JP7185772B2 - 金属封入光電陰極電子エミッタ - Google Patents

金属封入光電陰極電子エミッタ Download PDF

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Publication number
JP7185772B2
JP7185772B2 JP2021514985A JP2021514985A JP7185772B2 JP 7185772 B2 JP7185772 B2 JP 7185772B2 JP 2021514985 A JP2021514985 A JP 2021514985A JP 2021514985 A JP2021514985 A JP 2021514985A JP 7185772 B2 JP7185772 B2 JP 7185772B2
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JP
Japan
Prior art keywords
protective film
electron emitter
photocathode
substrate
photocathode structure
Prior art date
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English (en)
Japanese (ja)
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JPWO2020060954A5 (enExample
JP2022501772A (ja
Inventor
ギルダルド デルガド
カテリナ イオアケイミディ
フランシス ヒル
ゲイリー ロペス
ルディ エフ ガルシア
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KLA Corp
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KLA Corp
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Publication of JPWO2020060954A5 publication Critical patent/JPWO2020060954A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/34—Photo-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/32—Secondary-electron-emitting electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3423—Semiconductors, e.g. GaAs, NEA emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3425—Metals, metal alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3426—Alkaline metal compounds, e.g. Na-K-Sb
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06333—Photo emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
JP2021514985A 2018-09-18 2019-09-17 金属封入光電陰極電子エミッタ Active JP7185772B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862732937P 2018-09-18 2018-09-18
US62/732,937 2018-09-18
US16/259,317 US10714295B2 (en) 2018-09-18 2019-01-28 Metal encapsulated photocathode electron emitter
US16/259,317 2019-01-28
PCT/US2019/051372 WO2020060954A1 (en) 2018-09-18 2019-09-17 Metal encapsulated photocathode electron emitter

Publications (3)

Publication Number Publication Date
JP2022501772A JP2022501772A (ja) 2022-01-06
JPWO2020060954A5 JPWO2020060954A5 (enExample) 2022-09-22
JP7185772B2 true JP7185772B2 (ja) 2022-12-07

Family

ID=69773104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021514985A Active JP7185772B2 (ja) 2018-09-18 2019-09-17 金属封入光電陰極電子エミッタ

Country Status (8)

Country Link
US (1) US10714295B2 (enExample)
JP (1) JP7185772B2 (enExample)
KR (1) KR102545439B1 (enExample)
CN (2) CN118263073A (enExample)
DE (1) DE112019004659T5 (enExample)
IL (1) IL281346B2 (enExample)
TW (1) TWI800681B (enExample)
WO (1) WO2020060954A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11495428B2 (en) * 2019-02-17 2022-11-08 Kla Corporation Plasmonic photocathode emitters at ultraviolet and visible wavelengths

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3706885A (en) 1971-01-29 1972-12-19 Gen Electric Photocathode-phosphor imaging system for x-ray camera tubes
US20100025796A1 (en) 2008-08-04 2010-02-04 Amir Massoud Dabiran Microchannel plate photocathode
CN104561901A (zh) 2013-10-22 2015-04-29 中国科学院上海硅酸盐研究所 一种掺铊的碘化铯复合薄膜及其制备方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4008106A (en) * 1975-11-13 1977-02-15 The United States Of America As Represented By The Secretary Of The Army Method of fabricating III-V photocathodes
US5684360A (en) * 1995-07-10 1997-11-04 Intevac, Inc. Electron sources utilizing negative electron affinity photocathodes with ultra-small emission areas
US6005247A (en) 1997-10-01 1999-12-21 Intevac, Inc. Electron beam microscope using electron beam patterns
KR100423849B1 (ko) * 2001-09-11 2004-03-22 한국과학기술원 매우 얇은 보호막을 갖는 광음극
US7015467B2 (en) 2002-10-10 2006-03-21 Applied Materials, Inc. Generating electrons with an activated photocathode
US10197501B2 (en) 2011-12-12 2019-02-05 Kla-Tencor Corporation Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors
US9601299B2 (en) * 2012-08-03 2017-03-21 Kla-Tencor Corporation Photocathode including silicon substrate with boron layer
US10748730B2 (en) * 2015-05-21 2020-08-18 Kla-Tencor Corporation Photocathode including field emitter array on a silicon substrate with boron layer
US10141155B2 (en) 2016-12-20 2018-11-27 Kla-Tencor Corporation Electron beam emitters with ruthenium coating
US10395884B2 (en) 2017-10-10 2019-08-27 Kla-Tencor Corporation Ruthenium encapsulated photocathode electron emitter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3706885A (en) 1971-01-29 1972-12-19 Gen Electric Photocathode-phosphor imaging system for x-ray camera tubes
US20100025796A1 (en) 2008-08-04 2010-02-04 Amir Massoud Dabiran Microchannel plate photocathode
CN104561901A (zh) 2013-10-22 2015-04-29 中国科学院上海硅酸盐研究所 一种掺铊的碘化铯复合薄膜及其制备方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Eric J. Montgomery et al.，Electron emission from alkali-coated metal photocathodes，2010 IEEE International Vacuum Electronics Conference (IVEC)，2010年05月，pp.79-80

Also Published As

Publication number Publication date
IL281346B2 (en) 2024-08-01
KR20210046820A (ko) 2021-04-28
CN118263073A (zh) 2024-06-28
US20200090895A1 (en) 2020-03-19
DE112019004659T5 (de) 2021-06-17
TW202025197A (zh) 2020-07-01
TWI800681B (zh) 2023-05-01
JP2022501772A (ja) 2022-01-06
IL281346B1 (en) 2024-04-01
US10714295B2 (en) 2020-07-14
WO2020060954A1 (en) 2020-03-26
CN112673448A (zh) 2021-04-16
IL281346A (en) 2021-04-29
KR102545439B1 (ko) 2023-06-20

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