JPWO2017104516A1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JPWO2017104516A1 JPWO2017104516A1 JP2017556002A JP2017556002A JPWO2017104516A1 JP WO2017104516 A1 JPWO2017104516 A1 JP WO2017104516A1 JP 2017556002 A JP2017556002 A JP 2017556002A JP 2017556002 A JP2017556002 A JP 2017556002A JP WO2017104516 A1 JPWO2017104516 A1 JP WO2017104516A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 103
- 238000001514 detection method Methods 0.000 claims abstract description 32
- 239000000463 material Substances 0.000 claims abstract description 17
- 239000011229 interlayer Substances 0.000 claims description 30
- 239000010410 layer Substances 0.000 claims description 19
- 238000002161 passivation Methods 0.000 claims description 17
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 13
- 229910016570 AlCu Inorganic materials 0.000 claims description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims description 5
- 239000011574 phosphorus Substances 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 36
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 244000025254 Cannabis sativa Species 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- HIVGXUNKSAJJDN-UHFFFAOYSA-N [Si].[P] Chemical compound [Si].[P] HIVGXUNKSAJJDN-UHFFFAOYSA-N 0.000 description 1
- MXSJNBRAMXILSE-UHFFFAOYSA-N [Si].[P].[B] Chemical compound [Si].[P].[B] MXSJNBRAMXILSE-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7815—Vertical DMOS transistors, i.e. VDMOS transistors with voltage or current sensing structure, e.g. emulator section, overcurrent sensing cell
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- H—ELECTRICITY
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- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
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- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
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- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
2 半導体基板
4 表面電極膜
5 ソース側表面電極
6 センス側表面電極
7 ゲート側表面電極
10 パッシベーション膜
12 パッド開口
15 センス側パッド
23 センス側ワイヤ
26 電流センス部
27 ソース部
34 主電流側単位セル
40 センス側単位セル
54 層間絶縁膜
55 第1部分
56 第2部分
57 第3部分
61 接合領域
Claims (13)
- SiCからなる半導体層と、
前記半導体層に形成され、主電流側の第1単位セルを含むソース部と、
前記半導体層に形成され、電流検出側の第2単位セルを含む電流センス部と、
前記ソース部の上方に配置されたソース側表面電極と、
前記電流センス部の上方を少なくとも一部に含むように配置されたセンス側表面電極とを含み、
前記第2単位セルは、前記センス側表面電極の下方で、かつ配線材の接合部分の直下部を避けた位置に配置されている、半導体装置。 - 前記電流センス部と前記センス側表面電極との間に配置された層間絶縁膜と、
前記層間絶縁膜よりも下方に形成されたゲート絶縁膜とを含み、
前記層間絶縁膜は、前記ゲート絶縁膜よりも厚く形成されている、請求項1に記載の半導体装置。 - 前記電流センス部は、前記ソース部に囲まれた領域に形成されている、請求項1または2に記載の半導体装置。
- 前記センス側表面電極の前記第2単位セルの直上部を選択的に覆い、前記センス側表面電極の一部をセンス側パッドとして露出させる開口を有するパッシベーション膜を含む、請求項1〜3のいずれか一項に記載の半導体装置。
- 前記第1単位セルおよび前記第2単位セルは、互いに同じセル構造を有している、請求項1〜4のいずれか一項に記載の半導体装置。
- 前記電流センス部は、前記半導体層の面内方向において一カ所のみに形成されている、請求項1〜5のいずれか一項に記載の半導体装置。
- 前記層間絶縁膜は、1μm以上の厚さを有している、請求項2に記載の半導体装置。
- 前記半導体層上に配置され、配線材が接合されるゲート側接合領域を有するゲート側表面電極を含み、
前記層間絶縁膜は、前記ゲート側接合領域の直下部にも配置されている、請求項2または7に記載の半導体装置。 - 前記層間絶縁膜は、SiO2膜を含む、請求項2、7または8に記載の半導体装置。
- 前記SiO2膜は、P(リン)を含有している、請求項9に記載の半導体装置。
- 前記SiO2膜は、B(ホウ素)を含有している、請求項9に記載の半導体装置。
- 前記センス側表面電極は、下側からTi、TiNおよびAlCuの順に積層した積層構造からなる電極を含む、請求項1〜11のいずれか一項に記載の半導体装置。
- 前記半導体層上に配置されたゲート側表面電極と、
前記センス側表面電極の一部をセンス側パッドとして露出させる開口および前記ゲート側表面電極の一部をゲート側パッドとして露出させる開口を有するパッシベーション膜とを含み、
前記センス側パッドおよび前記ゲート側パッドは、互いに同じ方向に長手な形状に形成されている、請求項1〜3のいずれか一項に記載の半導体装置。
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JP2015247727 | 2015-12-18 | ||
JP2015247727 | 2015-12-18 | ||
PCT/JP2016/086445 WO2017104516A1 (ja) | 2015-12-18 | 2016-12-07 | 半導体装置 |
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JP2020207091A Pending JP2021048417A (ja) | 2015-12-18 | 2020-12-14 | 半導体装置 |
JP2021148258A Active JP7247289B2 (ja) | 2015-12-18 | 2021-09-13 | 半導体装置 |
JP2022016155A Active JP7336550B2 (ja) | 2015-12-18 | 2022-02-04 | 半導体装置 |
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JP (5) | JP6896646B2 (ja) |
CN (3) | CN115458605A (ja) |
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JP6896646B2 (ja) | 2021-06-30 |
US11215647B2 (en) | 2022-01-04 |
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US10705123B2 (en) | 2020-07-07 |
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US20230273245A1 (en) | 2023-08-31 |
CN115498042A (zh) | 2022-12-20 |
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