JPWO2020086710A5 - - Google Patents
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- Publication number
- JPWO2020086710A5 JPWO2020086710A5 JP2021521401A JP2021521401A JPWO2020086710A5 JP WO2020086710 A5 JPWO2020086710 A5 JP WO2020086710A5 JP 2021521401 A JP2021521401 A JP 2021521401A JP 2021521401 A JP2021521401 A JP 2021521401A JP WO2020086710 A5 JPWO2020086710 A5 JP WO2020086710A5
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- opening
- exhaust
- substrate holder
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862751526P | 2018-10-26 | 2018-10-26 | |
| US62/751,526 | 2018-10-26 | ||
| US16/657,787 US11508593B2 (en) | 2018-10-26 | 2019-10-18 | Side storage pods, electronic device processing systems, and methods for operating the same |
| US16/657,787 | 2019-10-18 | ||
| PCT/US2019/057651 WO2020086710A1 (en) | 2018-10-26 | 2019-10-23 | Side storage pods, electronic device processing systems, and methods for operating the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022505397A JP2022505397A (ja) | 2022-01-14 |
| JPWO2020086710A5 true JPWO2020086710A5 (ro) | 2023-02-02 |
| JP7279158B2 JP7279158B2 (ja) | 2023-05-22 |
Family
ID=70327366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021521401A Active JP7279158B2 (ja) | 2018-10-26 | 2019-10-23 | 側部収納ポッド、電子デバイス処理システムおよびその操作方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US11508593B2 (ro) |
| JP (1) | JP7279158B2 (ro) |
| KR (1) | KR102531097B1 (ro) |
| CN (1) | CN112970098B (ro) |
| TW (1) | TWI799658B (ro) |
| WO (1) | WO2020086710A1 (ro) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11373891B2 (en) * | 2018-10-26 | 2022-06-28 | Applied Materials, Inc. | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
| US11508593B2 (en) * | 2018-10-26 | 2022-11-22 | Applied Materials, Inc. | Side storage pods, electronic device processing systems, and methods for operating the same |
| US11244844B2 (en) | 2018-10-26 | 2022-02-08 | Applied Materials, Inc. | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods |
| KR102202463B1 (ko) * | 2019-03-13 | 2021-01-14 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
| US20220310412A1 (en) * | 2021-03-23 | 2022-09-29 | Rorze Technology Incorporated | Gas circulation structure of equipment front end module (efem) |
| TWI823271B (zh) * | 2022-02-24 | 2023-11-21 | 天虹科技股份有限公司 | 基板傳送方法 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2016356C1 (ru) * | 1991-09-24 | 1994-07-15 | Инженерный центр "Плазмодинамика" | Способ защиты сверхчистых поверхностей и устройство для создания потока защитной среды |
| US6415736B1 (en) * | 1999-06-30 | 2002-07-09 | Lam Research Corporation | Gas distribution apparatus for semiconductor processing |
| US6318945B1 (en) * | 1999-07-28 | 2001-11-20 | Brooks Automation, Inc. | Substrate processing apparatus with vertically stacked load lock and substrate transport robot |
| JP4763922B2 (ja) * | 2001-06-25 | 2011-08-31 | 株式会社神戸製鋼所 | 成膜装置及び成膜装置での汚染防止方法 |
| JP2005079250A (ja) * | 2003-08-29 | 2005-03-24 | Hitachi Kokusai Electric Inc | 基板処理装置 |
