JP2020537295A5 - - Google Patents
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- Publication number
- JP2020537295A5 JP2020537295A5 JP2020520025A JP2020520025A JP2020537295A5 JP 2020537295 A5 JP2020537295 A5 JP 2020537295A5 JP 2020520025 A JP2020520025 A JP 2020520025A JP 2020520025 A JP2020520025 A JP 2020520025A JP 2020537295 A5 JP2020537295 A5 JP 2020537295A5
- Authority
- JP
- Japan
- Prior art keywords
- electron emitter
- protective film
- photocathode
- photocathode structure
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 claims 16
- 238000000034 method Methods 0.000 claims 11
- 239000003513 alkali Substances 0.000 claims 4
- 150000004820 halides Chemical class 0.000 claims 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 3
- 229910052707 ruthenium Inorganic materials 0.000 claims 3
- LYQFWZFBNBDLEO-UHFFFAOYSA-M caesium bromide Chemical compound [Br-].[Cs+] LYQFWZFBNBDLEO-UHFFFAOYSA-M 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 1
- 229910001260 Pt alloy Inorganic materials 0.000 claims 1
- 229910000929 Ru alloy Inorganic materials 0.000 claims 1
- 238000000231 atomic layer deposition Methods 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 238000012856 packing Methods 0.000 claims 1
- 229910052700 potassium Inorganic materials 0.000 claims 1
- 239000011591 potassium Substances 0.000 claims 1
- 239000011241 protective layer Substances 0.000 claims 1
- 229910052708 sodium Inorganic materials 0.000 claims 1
- 239000011734 sodium Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762570438P | 2017-10-10 | 2017-10-10 | |
| US62/570,438 | 2017-10-10 | ||
| US16/150,675 | 2018-10-03 | ||
| US16/150,675 US10395884B2 (en) | 2017-10-10 | 2018-10-03 | Ruthenium encapsulated photocathode electron emitter |
| PCT/US2018/055287 WO2019075116A1 (en) | 2017-10-10 | 2018-10-10 | PHOTOCATHODE ELECTRON EMITTER ENCAPSULATED IN RUTHENIUM |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020537295A JP2020537295A (ja) | 2020-12-17 |
| JP2020537295A5 true JP2020537295A5 (enExample) | 2021-11-18 |
| JP7084989B2 JP7084989B2 (ja) | 2022-06-15 |
Family
ID=75984106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020520025A Active JP7084989B2 (ja) | 2017-10-10 | 2018-10-10 | ルテニウムで被包された光電陰極電子放出器 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10395884B2 (enExample) |
| EP (1) | EP3695431B1 (enExample) |
| JP (1) | JP7084989B2 (enExample) |
| WO (1) | WO2019075116A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10714294B2 (en) | 2018-05-25 | 2020-07-14 | Kla-Tencor Corporation | Metal protective layer for electron emitters with a diffusion barrier |
| US10714295B2 (en) * | 2018-09-18 | 2020-07-14 | Kla-Tencor Corporation | Metal encapsulated photocathode electron emitter |
| US11495428B2 (en) | 2019-02-17 | 2022-11-08 | Kla Corporation | Plasmonic photocathode emitters at ultraviolet and visible wavelengths |
| US11217416B2 (en) * | 2019-09-27 | 2022-01-04 | Kla Corporation | Plasmonic photocathode emitters |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61121233A (ja) * | 1984-11-16 | 1986-06-09 | Hitachi Ltd | 含浸形陰極の製造方法 |
| US5363021A (en) | 1993-07-12 | 1994-11-08 | Cornell Research Foundation, Inc. | Massively parallel array cathode |
| JPH0936025A (ja) * | 1995-07-14 | 1997-02-07 | Nec Corp | 電子ビーム露光法及び装置 |
| US6956193B2 (en) * | 2002-06-06 | 2005-10-18 | The Regents Of The University Of California | Highly sensitive imaging camera for space applications including detection of ultrahigh energy cosmic rays |
| US7015467B2 (en) | 2002-10-10 | 2006-03-21 | Applied Materials, Inc. | Generating electrons with an activated photocathode |
| CN1518049A (zh) * | 2003-01-28 | 2004-08-04 | ������������ʽ���� | 电子显微镜 |
| US7074719B2 (en) | 2003-11-28 | 2006-07-11 | International Business Machines Corporation | ALD deposition of ruthenium |
| KR101159074B1 (ko) * | 2006-01-14 | 2012-06-25 | 삼성전자주식회사 | 도전성 탄소나노튜브 팁, 이를 구비한 스캐닝 프로브마이크로스코프의 탐침 및 상기 도전성 탄소나노튜브 팁의제조 방법 |
| CN101105488B (zh) | 2006-07-14 | 2011-01-26 | 鸿富锦精密工业（深圳）有限公司 | 逸出功的测量方法 |
| WO2008101714A2 (en) | 2007-02-22 | 2008-08-28 | Applied Materials Israel, Ltd. | High throughput sem tool |
| JP5390846B2 (ja) | 2008-12-09 | 2014-01-15 | 東京エレクトロン株式会社 | プラズマエッチング装置及びプラズマクリーニング方法 |
| US8664853B1 (en) * | 2012-06-13 | 2014-03-04 | Calabazas Creek Research, Inc. | Sintered wire cesium dispenser photocathode |
| US9601299B2 (en) | 2012-08-03 | 2017-03-21 | Kla-Tencor Corporation | Photocathode including silicon substrate with boron layer |
| JP6192097B2 (ja) | 2013-05-31 | 2017-09-06 | 国立研究開発法人物質・材料研究機構 | フォトカソード型電子線源、その作成方法及びフォトカソード型電子線源システム |
| US9984846B2 (en) | 2016-06-30 | 2018-05-29 | Kla-Tencor Corporation | High brightness boron-containing electron beam emitters for use in a vacuum environment |
| US10141155B2 (en) | 2016-12-20 | 2018-11-27 | Kla-Tencor Corporation | Electron beam emitters with ruthenium coating |
| US20180191265A1 (en) * | 2016-12-30 | 2018-07-05 | John Bennett | Photo-electric switch system and method |
| CN106842729B (zh) * | 2017-04-10 | 2019-08-20 | 深圳市华星光电技术有限公司 | 石墨烯电极制备方法及液晶显示面板 |
-
2018
- 2018-10-03 US US16/150,675 patent/US10395884B2/en active Active
- 2018-10-10 WO PCT/US2018/055287 patent/WO2019075116A1/en not_active Ceased
- 2018-10-10 EP EP18865695.3A patent/EP3695431B1/en active Active
- 2018-10-10 JP JP2020520025A patent/JP7084989B2/ja active Active
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