JP2021039271A5 - - Google Patents
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- Publication number
- JP2021039271A5 JP2021039271A5 JP2019161217A JP2019161217A JP2021039271A5 JP 2021039271 A5 JP2021039271 A5 JP 2021039271A5 JP 2019161217 A JP2019161217 A JP 2019161217A JP 2019161217 A JP2019161217 A JP 2019161217A JP 2021039271 A5 JP2021039271 A5 JP 2021039271A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin film
- substrate
- base material
- multilayer reflective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims description 56
- 239000000758 substrate Substances 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 17
- 230000001681 protective effect Effects 0.000 claims description 10
- 239000006096 absorbing agent Substances 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 229910052727 yttrium Inorganic materials 0.000 claims description 5
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 5
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 claims description 4
- 238000002042 time-of-flight secondary ion mass spectrometry Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000010955 niobium Substances 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 8
- 238000001755 magnetron sputter deposition Methods 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000005422 blasting Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019161217A JP7379027B2 (ja) | 2019-09-04 | 2019-09-04 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに半導体装置の製造方法 |
| US17/626,330 US12105411B2 (en) | 2019-09-04 | 2020-08-24 | Substrate with multilayer reflective film, reflective mask blank, reflective mask, and method for manufacturing semiconductor device |
| PCT/JP2020/031888 WO2021044890A1 (ja) | 2019-09-04 | 2020-08-24 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに半導体装置の製造方法 |
| KR1020227000193A KR20220054280A (ko) | 2019-09-04 | 2020-08-24 | 다층 반사막 부착 기판, 반사형 마스크 블랭크 및 반사형 마스크, 그리고 반도체 장치의 제조 방법 |
| TW109129900A TWI879795B (zh) | 2019-09-04 | 2020-09-01 | 附多層反射膜之基板、反射型光罩基底及反射型光罩、以及半導體裝置之製造方法 |
| TW114109937A TW202527069A (zh) | 2019-09-04 | 2020-09-01 | 反射型光罩基底、反射型光罩、及半導體裝置之製造方法 |
| JP2023187512A JP7612809B2 (ja) | 2019-09-04 | 2023-11-01 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019161217A JP7379027B2 (ja) | 2019-09-04 | 2019-09-04 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに半導体装置の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023187512A Division JP7612809B2 (ja) | 2019-09-04 | 2023-11-01 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021039271A JP2021039271A (ja) | 2021-03-11 |
| JP2021039271A5 true JP2021039271A5 (enExample) | 2022-08-23 |
| JP7379027B2 JP7379027B2 (ja) | 2023-11-14 |
Family
ID=74847072
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019161217A Active JP7379027B2 (ja) | 2019-09-04 | 2019-09-04 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに半導体装置の製造方法 |
| JP2023187512A Active JP7612809B2 (ja) | 2019-09-04 | 2023-11-01 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに半導体装置の製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023187512A Active JP7612809B2 (ja) | 2019-09-04 | 2023-11-01 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに半導体装置の製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12105411B2 (enExample) |
| JP (2) | JP7379027B2 (enExample) |
| KR (1) | KR20220054280A (enExample) |
| TW (2) | TW202527069A (enExample) |
