JPWO2020060954A5 - - Google Patents
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- Publication number
- JPWO2020060954A5 JPWO2020060954A5 JP2021514985A JP2021514985A JPWO2020060954A5 JP WO2020060954 A5 JPWO2020060954 A5 JP WO2020060954A5 JP 2021514985 A JP2021514985 A JP 2021514985A JP 2021514985 A JP2021514985 A JP 2021514985A JP WO2020060954 A5 JPWO2020060954 A5 JP WO2020060954A5
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- electron emitter
- substrate
- photocathode structure
- photocathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 claims 19
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 12
- 239000000758 substrate Substances 0.000 claims 11
- 238000000034 method Methods 0.000 claims 7
- 229910052759 nickel Inorganic materials 0.000 claims 7
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 6
- LYQFWZFBNBDLEO-UHFFFAOYSA-M caesium bromide Chemical compound [Br-].[Cs+] LYQFWZFBNBDLEO-UHFFFAOYSA-M 0.000 claims 6
- 229910052697 platinum Inorganic materials 0.000 claims 6
- 229910052707 ruthenium Inorganic materials 0.000 claims 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 5
- 229910045601 alloy Inorganic materials 0.000 claims 5
- 239000000956 alloy Substances 0.000 claims 5
- 229910052782 aluminium Inorganic materials 0.000 claims 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 5
- 229910052804 chromium Inorganic materials 0.000 claims 5
- 239000011651 chromium Substances 0.000 claims 5
- 229910052802 copper Inorganic materials 0.000 claims 5
- 239000010949 copper Substances 0.000 claims 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 5
- 229910052737 gold Inorganic materials 0.000 claims 5
- 239000010931 gold Substances 0.000 claims 5
- 229910052709 silver Inorganic materials 0.000 claims 5
- 239000004332 silver Substances 0.000 claims 5
- 238000010894 electron beam technology Methods 0.000 claims 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- 229910002601 GaN Inorganic materials 0.000 claims 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 3
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Inorganic materials [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 claims 3
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- 101000912874 Schizosaccharomyces pombe (strain 972 / ATCC 24843) Iron-sensing transcriptional repressor Proteins 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 2
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 2
- 239000005350 fused silica glass Substances 0.000 claims 2
- 239000010453 quartz Substances 0.000 claims 2
- 229910052594 sapphire Inorganic materials 0.000 claims 2
- 239000010980 sapphire Substances 0.000 claims 2
- 238000000231 atomic layer deposition Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 238000012856 packing Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862732937P | 2018-09-18 | 2018-09-18 | |
| US62/732,937 | 2018-09-18 | ||
| US16/259,317 US10714295B2 (en) | 2018-09-18 | 2019-01-28 | Metal encapsulated photocathode electron emitter |
| US16/259,317 | 2019-01-28 | ||
| PCT/US2019/051372 WO2020060954A1 (en) | 2018-09-18 | 2019-09-17 | Metal encapsulated photocathode electron emitter |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022501772A JP2022501772A (ja) | 2022-01-06 |
| JPWO2020060954A5 true JPWO2020060954A5 (enExample) | 2022-09-22 |
| JP7185772B2 JP7185772B2 (ja) | 2022-12-07 |
Family
ID=69773104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021514985A Active JP7185772B2 (ja) | 2018-09-18 | 2019-09-17 | 金属封入光電陰極電子エミッタ |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10714295B2 (enExample) |
| JP (1) | JP7185772B2 (enExample) |
| KR (1) | KR102545439B1 (enExample) |
| CN (2) | CN118263073A (enExample) |
| DE (1) | DE112019004659T5 (enExample) |
| IL (1) | IL281346B2 (enExample) |
| TW (1) | TWI800681B (enExample) |
| WO (1) | WO2020060954A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11495428B2 (en) * | 2019-02-17 | 2022-11-08 | Kla Corporation | Plasmonic photocathode emitters at ultraviolet and visible wavelengths |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3706885A (en) * | 1971-01-29 | 1972-12-19 | Gen Electric | Photocathode-phosphor imaging system for x-ray camera tubes |
| US4008106A (en) * | 1975-11-13 | 1977-02-15 | The United States Of America As Represented By The Secretary Of The Army | Method of fabricating III-V photocathodes |
| US5684360A (en) * | 1995-07-10 | 1997-11-04 | Intevac, Inc. | Electron sources utilizing negative electron affinity photocathodes with ultra-small emission areas |
| US6005247A (en) | 1997-10-01 | 1999-12-21 | Intevac, Inc. | Electron beam microscope using electron beam patterns |
| KR100423849B1 (ko) * | 2001-09-11 | 2004-03-22 | 한국과학기술원 | 매우 얇은 보호막을 갖는 광음극 |
| US7015467B2 (en) | 2002-10-10 | 2006-03-21 | Applied Materials, Inc. | Generating electrons with an activated photocathode |
| US20100025796A1 (en) | 2008-08-04 | 2010-02-04 | Amir Massoud Dabiran | Microchannel plate photocathode |
| US10197501B2 (en) | 2011-12-12 | 2019-02-05 | Kla-Tencor Corporation | Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors |
| US9601299B2 (en) * | 2012-08-03 | 2017-03-21 | Kla-Tencor Corporation | Photocathode including silicon substrate with boron layer |
| CN104561901A (zh) | 2013-10-22 | 2015-04-29 | 中国科学院上海硅酸盐研究所 | 一种掺铊的碘化铯复合薄膜及其制备方法 |
| US10748730B2 (en) * | 2015-05-21 | 2020-08-18 | Kla-Tencor Corporation | Photocathode including field emitter array on a silicon substrate with boron layer |
| US10141155B2 (en) | 2016-12-20 | 2018-11-27 | Kla-Tencor Corporation | Electron beam emitters with ruthenium coating |
| US10395884B2 (en) * | 2017-10-10 | 2019-08-27 | Kla-Tencor Corporation | Ruthenium encapsulated photocathode electron emitter |
-
2019
- 2019-01-28 US US16/259,317 patent/US10714295B2/en active Active
- 2019-09-10 TW TW108132517A patent/TWI800681B/zh active
- 2019-09-17 CN CN202311361910.8A patent/CN118263073A/zh active Pending
- 2019-09-17 DE DE112019004659.4T patent/DE112019004659T5/de active Pending
- 2019-09-17 IL IL281346A patent/IL281346B2/en unknown
- 2019-09-17 JP JP2021514985A patent/JP7185772B2/ja active Active
- 2019-09-17 CN CN201980059591.0A patent/CN112673448A/zh active Pending
- 2019-09-17 KR KR1020217011219A patent/KR102545439B1/ko active Active
- 2019-09-17 WO PCT/US2019/051372 patent/WO2020060954A1/en not_active Ceased
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