| JP2006245365A (ja) * | 2005-03-04 | 2006-09-14 | Hitachi High-Technologies Corp | 真空処理装置 |
| JP2009087972A (ja) * | 2007-09-27 | 2009-04-23 | Tokyo Electron Ltd | 基板収容機構及び半導体製造装置 |
| JP2010087169A (ja) * | 2008-09-30 | 2010-04-15 | Tokyo Electron Ltd | 気化器およびそれを用いた成膜装置 |
| JP2011061155A (ja) * | 2009-09-14 | 2011-03-24 | Hitachi Kokusai Electric Inc | 基板処理装置及び基板の搬送方法、並びに半導体装置の製造方法 |
| KR101090350B1 (ko) * | 2011-02-07 | 2011-12-07 | 우범제 | 퓸 제거장치 및 이를 이용한 반도체 제조장치 |
| KR101215962B1 (ko) | 2012-07-30 | 2012-12-27 | 이프로링크텍(주) | Ｅｆｅｍ의 버퍼 스토리지 박스 |
| TW201413780A (zh) * | 2012-09-24 | 2014-04-01 | Eugene Technology Co Ltd | 煙氣移除設備及基板處理設備 |
| US20140261803A1 (en) * | 2013-03-15 | 2014-09-18 | Lam Research Corporation | High strip rate downstream chamber |
| KR101682473B1 (ko) * | 2013-10-18 | 2016-12-05 | 삼성전자주식회사 | 사이드 스토리지 및 이를 구비하는 반도체 소자 제조 설비 |
| TWI678751B (zh) * | 2013-12-13 | 2019-12-01 | 日商昕芙旎雅股份有限公司 | 設備前端模組（ｅｆｅｍ） |
| KR102162366B1 (ko) * | 2014-01-21 | 2020-10-06 | 우범제 | 퓸 제거 장치 |
| US9881826B2 (en) * | 2014-10-24 | 2018-01-30 | Lam Research Corporation | Buffer station with single exit-flow direction |
| US9711353B2 (en) * | 2015-02-13 | 2017-07-18 | Panasonic Corporation | Method for manufacturing compound semiconductor epitaxial substrates including heating of carrier gas |
| KR101637498B1 (ko) | 2015-03-24 | 2016-07-07 | 피코앤테라(주) | 웨이퍼 수납용기 |
| JP6431440B2 (ja) * | 2015-05-27 | 2018-11-28 | 信越ポリマー株式会社 | 基板収納容器 |
| JP6450653B2 (ja) * | 2015-06-24 | 2019-01-09 | 東京エレクトロン株式会社 | 格納ユニット、搬送装置、及び、基板処理システム |
| EP4102549A1 (en) * | 2016-08-30 | 2022-12-14 | Brooks Automation (Germany) GmbH | Reticle compartment and diffusor plate |
| KR20180045316A (ko) * | 2016-10-25 | 2018-05-04 | 삼성전자주식회사 | 설비 전방 단부 모듈 및 이를 포함하는 반도체 제조 장치 |
| US10159169B2 (en) * | 2016-10-27 | 2018-12-18 | Applied Materials, Inc. | Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods |
| KR20180074276A (ko) | 2016-12-23 | 2018-07-03 | 피코앤테라(주) | 이에프이엠 |
| CN117276150B (zh) * | 2017-06-23 | 2024-06-04 | 应用材料公司 | 可索引侧储存仓设备、加热的侧储存仓设备、系统和方法 |
| US10388547B2 (en) * | 2017-06-23 | 2019-08-20 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for processing substrates |
| US11508593B2 (en) * | 2018-10-26 | 2022-11-22 | Applied Materials, Inc. | Side storage pods, electronic device processing systems, and methods for operating the same |
| JP2020161544A (ja) * | 2019-03-25 | 2020-10-01 | 住友金属鉱山株式会社 | 成膜装置および成膜方法 |
-
2019
- 2019-10-18 US US16/657,787 patent/US11508593B2/en active Active
- 2019-10-23 CN CN201980070776.1A patent/CN112970098B/zh active Active
- 2019-10-23 JP JP2021521401A patent/JP7279158B2/ja active Active
- 2019-10-23 WO PCT/US2019/057651 patent/WO2020086710A1/en active Application Filing
- 2019-10-23 KR KR1020217015669A patent/KR102531097B1/ko active IP Right Grant
- 2019-10-24 TW TW108138359A patent/TWI799658B/zh active
-
2022
- 2022-11-11 US US17/985,680 patent/US11791185B2/en active Active
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