JPWO2019199681A5 - - Google Patents

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JPWO2019199681A5
JPWO2019199681A5 JP2020554282A JP2020554282A JPWO2019199681A5 JP WO2019199681 A5 JPWO2019199681 A5 JP WO2019199681A5 JP 2020554282 A JP2020554282 A JP 2020554282A JP 2020554282 A JP2020554282 A JP 2020554282A JP WO2019199681 A5 JPWO2019199681 A5 JP WO2019199681A5
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power
substrate
processing
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gas
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JP2021520639A (ja
JP7407121B2 (ja
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JP2020554282A 2018-04-09 2019-04-08 パターニング用途のためのカーボンハードマスク及び関連方法 Active JP7407121B2 (ja)

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Application Number Priority Date Filing Date Title
US201862655049P 2018-04-09 2018-04-09
US62/655,049 2018-04-09
PCT/US2019/026354 WO2019199681A1 (en) 2018-04-09 2019-04-08 Carbon hard masks for patterning applications and methods related thereto

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JP2021520639A JP2021520639A (ja) 2021-08-19
JPWO2019199681A5 true JPWO2019199681A5 (zh) 2022-04-18
JP7407121B2 JP7407121B2 (ja) 2023-12-28

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US (2) US11469097B2 (zh)
JP (1) JP7407121B2 (zh)
KR (1) KR102687561B1 (zh)
CN (1) CN111954921B (zh)
SG (1) SG11202009406RA (zh)
TW (2) TW202318505A (zh)
WO (1) WO2019199681A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
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