JPWO2017164183A1 - 圧電センサ - Google Patents
圧電センサ Download PDFInfo
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- JPWO2017164183A1 JPWO2017164183A1 JP2018507342A JP2018507342A JPWO2017164183A1 JP WO2017164183 A1 JPWO2017164183 A1 JP WO2017164183A1 JP 2018507342 A JP2018507342 A JP 2018507342A JP 2018507342 A JP2018507342 A JP 2018507342A JP WO2017164183 A1 JPWO2017164183 A1 JP WO2017164183A1
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- 230000003321 amplification Effects 0.000 claims abstract description 82
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 82
- 230000010354 integration Effects 0.000 claims description 35
- 238000000034 method Methods 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000005520 cutting process Methods 0.000 abstract description 6
- 239000003990 capacitor Substances 0.000 description 15
- 238000002485 combustion reaction Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 9
- 230000000903 blocking effect Effects 0.000 description 7
- 230000006870 function Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
圧電センサの回路素子を集積した集積回路110に、不揮発性メモリ111を内蔵し、書込み端子114からデータを書込むことで、増幅抵抗a107を変化させ、増幅率の調整を行う。
Description
この圧電センサにおいて、前記書込み端子が、前記単一の集積回路と外部とを接続する外部接続用コネクタに設けられていることを特徴とすることができる。
この圧電センサにおいて、前記書込み端子が、前記単一の集積回路と外部とを接続する外部接続用コネクタに設けられていることを特徴とすることができる。
この圧電センサにおいて、前記書込み端子が、前記単一の集積回路と外部とを接続する外部接続用コネクタに設けられていることを特徴とすることができる。
Claims (6)
- 圧力を検知するための圧電素子と、
前記圧電素子から出力された電流信号を積分して電圧信号に変換する積分回路と、
前記積分回路の出力を増幅し、外部に出力する増幅回路と、
前記増幅回路から出力された出力信号のオフセット電圧を規定する基準電圧源と、
前記増幅回路の増幅率を設定する情報を記憶する書込み可能なメモリと、
前記情報を前記メモリに書き込むための書込み端子と
を備え、
前記積分回路、前記増幅回路、前記基準電圧源および前記メモリが、単一の集積回路に収められていること
を特徴とする圧電センサ。 - 前記書込み端子が、前記単一の集積回路と外部とを接続する外部接続用コネクタに設けられていることを特徴とする請求項1記載の圧電センサ。
- 圧力を検知するための圧電素子と、
前記圧電素子から出力された電流信号を積分して電圧信号に変換する積分回路と、
前記積分回路の出力を増幅し、外部に出力する増幅回路と、
前記増幅回路から出力された出力信号のオフセット電圧を規定する基準電圧源と、
前記基準電圧源の前記オフセット電圧を設定する情報を記憶する書込み可能なメモリと、
前記情報を前記メモリに書き込むための書込み端子と
を備え、
前記積分回路、前記増幅回路、前記基準電圧源および前記メモリが、単一の集積回路に収められていることを特徴とする圧電センサ。 - 前記書込み端子が、前記単一の集積回路と外部とを接続する外部接続用コネクタに設けられていることを特徴とする請求項3記載の圧電センサ。
- 圧力を検知するための圧電素子と、
前記圧電素子から出力された電流信号を積分して電圧信号に変換する積分回路と、
前記積分回路の出力を増幅し、外部に出力する増幅回路と、
前記増幅回路から出力された出力信号のオフセット電圧を規定する基準電圧源と、
前記増幅回路の出力を規定範囲に制限するためのクリップ回路と、
前記クリップ回路のクリップ電圧を設定する情報を記憶する書込み可能なメモリと、
前記情報を前記メモリに書き込むための書込み端子と
を備え、
前記積分回路、前記増幅回路、前記基準電圧源、前記クリップ回路および前記メモリが、単一の集積回路に収められていることを特徴とする圧電センサ。 - 前記書込み端子が、前記単一の集積回路と外部とを接続する外部接続用コネクタに設けられていることを特徴とする請求項5記載の圧電センサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016060213 | 2016-03-24 | ||
JP2016060213 | 2016-03-24 | ||
PCT/JP2017/011258 WO2017164183A1 (ja) | 2016-03-24 | 2017-03-21 | 圧電センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017164183A1 true JPWO2017164183A1 (ja) | 2019-01-31 |
JP6496080B2 JP6496080B2 (ja) | 2019-04-03 |
Family
ID=59899507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018507342A Active JP6496080B2 (ja) | 2016-03-24 | 2017-03-21 | 圧電センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US11506555B2 (ja) |
EP (1) | EP3435052B1 (ja) |
JP (1) | JP6496080B2 (ja) |
CN (1) | CN108885151A (ja) |
WO (1) | WO2017164183A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020084804A (ja) * | 2018-11-19 | 2020-06-04 | 株式会社ミクニ | 圧力検出信号処理装置、エンジン制御システム、および、プログラム |
CN109857287B (zh) * | 2019-02-18 | 2022-03-29 | 广东小天才科技有限公司 | 输入设备、划线长度获取方法、装置及存储介质 |
