
JPS6213516B2 (fr)
JPWO2020164877A5 (fr)
RU2525775C1 (ru) Турбонасосный агрегат жрд
RU2713062C1 (ru) Устройство для отвода газа из затрубного пространства нефтяной добывающей скважины
JP2011089455A (ja) シール機構を備えた装置
JPH0335911Y2 (fr)
JPS6215516Y2 (fr)