| WO (1) | WO2021044890A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20240007154A (ko) * | 2021-05-14 | 2024-01-16 | 에이지씨 가부시키가이샤 | 반사형 마스크 블랭크 및 그 제조 방법, 그리고 해당 마스크 블랭크용의 반사층을 구비한 기판 |
| US12353120B2 (en) * | 2021-07-30 | 2025-07-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | EUV photo masks and manufacturing method thereof |
| WO2023037980A1 (ja) * | 2021-09-07 | 2023-03-16 | Hoya株式会社 | 多層反射膜付き基板、反射型マスクブランク、反射型マスク、及び半導体装置の製造方法 |
| JP7567742B2 (ja) | 2021-10-01 | 2024-10-16 | 信越化学工業株式会社 | 反射型マスクブランク用膜付き基板、反射型マスクブランク、及び反射型マスクの製造方法 |
| JP7669321B2 (ja) * | 2022-09-01 | 2025-04-28 | 信越化学工業株式会社 | 反射型マスクブランクおよび反射型マスクの製造方法 |
| JP7681153B1 (ja) * | 2024-04-11 | 2025-05-21 | テクセンドフォトマスク株式会社 | 反射型フォトマスクブランク、反射型フォトマスク及び反射型フォトマスクの製造方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2887618B2 (ja) * | 1990-09-21 | 1999-04-26 | 信越半導体株式会社 | 半導体ウェーハ表面の分析方法 |
| AU2003248251A1 (en) | 2002-07-09 | 2004-01-23 | Nikon Corporation | Exposure system |
| AU2003257547A1 (en) | 2002-08-19 | 2004-03-03 | Hoya Corporation | Mask blank manufacturing method, transfer mask manufacturing method, sputtering target for manufacturing mask blank |
| JP2006176819A (ja) * | 2004-12-22 | 2006-07-06 | Nikon Corp | 成膜装置、成膜方法、多層膜反射鏡及びｅｕｖ露光装置 |
| KR100699858B1 (ko) | 2005-08-03 | 2007-03-27 | 삼성전자주식회사 | 극자외선 리소그래피용 반사 디바이스 및 그 제조 방법 및이를 적용한 극자외선 리소그래피용 마스크, 프로젝션광학계 및 리소그래피 장치 |
| US7504185B2 (en) | 2005-10-03 | 2009-03-17 | Asahi Glass Company, Limited | Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithography |
| TWI394294B (zh) | 2007-01-26 | 2013-04-21 | Shinetsu Handotai Kk | Light emitting element and manufacturing method thereof |
| KR101669690B1 (ko) | 2008-10-30 | 2016-10-27 | 아사히 가라스 가부시키가이샤 | Ｅｕｖ 리소그래피용 반사형 마스크 블랭크 |
| US8562794B2 (en) | 2010-12-14 | 2013-10-22 | Asahi Glass Company, Limited | Process for producing reflective mask blank for EUV lithography and process for producing substrate with functional film for the mask blank |
| KR101857844B1 (ko) | 2011-02-04 | 2018-05-14 | 아사히 가라스 가부시키가이샤 | 도전막이 형성된 기판, 다층 반사막이 형성된 기판, 및 ｅｕｖ 리소그래피용 반사형 마스크 블랭크 |
| US8734907B2 (en) | 2012-02-02 | 2014-05-27 | Sematech, Inc. | Coating of shield surfaces in deposition systems |
| US20150111134A1 (en) | 2012-03-14 | 2015-04-23 | Hoya Corporation | Mask blank and method of manufacturing a transfer mask |
| JP2014095122A (ja) * | 2012-11-09 | 2014-05-22 | Ulvac Japan Ltd | マグネトロンスパッタ装置 |
| JP2014148706A (ja) * | 2013-01-31 | 2014-08-21 | Hoya Corp | 薄膜付き基板の製造装置及び製造方法、並びに転写用マスクの製造方法 |
| KR102109129B1 (ko) | 2013-07-02 | 2020-05-08 | 삼성전자주식회사 | 반사형 포토마스크 블랭크 및 반사형 포토마스크 |
| JP6316861B2 (ja) | 2016-03-24 | 2018-04-25 | Hoya株式会社 | 成膜装置の立ち上げ方法、マスクブランクの製造方法、転写用マスクの製造方法および半導体デバイスの製造方法 |
| JP6873758B2 (ja) * | 2016-03-28 | 2021-05-19 | Hoya株式会社 | 基板の製造方法、多層反射膜付き基板の製造方法、マスクブランクの製造方法、及び転写用マスクの製造方法 |
-
2019
- 2019-09-04 JP JP2019161217A patent/JP7379027B2/ja active Active
-
2020
- 2020-08-24 KR KR1020227000193A patent/KR20220054280A/ko active Pending
- 2020-08-24 WO PCT/JP2020/031888 patent/WO2021044890A1/ja not_active Ceased
- 2020-08-24 US US17/626,330 patent/US12105411B2/en active Active
- 2020-09-01 TW TW114109937A patent/TW202527069A/zh unknown
- 2020-09-01 TW TW109129900A patent/TWI879795B/zh active
-
2023
- 2023-11-01 JP JP2023187512A patent/JP7612809B2/ja active Active
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