CN113904308B (zh) * | 2021-10-13 | 2022-06-14 | 山东大学 | 一种用于压电传感器短路的防护电路及感知方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2720718B2 (ja) * | 1992-07-09 | 1998-03-04 | 株式会社デンソー | 半導体センサ装置 |
JP2896371B2 (ja) * | 1986-05-05 | 1999-05-31 | テキサス インスツルメンツ インコーポレイテツド | 圧力センサ |
JPH11148878A (ja) * | 1997-11-14 | 1999-06-02 | Jeco Co Ltd | 圧力センサのドリフト低減回路及びリセット方式 |
JP2005308503A (ja) * | 2004-04-20 | 2005-11-04 | Toyoda Mach Works Ltd | 半導体センサ |
JP2009115484A (ja) * | 2007-11-02 | 2009-05-28 | Citizen Finetech Miyota Co Ltd | 内燃機関の燃焼圧検出装置 |
JP2014102115A (ja) * | 2012-11-19 | 2014-06-05 | Saginomiya Seisakusho Inc | 圧力検知ユニット及びその製造方法 |
Family Cites Families (14)
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US4951236A (en) | 1986-05-05 | 1990-08-21 | Texas Instruments Incorporated | Low cost high precision sensor |
US4982351A (en) | 1986-05-05 | 1991-01-01 | Texas Instruments Incorporated | Low cost high precision sensor |
US5051937A (en) | 1986-05-05 | 1991-09-24 | Texas Instruments Incorporated | Low cost high precision sensor |
JP2001186771A (ja) | 1999-10-15 | 2001-07-06 | Seiko Epson Corp | チョッパ回路、チョッパ回路の制御方法、チョッパ式充電回路、電子機器及び計時装置 |
US6424211B1 (en) | 2000-06-26 | 2002-07-23 | Microchip Technology Incorporated | Digital trimming of OP AMP offset voltage and quiescent current using non-volatile memory |
US7180798B2 (en) | 2001-04-12 | 2007-02-20 | Fuji Electric Co., Ltd. | Semiconductor physical quantity sensing device |
JP2006078379A (ja) * | 2004-09-10 | 2006-03-23 | Tgk Co Ltd | 圧力センサおよびその製造方法 |
JP2010154394A (ja) * | 2008-12-26 | 2010-07-08 | Citizen Finetech Miyota Co Ltd | チャージアンプ回路 |
JP5883290B2 (ja) * | 2011-12-28 | 2016-03-09 | シチズンファインデバイス株式会社 | 圧力検出装置およびチャージアンプ回路 |
JP5901982B2 (ja) * | 2012-01-30 | 2016-04-13 | シチズンファインデバイス株式会社 | 検出システムおよび検出装置 |
EP3657145B1 (en) * | 2014-03-27 | 2022-06-22 | Citizen Finedevice Co., Ltd. | Pressure detection device |
CN106461483A (zh) | 2014-03-27 | 2017-02-22 | 西铁城精密器件株式会社 | 压力检测装置 |
US10054509B2 (en) * | 2014-03-27 | 2018-08-21 | Citizen Finedevice Co., Ltd. | Pressure detection device |
JP6370151B2 (ja) | 2014-07-31 | 2018-08-08 | エイブリック株式会社 | 半導体集積回路装置及びその出力電圧調整方法 |
-
2017
- 2017-03-21 CN CN201780018579.6A patent/CN108885151A/zh active Pending
- 2017-03-21 WO PCT/JP2017/011258 patent/WO2017164183A1/ja active Application Filing
- 2017-03-21 JP JP2018507342A patent/JP6496080B2/ja active Active
- 2017-03-21 US US16/086,402 patent/US11506555B2/en active Active
- 2017-03-21 EP EP17770225.5A patent/EP3435052B1/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2896371B2 (ja) * | 1986-05-05 | 1999-05-31 | テキサス インスツルメンツ インコーポレイテツド | 圧力センサ |
JP2720718B2 (ja) * | 1992-07-09 | 1998-03-04 | 株式会社デンソー | 半導体センサ装置 |
JPH11148878A (ja) * | 1997-11-14 | 1999-06-02 | Jeco Co Ltd | 圧力センサのドリフト低減回路及びリセット方式 |
JP2005308503A (ja) * | 2004-04-20 | 2005-11-04 | Toyoda Mach Works Ltd | 半導体センサ |
JP2009115484A (ja) * | 2007-11-02 | 2009-05-28 | Citizen Finetech Miyota Co Ltd | 内燃機関の燃焼圧検出装置 |
JP2014102115A (ja) * | 2012-11-19 | 2014-06-05 | Saginomiya Seisakusho Inc | 圧力検知ユニット及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20190086281A1 (en) | 2019-03-21 |
EP3435052B1 (en) | 2023-01-04 |
EP3435052A4 (en) | 2019-10-30 |
JP6496080B2 (ja) | 2019-04-03 |
US11506555B2 (en) | 2022-11-22 |
WO2017164183A1 (ja) | 2017-09-28 |
EP3435052A1 (en) | 2019-01-30 |
CN108885151A (zh) | 2018-11-23 |
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